JP2000064047A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2000064047A5 JP2000064047A5 JP1999179921A JP17992199A JP2000064047A5 JP 2000064047 A5 JP2000064047 A5 JP 2000064047A5 JP 1999179921 A JP1999179921 A JP 1999179921A JP 17992199 A JP17992199 A JP 17992199A JP 2000064047 A5 JP2000064047 A5 JP 2000064047A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- coating
- chamber
- anode
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 description 49
- 238000000576 coating method Methods 0.000 description 33
- 239000011248 coating agent Substances 0.000 description 32
- 239000007789 gas Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 17
- 239000010408 film Substances 0.000 description 15
- 239000000463 material Substances 0.000 description 9
- 239000004215 Carbon black (E152) Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- 229930195733 hydrocarbon Natural products 0.000 description 7
- 150000002430 hydrocarbons Chemical class 0.000 description 7
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000001727 in vivo Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000009501 film coating Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000002386 leaching Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 208000015181 infectious disease Diseases 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000000241 respiratory effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000000638 stimulation Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 241001415849 Strigiformes Species 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000000844 anti-bacterial effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000000975 bioactive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000007610 electrostatic coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000007567 mass-production technique Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- -1 pacemaker Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000008733 trauma Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IE980520 | 1998-06-26 | ||
| IE980520 | 1998-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000064047A JP2000064047A (ja) | 2000-02-29 |
| JP2000064047A5 true JP2000064047A5 (https=) | 2010-02-04 |
Family
ID=11041836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11179921A Pending JP2000064047A (ja) | 1998-06-26 | 1999-06-25 | ダイヤモンド様炭素（ｄｌｃ）又は他の真空蒸着被膜を基体に被覆する装置及び方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6638569B2 (https=) |
| JP (1) | JP2000064047A (https=) |
| DE (1) | DE19929184A1 (https=) |
| GB (1) | GB2338716B (https=) |
Families Citing this family (54)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3555844B2 (ja) | 1999-04-09 | 2004-08-18 | 三宅 正二郎 | 摺動部材およびその製造方法 |
| US20020191493A1 (en) * | 2000-07-11 | 2002-12-19 | Tatsuo Hara | Spring, drive mechanism, device and timepiece using the spring |
| US20060118242A1 (en) * | 2001-02-12 | 2006-06-08 | Anthony Herbert | Atmospheric pressure plasma system |
| JP2004138128A (ja) | 2002-10-16 | 2004-05-13 | Nissan Motor Co Ltd | 自動車エンジン用摺動部材 |
| US6969198B2 (en) | 2002-11-06 | 2005-11-29 | Nissan Motor Co., Ltd. | Low-friction sliding mechanism |
| EP1581347B1 (de) * | 2002-12-17 | 2009-02-25 | Wipf AG | Substrat mit einer polaren plasmapolymerisierten schicht |
