JP2000124435A5 - - Google Patents
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- Publication number
- JP2000124435A5 JP2000124435A5 JP1998297003A JP29700398A JP2000124435A5 JP 2000124435 A5 JP2000124435 A5 JP 2000124435A5 JP 1998297003 A JP1998297003 A JP 1998297003A JP 29700398 A JP29700398 A JP 29700398A JP 2000124435 A5 JP2000124435 A5 JP 2000124435A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- region
- light receiving
- receiving pixels
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000758 substrate Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 9
- 230000001681 protective effect Effects 0.000 claims 3
- 238000010030 laminating Methods 0.000 claims 2
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000010410 layer Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000000926 separation method Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 238000002955 isolation Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10297003A JP2000124435A (ja) | 1998-10-19 | 1998-10-19 | 固体撮像素子及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10297003A JP2000124435A (ja) | 1998-10-19 | 1998-10-19 | 固体撮像素子及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000124435A JP2000124435A (ja) | 2000-04-28 |
| JP2000124435A5 true JP2000124435A5 (enExample) | 2005-09-22 |
Family
ID=17840999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10297003A Pending JP2000124435A (ja) | 1998-10-19 | 1998-10-19 | 固体撮像素子及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000124435A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100781495B1 (ko) * | 2001-11-06 | 2007-11-30 | 매그나칩 반도체 유한회사 | 이미지 센서 및 그 제조방법 |
| JP2003264284A (ja) | 2002-03-08 | 2003-09-19 | Sanyo Electric Co Ltd | 固体撮像素子及びその製造方法 |
| JP4442157B2 (ja) * | 2003-08-20 | 2010-03-31 | ソニー株式会社 | 光電変換装置及び固体撮像装置 |
| JP2010206009A (ja) * | 2009-03-04 | 2010-09-16 | Toshiba Corp | 撮像装置及びその製造方法、並びに撮像方法 |
-
1998
- 1998-10-19 JP JP10297003A patent/JP2000124435A/ja active Pending
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