JP2000124435A - 固体撮像素子及びその製造方法 - Google Patents
固体撮像素子及びその製造方法Info
- Publication number
- JP2000124435A JP2000124435A JP10297003A JP29700398A JP2000124435A JP 2000124435 A JP2000124435 A JP 2000124435A JP 10297003 A JP10297003 A JP 10297003A JP 29700398 A JP29700398 A JP 29700398A JP 2000124435 A JP2000124435 A JP 2000124435A
- Authority
- JP
- Japan
- Prior art keywords
- region
- light
- semiconductor substrate
- receiving pixels
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title description 8
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 230000001681 protective effect Effects 0.000 claims abstract description 22
- 238000003384 imaging method Methods 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 14
- 238000009792 diffusion process Methods 0.000 abstract description 14
- 229910052710 silicon Inorganic materials 0.000 abstract description 14
- 239000010703 silicon Substances 0.000 abstract description 14
- 239000010410 layer Substances 0.000 description 21
- 238000000926 separation method Methods 0.000 description 19
- 238000002955 isolation Methods 0.000 description 11
- 239000011229 interlayer Substances 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000005380 borophosphosilicate glass Substances 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10297003A JP2000124435A (ja) | 1998-10-19 | 1998-10-19 | 固体撮像素子及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10297003A JP2000124435A (ja) | 1998-10-19 | 1998-10-19 | 固体撮像素子及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000124435A true JP2000124435A (ja) | 2000-04-28 |
| JP2000124435A5 JP2000124435A5 (enExample) | 2005-09-22 |
Family
ID=17840999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10297003A Pending JP2000124435A (ja) | 1998-10-19 | 1998-10-19 | 固体撮像素子及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000124435A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003264284A (ja) * | 2002-03-08 | 2003-09-19 | Sanyo Electric Co Ltd | 固体撮像素子及びその製造方法 |
| KR100781495B1 (ko) * | 2001-11-06 | 2007-11-30 | 매그나칩 반도체 유한회사 | 이미지 센서 및 그 제조방법 |
| CN100433342C (zh) * | 2003-08-20 | 2008-11-12 | 索尼株式会社 | 光电转换设备和固体图像拾取设备及其驱动和制造方法 |
| JP2010206009A (ja) * | 2009-03-04 | 2010-09-16 | Toshiba Corp | 撮像装置及びその製造方法、並びに撮像方法 |
-
1998
- 1998-10-19 JP JP10297003A patent/JP2000124435A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100781495B1 (ko) * | 2001-11-06 | 2007-11-30 | 매그나칩 반도체 유한회사 | 이미지 센서 및 그 제조방법 |
| JP2003264284A (ja) * | 2002-03-08 | 2003-09-19 | Sanyo Electric Co Ltd | 固体撮像素子及びその製造方法 |
| US6936873B2 (en) | 2002-03-08 | 2005-08-30 | Sanyo Electric Co., Ltd. | Solid state imaging device and method for manufacturing solid state imaging device |
| CN100433342C (zh) * | 2003-08-20 | 2008-11-12 | 索尼株式会社 | 光电转换设备和固体图像拾取设备及其驱动和制造方法 |
| JP2010206009A (ja) * | 2009-03-04 | 2010-09-16 | Toshiba Corp | 撮像装置及びその製造方法、並びに撮像方法 |
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Legal Events
| Date | Code | Title | Description |
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| A621 | Written request for application examination |
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| RD01 | Notification of change of attorney |
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| A977 | Report on retrieval |
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