| JP3891433B2 (ja) | 2003-04-15 | 2007-03-14 | 日産自動車株式会社 | 燃料噴射弁 |
| EP1479946B1 (en) | 2003-05-23 | 2012-12-19 | Nissan Motor Co., Ltd. | Piston for internal combustion engine |
| EP1482190B1 (en) | 2003-05-27 | 2012-12-05 | Nissan Motor Company Limited | Rolling element |
| JP2004360649A (ja) | 2003-06-06 | 2004-12-24 | Nissan Motor Co Ltd | エンジン用ピストンピン |
| JP4863152B2 (ja) * | 2003-07-31 | 2012-01-25 | 日産自動車株式会社 | 歯車 |
| EP1666573B1 (en) | 2003-08-06 | 2019-05-15 | Nissan Motor Company Limited | Low-friction sliding mechanism and method of friction reduction |
| JP2005054617A (ja) | 2003-08-08 | 2005-03-03 | Nissan Motor Co Ltd | 動弁機構 |
| JP4973971B2 (ja) | 2003-08-08 | 2012-07-11 | 日産自動車株式会社 | 摺動部材 |
| DE602004008547T2 (de) | 2003-08-13 | 2008-05-21 | Nissan Motor Co., Ltd., Yokohama | Struktur zur Verbindung von einem Kolben mit einer Kurbelwelle |
| JP4117553B2 (ja) | 2003-08-13 | 2008-07-16 | 日産自動車株式会社 | チェーン駆動装置 |
| US7771821B2 (en) | 2003-08-21 | 2010-08-10 | Nissan Motor Co., Ltd. | Low-friction sliding member and low-friction sliding mechanism using same |
| JP4539205B2 (ja) | 2003-08-21 | 2010-09-08 | 日産自動車株式会社 | 冷媒圧縮機 |
| EP1508611B1 (en) | 2003-08-22 | 2019-04-17 | Nissan Motor Co., Ltd. | Transmission comprising low-friction sliding members and transmission oil therefor |
| US9012506B2 (en) | 2004-09-28 | 2015-04-21 | Atrium Medical Corporation | Cross-linked fatty acid-based biomaterials |
| US9801982B2 (en) * | 2004-09-28 | 2017-10-31 | Atrium Medical Corporation | Implantable barrier device |
| US8367099B2 (en) * | 2004-09-28 | 2013-02-05 | Atrium Medical Corporation | Perforated fatty acid films |
| US9000040B2 (en) | 2004-09-28 | 2015-04-07 | Atrium Medical Corporation | Cross-linked fatty acid-based biomaterials |
| US20090011116A1 (en) * | 2004-09-28 | 2009-01-08 | Atrium Medical Corporation | Reducing template with coating receptacle containing a medical device to be coated |
| US20060067977A1 (en) | 2004-09-28 | 2006-03-30 | Atrium Medical Corporation | Pre-dried drug delivery coating for use with a stent |
| US8312836B2 (en) * | 2004-09-28 | 2012-11-20 | Atrium Medical Corporation | Method and apparatus for application of a fresh coating on a medical device |
| US9592324B2 (en) * | 2006-11-06 | 2017-03-14 | Atrium Medical Corporation | Tissue separating device with reinforced support for anchoring mechanisms |
| EP1811935B1 (en) * | 2004-09-28 | 2016-03-30 | Atrium Medical Corporation | Heat cured gel and method of making |
| US20060079863A1 (en) * | 2004-10-08 | 2006-04-13 | Scimed Life Systems, Inc. | Medical devices coated with diamond-like carbon |
| US9427423B2 (en) * | 2009-03-10 | 2016-08-30 | Atrium Medical Corporation | Fatty-acid based particles |
| US9278161B2 (en) | 2005-09-28 | 2016-03-08 | Atrium Medical Corporation | Tissue-separating fatty acid adhesion barrier |
| JP4976677B2 (ja) * | 2005-10-03 | 2012-07-18 | 株式会社ピュアロンジャパン | 成膜装置、成膜方法およびフィールドエミッションランプに用いるワイヤ状陰極 |
| AU2006304590A1 (en) | 2005-10-15 | 2007-04-26 | Atrium Medical Corporation | Hydrophobic cross-linked gels for bioabsorbable drug carrier coatings |
| US9440003B2 (en) * | 2005-11-04 | 2016-09-13 | Boston Scientific Scimed, Inc. | Medical devices having particle-containing regions with diamond-like coatings |
