JP2000097840A - 走査型プローブ顕微鏡 - Google Patents

走査型プローブ顕微鏡

Info

Publication number
JP2000097840A
JP2000097840A JP10266028A JP26602898A JP2000097840A JP 2000097840 A JP2000097840 A JP 2000097840A JP 10266028 A JP10266028 A JP 10266028A JP 26602898 A JP26602898 A JP 26602898A JP 2000097840 A JP2000097840 A JP 2000097840A
Authority
JP
Japan
Prior art keywords
probe
sample
scanning
moving
probe microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP10266028A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000097840A5 (enExample
Inventor
Tatsuya Miyatani
竜也 宮谷
Kunio Nakajima
邦雄 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP10266028A priority Critical patent/JP2000097840A/ja
Publication of JP2000097840A publication Critical patent/JP2000097840A/ja
Publication of JP2000097840A5 publication Critical patent/JP2000097840A5/ja
Withdrawn legal-status Critical Current

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  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Control Of Position Or Direction (AREA)
JP10266028A 1998-09-21 1998-09-21 走査型プローブ顕微鏡 Withdrawn JP2000097840A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10266028A JP2000097840A (ja) 1998-09-21 1998-09-21 走査型プローブ顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10266028A JP2000097840A (ja) 1998-09-21 1998-09-21 走査型プローブ顕微鏡

Publications (2)

Publication Number Publication Date
JP2000097840A true JP2000097840A (ja) 2000-04-07
JP2000097840A5 JP2000097840A5 (enExample) 2005-03-17

Family

ID=17425394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10266028A Withdrawn JP2000097840A (ja) 1998-09-21 1998-09-21 走査型プローブ顕微鏡

Country Status (1)

Country Link
JP (1) JP2000097840A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004341608A (ja) * 2003-05-13 2004-12-02 Mitsutoyo Corp 機械装置
WO2006106949A1 (ja) * 2005-03-31 2006-10-12 National University Corporation Gunma University 走査型プローブ顕微鏡、試料表面形状の計測方法、及びプローブ装置
JP2007218803A (ja) * 2006-02-17 2007-08-30 Research Institute Of Biomolecule Metrology Co Ltd 走査型プローブ顕微鏡システム及び観察方法
JP2010044063A (ja) * 2008-07-21 2010-02-25 Park Systems Corp 傾斜試料ステージを備える走査型プローブ顕微鏡
WO2013087726A1 (en) * 2011-12-12 2013-06-20 Universität Basel Method and device for controlling a scanning probe microscope
WO2014090971A1 (en) * 2012-12-12 2014-06-19 Universität Basel Method and device for controlling a scanning probe microscope
JP2018044791A (ja) * 2016-09-12 2018-03-22 大日本印刷株式会社 走査型プローブ顕微鏡および走査型プローブ顕微鏡を用いた走査方法

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004341608A (ja) * 2003-05-13 2004-12-02 Mitsutoyo Corp 機械装置
WO2006106949A1 (ja) * 2005-03-31 2006-10-12 National University Corporation Gunma University 走査型プローブ顕微鏡、試料表面形状の計測方法、及びプローブ装置
JP2007218803A (ja) * 2006-02-17 2007-08-30 Research Institute Of Biomolecule Metrology Co Ltd 走査型プローブ顕微鏡システム及び観察方法
JP2010044063A (ja) * 2008-07-21 2010-02-25 Park Systems Corp 傾斜試料ステージを備える走査型プローブ顕微鏡
CN104067133A (zh) * 2011-12-12 2014-09-24 巴塞尔大学 用于控制扫描探针显微镜的方法及装置
WO2013087726A1 (en) * 2011-12-12 2013-06-20 Universität Basel Method and device for controlling a scanning probe microscope
JP2015500990A (ja) * 2011-12-12 2015-01-08 ウニヴェルズィテート バーゼル 走査型プローブ顕微鏡制御方法及び走査型プローブ顕微鏡装置
US9244095B2 (en) 2011-12-12 2016-01-26 Universitat Basel Method and device for controlling a scanning probe microscope
WO2014090971A1 (en) * 2012-12-12 2014-06-19 Universität Basel Method and device for controlling a scanning probe microscope
CN104981700A (zh) * 2012-12-12 2015-10-14 巴塞尔大学 控制扫描探针显微镜的方法及装置
JP2015537227A (ja) * 2012-12-12 2015-12-24 ウニヴェルズィテート バーゼル 走査型プローブ顕微鏡を制御するための方法及び装置
US9500670B2 (en) 2012-12-12 2016-11-22 Universitat Basel Method and device for controlling a scanning probe microscope
JP2018044791A (ja) * 2016-09-12 2018-03-22 大日本印刷株式会社 走査型プローブ顕微鏡および走査型プローブ顕微鏡を用いた走査方法

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