JP2000097840A5 - - Google Patents

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Publication number
JP2000097840A5
JP2000097840A5 JP1998266028A JP26602898A JP2000097840A5 JP 2000097840 A5 JP2000097840 A5 JP 2000097840A5 JP 1998266028 A JP1998266028 A JP 1998266028A JP 26602898 A JP26602898 A JP 26602898A JP 2000097840 A5 JP2000097840 A5 JP 2000097840A5
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JP
Japan
Prior art keywords
probe
scanning
sample
moving
probe microscope
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Application number
JP1998266028A
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English (en)
Japanese (ja)
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JP2000097840A (ja
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Priority to JP10266028A priority Critical patent/JP2000097840A/ja
Priority claimed from JP10266028A external-priority patent/JP2000097840A/ja
Publication of JP2000097840A publication Critical patent/JP2000097840A/ja
Publication of JP2000097840A5 publication Critical patent/JP2000097840A5/ja
Withdrawn legal-status Critical Current

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JP10266028A 1998-09-21 1998-09-21 走査型プローブ顕微鏡 Withdrawn JP2000097840A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10266028A JP2000097840A (ja) 1998-09-21 1998-09-21 走査型プローブ顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10266028A JP2000097840A (ja) 1998-09-21 1998-09-21 走査型プローブ顕微鏡

Publications (2)

Publication Number Publication Date
JP2000097840A JP2000097840A (ja) 2000-04-07
JP2000097840A5 true JP2000097840A5 (enExample) 2005-03-17

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ID=17425394

Family Applications (1)

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JP10266028A Withdrawn JP2000097840A (ja) 1998-09-21 1998-09-21 走査型プローブ顕微鏡

Country Status (1)

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JP (1) JP2000097840A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004341608A (ja) * 2003-05-13 2004-12-02 Mitsutoyo Corp 機械装置
JP2006284392A (ja) * 2005-03-31 2006-10-19 Gunma Univ 走査型プローブ顕微鏡、試料表面形状の計測方法、及びプローブ装置
JP2007218803A (ja) * 2006-02-17 2007-08-30 Research Institute Of Biomolecule Metrology Co Ltd 走査型プローブ顕微鏡システム及び観察方法
US20100017920A1 (en) * 2008-07-21 2010-01-21 Park San-Il Scanning probe microscope with tilted sample stage
PL2791688T3 (pl) * 2011-12-12 2021-12-13 Universität Basel Sposób i urządzenie do sterowania mikroskopem sondy skanującej
EP2932277B1 (en) * 2012-12-12 2024-04-03 Universität Basel Method and device for controlling a scanning probe microscope
JP2018044791A (ja) * 2016-09-12 2018-03-22 大日本印刷株式会社 走査型プローブ顕微鏡および走査型プローブ顕微鏡を用いた走査方法

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