| US9526814B2 (en) * | 2006-02-16 | 2016-12-27 | Boston Scientific Scimed, Inc. | Medical balloons and methods of making the same |
| US7801623B2 (en) * | 2006-06-29 | 2010-09-21 | Medtronic, Inc. | Implantable medical device having a conformal coating |
| US9492596B2 (en) * | 2006-11-06 | 2016-11-15 | Atrium Medical Corporation | Barrier layer with underlying medical device and one or more reinforcing support structures |
| JP5172180B2 (ja) * | 2007-03-19 | 2013-03-27 | トーヨーエイテック株式会社 | Ｄｌｃ膜の修飾方法及び、医療用材料、医療用器具の製造方法 |
| JP4948231B2 (ja) * | 2007-03-30 | 2012-06-06 | トーヨーエイテック株式会社 | バルーンカテーテル |
| US20080312639A1 (en) * | 2007-06-13 | 2008-12-18 | Jan Weber | Hardened polymeric lumen surfaces |
| KR100931258B1 (ko) * | 2007-08-16 | 2009-12-11 | 주식회사 코텍 | 마그네슘 합금제품의 표면처리방법 |
| CN104327758A (zh) * | 2007-12-28 | 2015-02-04 | 3M创新有限公司 | 柔性封装膜系统 |
| US20110038910A1 (en) | 2009-08-11 | 2011-02-17 | Atrium Medical Corporation | Anti-infective antimicrobial-containing biomaterials |
| US10322213B2 (en) | 2010-07-16 | 2019-06-18 | Atrium Medical Corporation | Compositions and methods for altering the rate of hydrolysis of cured oil-based materials |
| US9867880B2 (en) | 2012-06-13 | 2018-01-16 | Atrium Medical Corporation | Cured oil-hydrogel biomaterial compositions for controlled drug delivery |
| FR3019708B1 (fr) * | 2014-04-04 | 2016-05-06 | Hydromecanique & Frottement | Procede et dispositif pour generer un plasma excite par une energie micro-onde dans le domaine de la resonnance cyclonique electronique (rce), pour realiser un traitement de surface ou revetement autour d'un element filiforme. |
| GB201412656D0 (en) | 2014-07-16 | 2014-08-27 | Imp Innovations Ltd | Process |
| US11709156B2 (en) | 2017-09-18 | 2023-07-25 | Waters Technologies Corporation | Use of vapor deposition coated flow paths for improved analytical analysis |
| US12180581B2 (en) | 2017-09-18 | 2024-12-31 | Waters Technologies Corporation | Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes |
| US11709155B2 (en) | 2017-09-18 | 2023-07-25 | Waters Technologies Corporation | Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes |
| US12181452B2 (en) | 2017-09-18 | 2024-12-31 | Waters Technologies Corporation | Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes |
| EP3930867B1 (en) | 2019-02-27 | 2025-11-12 | Waters Technologies Corporation | Chromatographic seal and coated flow paths for minimizing analyte adsorption |
| US11918936B2 (en) | 2020-01-17 | 2024-03-05 | Waters Technologies Corporation | Performance and dynamic range for oligonucleotide bioanalysis through reduction of non specific binding |
| US12352734B2 (en) | 2020-09-24 | 2025-07-08 | Waters Technologies Corporation | Chromatographic hardware improvements for separation of reactive molecules |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56127768A (en) * | 1980-03-06 | 1981-10-06 | Matsushita Electric Ind Co Ltd | Surface-treating device |
| US4389970A (en) | 1981-03-16 | 1983-06-28 | Energy Conversion Devices, Inc. | Apparatus for regulating substrate temperature in a continuous plasma deposition process |
| JPS60211073A (ja) * | 1984-03-16 | 1985-10-23 | アメリカン・サイアナミド・カンパニー | プラズマ増進化学蒸着で被覆された基体、その製造のための装置と方法 |
