JP2000073976A - 真空ポンプの改良 - Google Patents

真空ポンプの改良

Info

Publication number
JP2000073976A
JP2000073976A JP11206610A JP20661099A JP2000073976A JP 2000073976 A JP2000073976 A JP 2000073976A JP 11206610 A JP11206610 A JP 11206610A JP 20661099 A JP20661099 A JP 20661099A JP 2000073976 A JP2000073976 A JP 2000073976A
Authority
JP
Japan
Prior art keywords
pump
rotor
inlet
shaft
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11206610A
Other languages
English (en)
Japanese (ja)
Inventor
Nigel Paul Schofield
ポール ショーフィールド ナイジェル
Michael Henry North
ヘンリー ノース マイケル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9813048.7A external-priority patent/GB9813048D0/en
Priority claimed from GBGB9814659.0A external-priority patent/GB9814659D0/en
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Publication of JP2000073976A publication Critical patent/JP2000073976A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0078—Fixing rotors on shafts, e.g. by clamping together hub and shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/20—Geometry of the rotor
    • F04C2250/201—Geometry of the rotor conical shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
JP11206610A 1998-06-17 1999-06-16 真空ポンプの改良 Pending JP2000073976A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GBGB9813048.7A GB9813048D0 (en) 1998-06-17 1998-06-17 Improvements in vacuum pumps
GB9814659:0 1998-07-07
GB9813048:7 1998-07-07
GBGB9814659.0A GB9814659D0 (en) 1998-07-07 1998-07-07 Improvements in screw pumps

Publications (1)

Publication Number Publication Date
JP2000073976A true JP2000073976A (ja) 2000-03-07

Family

ID=26313883

Family Applications (3)

Application Number Title Priority Date Filing Date
JP11206610A Pending JP2000073976A (ja) 1998-06-17 1999-06-16 真空ポンプの改良
JP20661299A Expired - Lifetime JP4388167B2 (ja) 1998-06-17 1999-06-16 真空ポンプの改良
JP11206611A Pending JP2000064976A (ja) 1998-06-17 1999-06-16 スクリュ―ポンプの改良

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP20661299A Expired - Lifetime JP4388167B2 (ja) 1998-06-17 1999-06-16 真空ポンプの改良
JP11206611A Pending JP2000064976A (ja) 1998-06-17 1999-06-16 スクリュ―ポンプの改良

Country Status (4)

Country Link
US (2) US6200116B1 (enExample)
EP (3) EP0965758B1 (enExample)
JP (3) JP2000073976A (enExample)
DE (2) DE69929749T2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005085643A1 (ja) * 2004-03-02 2005-09-15 Tadahiro Ohmi 真空ポンプ
US7828535B2 (en) 2005-03-10 2010-11-09 Alan Notis Pressure sealed tapered screw pump/motor

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19963173B4 (de) * 1999-12-27 2011-05-19 Leybold Vakuum Gmbh Schraubenvakuumpumpe
GB0004404D0 (en) * 2000-02-24 2000-04-12 Boc Group Plc Improvements in vacuum pumps
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US20070081893A1 (en) * 2005-10-06 2007-04-12 The Boc Group, Inc. Pump apparatus for semiconductor processing
GB0525378D0 (en) * 2005-12-13 2006-01-18 Boc Group Plc Screw Pump
JP2007170341A (ja) * 2005-12-26 2007-07-05 Toyota Industries Corp スクリュー式流体機械
TWI438342B (zh) * 2006-07-28 2014-05-21 Lot Vacuum Co Ltd 具有魯式與螺旋轉子之複合型乾式真空幫浦
DE102010014884A1 (de) * 2010-04-14 2011-10-20 Baratti Engineering Gmbh Vakuumpumpe
JP6377839B2 (ja) * 2015-03-31 2018-08-22 株式会社日立産機システム ガス圧縮機
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
GB2606224B (en) * 2021-04-30 2024-01-31 Edwards Ltd Stator for a vacuum pump

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2511878A (en) * 1950-06-20 Rathman
US678570A (en) * 1900-10-22 1901-07-16 William Anthony Jones Motor.
US1191423A (en) * 1913-01-15 1916-07-18 H & S Pump Company Pump.
GB384355A (en) * 1931-08-05 1932-12-08 Frederick Charles Greenfield Improvements in and relating to rotary machines for the compression and propulsion of
US2079083A (en) * 1935-03-29 1937-05-04 Imo Industri Ab Fluid meter
NL282778A (enExample) * 1960-12-15
FR1309885A (fr) * 1960-12-15 1962-11-23 Ishikawajima Harima Heavy Ind Machine rotative pour la compression de gaz ou agissant inversement comme moteur
US3180559A (en) * 1962-04-11 1965-04-27 John R Boyd Mechanical vacuum pump
CH613258A5 (enExample) * 1975-09-24 1979-09-14 Suter Fa Alois
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
JPS59208077A (ja) * 1983-05-11 1984-11-26 Hitachi Ltd テ−パ状スクリユ−ロ−タの製造方法
JPH06100082B2 (ja) * 1986-10-24 1994-12-12 株式会社日立製作所 スクリユ流体機械
JP2619468B2 (ja) * 1988-04-06 1997-06-11 株式会社日立製作所 無給油式スクリュー流体機械
JPH01267384A (ja) * 1988-04-15 1989-10-25 Hitachi Ltd 勾配歯を有するスクリューロータ
JPH08144977A (ja) * 1994-11-24 1996-06-04 Kashiyama Kogyo Kk 複合ドライ真空ポンプ
DE19522555A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Rotationskolbenverdichter mit zwei Rotoren
US6019586A (en) * 1998-01-20 2000-02-01 Sunny King Machinery Co., Ltd. Gradationally contracted screw compression equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005085643A1 (ja) * 2004-03-02 2005-09-15 Tadahiro Ohmi 真空ポンプ
JP2005248741A (ja) * 2004-03-02 2005-09-15 Tadahiro Omi 真空ポンプ
US7686600B2 (en) 2004-03-02 2010-03-30 Foundation For Advancement Of International Science Vaccum pump having shaft seal to prevent corrosion and to ensure smooth operation
US7828535B2 (en) 2005-03-10 2010-11-09 Alan Notis Pressure sealed tapered screw pump/motor

Also Published As

Publication number Publication date
EP0965757A3 (en) 2001-01-31
DE69928172T2 (de) 2006-07-13
EP0965756A2 (en) 1999-12-22
EP0965758A3 (en) 2001-01-31
EP0965758B1 (en) 2005-11-09
DE69929749T2 (de) 2006-08-24
US6217305B1 (en) 2001-04-17
EP0965756A3 (en) 2001-01-31
EP0965758A2 (en) 1999-12-22
JP4388167B2 (ja) 2009-12-24
JP2000064975A (ja) 2000-03-03
JP2000064976A (ja) 2000-03-03
US6200116B1 (en) 2001-03-13
DE69929749D1 (de) 2006-04-20
EP0965756B1 (en) 2006-02-08
EP0965757A2 (en) 1999-12-22
DE69928172D1 (de) 2005-12-15

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