JP2000064976A5 - - Google Patents

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Publication number
JP2000064976A5
JP2000064976A5 JP1999206611A JP20661199A JP2000064976A5 JP 2000064976 A5 JP2000064976 A5 JP 2000064976A5 JP 1999206611 A JP1999206611 A JP 1999206611A JP 20661199 A JP20661199 A JP 20661199A JP 2000064976 A5 JP2000064976 A5 JP 2000064976A5
Authority
JP
Japan
Prior art keywords
shaft
rotor
screw pump
pump
bearing support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999206611A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000064976A (ja
Filing date
Publication date
Priority claimed from GBGB9813048.7A external-priority patent/GB9813048D0/en
Priority claimed from GBGB9814659.0A external-priority patent/GB9814659D0/en
Application filed filed Critical
Publication of JP2000064976A publication Critical patent/JP2000064976A/ja
Publication of JP2000064976A5 publication Critical patent/JP2000064976A5/ja
Pending legal-status Critical Current

Links

JP11206611A 1998-06-17 1999-06-16 スクリュ―ポンプの改良 Pending JP2000064976A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GBGB9813048.7A GB9813048D0 (en) 1998-06-17 1998-06-17 Improvements in vacuum pumps
GB9813048:7 1998-07-07
GB9814659:0 1998-07-07
GBGB9814659.0A GB9814659D0 (en) 1998-07-07 1998-07-07 Improvements in screw pumps

Publications (2)

Publication Number Publication Date
JP2000064976A JP2000064976A (ja) 2000-03-03
JP2000064976A5 true JP2000064976A5 (enExample) 2006-07-20

Family

ID=26313883

Family Applications (3)

Application Number Title Priority Date Filing Date
JP11206611A Pending JP2000064976A (ja) 1998-06-17 1999-06-16 スクリュ―ポンプの改良
JP11206610A Pending JP2000073976A (ja) 1998-06-17 1999-06-16 真空ポンプの改良
JP20661299A Expired - Lifetime JP4388167B2 (ja) 1998-06-17 1999-06-16 真空ポンプの改良

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP11206610A Pending JP2000073976A (ja) 1998-06-17 1999-06-16 真空ポンプの改良
JP20661299A Expired - Lifetime JP4388167B2 (ja) 1998-06-17 1999-06-16 真空ポンプの改良

Country Status (4)

Country Link
US (2) US6217305B1 (enExample)
EP (3) EP0965757A3 (enExample)
JP (3) JP2000064976A (enExample)
DE (2) DE69928172T2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19963173B4 (de) * 1999-12-27 2011-05-19 Leybold Vakuum Gmbh Schraubenvakuumpumpe
GB0004404D0 (en) * 2000-02-24 2000-04-12 Boc Group Plc Improvements in vacuum pumps
JP4558349B2 (ja) * 2004-03-02 2010-10-06 財団法人国際科学振興財団 真空ポンプ
EP1859163A4 (en) * 2005-03-10 2014-11-26 Alan Notis PUMP OR ENGINE WITH SCREW CONIC ETCHED BY PRESSURIZATION
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US20070081893A1 (en) * 2005-10-06 2007-04-12 The Boc Group, Inc. Pump apparatus for semiconductor processing
GB0525378D0 (en) 2005-12-13 2006-01-18 Boc Group Plc Screw Pump
JP2007170341A (ja) * 2005-12-26 2007-07-05 Toyota Industries Corp スクリュー式流体機械
TWI438342B (zh) 2006-07-28 2014-05-21 Lot Vacuum Co Ltd 具有魯式與螺旋轉子之複合型乾式真空幫浦
DE102010014884A1 (de) * 2010-04-14 2011-10-20 Baratti Engineering Gmbh Vakuumpumpe
JP6377839B2 (ja) * 2015-03-31 2018-08-22 株式会社日立産機システム ガス圧縮機
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
GB2606224B (en) * 2021-04-30 2024-01-31 Edwards Ltd Stator for a vacuum pump

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2511878A (en) * 1950-06-20 Rathman
US678570A (en) * 1900-10-22 1901-07-16 William Anthony Jones Motor.
US1191423A (en) * 1913-01-15 1916-07-18 H & S Pump Company Pump.
GB384355A (en) * 1931-08-05 1932-12-08 Frederick Charles Greenfield Improvements in and relating to rotary machines for the compression and propulsion of
US2079083A (en) * 1935-03-29 1937-05-04 Imo Industri Ab Fluid meter
FR1309885A (fr) * 1960-12-15 1962-11-23 Ishikawajima Harima Heavy Ind Machine rotative pour la compression de gaz ou agissant inversement comme moteur
NL282778A (enExample) * 1960-12-15
US3180559A (en) * 1962-04-11 1965-04-27 John R Boyd Mechanical vacuum pump
CH613258A5 (enExample) * 1975-09-24 1979-09-14 Suter Fa Alois
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
JPS59208077A (ja) * 1983-05-11 1984-11-26 Hitachi Ltd テ−パ状スクリユ−ロ−タの製造方法
JPH06100082B2 (ja) * 1986-10-24 1994-12-12 株式会社日立製作所 スクリユ流体機械
JP2619468B2 (ja) * 1988-04-06 1997-06-11 株式会社日立製作所 無給油式スクリュー流体機械
JPH01267384A (ja) * 1988-04-15 1989-10-25 Hitachi Ltd 勾配歯を有するスクリューロータ
JPH08144977A (ja) * 1994-11-24 1996-06-04 Kashiyama Kogyo Kk 複合ドライ真空ポンプ
DE19522555A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Rotationskolbenverdichter mit zwei Rotoren
US6019586A (en) * 1998-01-20 2000-02-01 Sunny King Machinery Co., Ltd. Gradationally contracted screw compression equipment

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