| US4663183A (en) * | 1984-09-10 | 1987-05-05 | Energy Conversion Devices, Inc. | Glow discharge method of applying a carbon coating onto a substrate |
| JPH06952B2 (ja) * | 1985-04-18 | 1994-01-05 | 鐘淵化学工業株式会社 | 硬質カ−ボン膜 |
| JPS6240375A (ja) * | 1985-08-14 | 1987-02-21 | Kanegafuchi Chem Ind Co Ltd | 硬質カ−ボン膜 |
| US4829189A (en) | 1986-07-18 | 1989-05-09 | Sando Iron Works Co., Ltd. | Apparatus for low-temperature plasma treatment of sheet material |
| FR2703073B1 (fr) | 1993-03-26 | 1995-05-05 | Lorraine Laminage | Procédé et dispositif pour le revêtement en continu d'un matériau métallique en défilement par un dépôt de polymère à gradient de composition, et produit obtenu par ce procédé. |
| JP3175894B2 (ja) * | 1994-03-25 | 2001-06-11 | 株式会社半導体エネルギー研究所 | プラズマ処理装置及びプラズマ処理方法 |
| US5464667A (en) * | 1994-08-16 | 1995-11-07 | Minnesota Mining And Manufacturing Company | Jet plasma process and apparatus |
| EP0743375B1 (en) * | 1995-03-31 | 2000-07-12 | CeramOptec GmbH | Method of producing diamond-like-carbon coatings |
| JP2997215B2 (ja) * | 1995-10-17 | 2000-01-11 | シチズン時計株式会社 | 円筒状部材の内周面への被膜形成方法 |
| US6110540A (en) * | 1996-07-12 | 2000-08-29 | The Boc Group, Inc. | Plasma apparatus and method |
| US5888594A (en) * | 1996-11-05 | 1999-03-30 | Minnesota Mining And Manufacturing Company | Process for depositing a carbon-rich coating on a moving substrate |
-
1999
- 1999-06-25 DE DE19929184A patent/DE19929184A1/de not_active Withdrawn
- 1999-06-25 GB GB9914950A patent/GB2338716B/en not_active Expired - Fee Related
- 1999-06-25 JP JP11179921A patent/JP2000064047A/ja active Pending
-
2001
- 2001-06-25 US US09/893,732 patent/US6638569B2/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2000064047A5 (https=) | ||
| US6638569B2 (en) | Apparatus and method for coating substrates with vacuum depositable materials | |
| US5552027A (en) | Working electrode for electrochemical enzymatic sensor systems | |
| JP4439594B2 (ja) | ダイアモンド類似ナノ複合材組成物 | |
| JP2610394B2 (ja) | プラスチック製品のバリアコーティング方法 | |
| US7811149B2 (en) | Method for fabricating carbon nanotube-based field emission device | |
| JP2003522297A (ja) | プラズマ処理システムおよび方法 | |
| Li et al. | Thin film deposition technologies and processing of biomaterials | |
| KR101505597B1 (ko) | 탄소박막 및 그 제조방법 | |
| JPS6117907B2 (https=) | ||
| JP2007510258A (ja) | 導電性メッシュを使用するプラズマ浸漬イオン埋め込み | |
| GB2287473A (en) | Diamond coated polymer devices for biomedical applications | |
| JP2018155728A (ja) | 導電性ダイヤモンドライクカーボンマイクロ電極 | |
| CN111943130A (zh) | 纳米针阵列及其制备方法和应用 | |
| Yokota et al. | Cell adhesion to nitrogen-doped DLCs fabricated by plasma-based ion implantation and deposition method using toluene gas | |
| US9524742B2 (en) | CXNYHZ film, deposition method, magnetic recording medium and method for manufacturing the same | |
| JPH0157490B2 (https=) | ||
| JP2017002340A (ja) | Ｄｌｃ膜コーティング装置及びｄｌｃ膜コーティング装置を用いて被覆対象物を被覆する方法 | |
| US3676320A (en) | Method for depositing thin films on thin elongated electrically insulating substrates | |
| US20130104396A1 (en) | Method for making pacemaker electrode lead | |
| JP6675551B2 (ja) | 撥水膜付き基材の製造方法及び製造装置 | |
| JP2001029447A (ja) | 体内埋め込み医療器 | |
| JPH0380190A (ja) | ダイヤモンド様薄膜を形成する方法 | |
| CN206916216U (zh) | 类金刚石薄膜的沉积设备 | |
| WO2007032208A1 (ja) | 細胞培養基板 |