GB2338716B - An apparatus and a method for coating diamond like carbon (DLC) or other vacuum depositable coatings onto a substrate - Google Patents

An apparatus and a method for coating diamond like carbon (DLC) or other vacuum depositable coatings onto a substrate

Info

Publication number
GB2338716B
GB2338716B GB9914950A GB9914950A GB2338716B GB 2338716 B GB2338716 B GB 2338716B GB 9914950 A GB9914950 A GB 9914950A GB 9914950 A GB9914950 A GB 9914950A GB 2338716 B GB2338716 B GB 2338716B
Authority
GB
United Kingdom
Prior art keywords
dlc
carbon
substrate
coatings onto
coating diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9914950A
Other languages
English (en)
Other versions
GB9914950D0 (en
GB2338716A (en
Inventor
James Andrew Mclaughlin
John Mccune Anderson
Paul Damian Maguire
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB9914950D0 publication Critical patent/GB9914950D0/en
Publication of GB2338716A publication Critical patent/GB2338716A/en
Application granted granted Critical
Publication of GB2338716B publication Critical patent/GB2338716B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L27/00—Materials for grafts or prostheses or for coating grafts or prostheses
    • A61L27/28—Materials for coating prostheses
    • A61L27/30—Inorganic materials
    • A61L27/303—Carbon
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L29/00—Materials for catheters, medical tubing, cannulae, or endoscopes or for coating catheters
    • A61L29/08—Materials for coatings
    • A61L29/10—Inorganic materials
    • A61L29/103—Carbon
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L31/00—Materials for other surgical articles, e.g. stents, stent-grafts, shunts, surgical drapes, guide wires, materials for adhesion prevention, occluding devices, surgical gloves, tissue fixation devices
    • A61L31/08—Materials for coatings
    • A61L31/082—Inorganic materials
    • A61L31/084—Carbon; Graphite
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • General Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Epidemiology (AREA)
  • Dermatology (AREA)
  • Surgery (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Vascular Medicine (AREA)
  • Medicinal Chemistry (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Transplantation (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Materials For Medical Uses (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
GB9914950A 1998-06-26 1999-06-25 An apparatus and a method for coating diamond like carbon (DLC) or other vacuum depositable coatings onto a substrate Expired - Fee Related GB2338716B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IE980520 1998-06-26

Publications (3)

Publication Number Publication Date
GB9914950D0 GB9914950D0 (en) 1999-08-25
GB2338716A GB2338716A (en) 1999-12-29
GB2338716B true GB2338716B (en) 2003-04-02

Family

ID=11041836

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9914950A Expired - Fee Related GB2338716B (en) 1998-06-26 1999-06-25 An apparatus and a method for coating diamond like carbon (DLC) or other vacuum depositable coatings onto a substrate

Country Status (4)

Country Link
US (1) US6638569B2 (https=)
JP (1) JP2000064047A (https=)
DE (1) DE19929184A1 (https=)
GB (1) GB2338716B (https=)

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US7134381B2 (en) 2003-08-21 2006-11-14 Nissan Motor Co., Ltd. Refrigerant compressor and friction control process therefor
US7146956B2 (en) 2003-08-08 2006-12-12 Nissan Motor Co., Ltd. Valve train for internal combustion engine
US7228786B2 (en) 2003-06-06 2007-06-12 Nissan Motor Co., Ltd. Engine piston-pin sliding structure
US7255083B2 (en) 2002-10-16 2007-08-14 Nissan Motor Co., Ltd. Sliding structure for automotive engine
US7273655B2 (en) 1999-04-09 2007-09-25 Shojiro Miyake Slidably movable member and method of producing same
US7284525B2 (en) 2003-08-13 2007-10-23 Nissan Motor Co., Ltd. Structure for connecting piston to crankshaft
US7318514B2 (en) 2003-08-22 2008-01-15 Nissan Motor Co., Ltd. Low-friction sliding member in transmission, and transmission oil therefor
US7322749B2 (en) 2002-11-06 2008-01-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
US7406940B2 (en) 2003-05-23 2008-08-05 Nissan Motor Co., Ltd. Piston for internal combustion engine
US7458585B2 (en) 2003-08-08 2008-12-02 Nissan Motor Co., Ltd. Sliding member and production process thereof
US7500472B2 (en) 2003-04-15 2009-03-10 Nissan Motor Co., Ltd. Fuel injection valve
US7572200B2 (en) 2003-08-13 2009-08-11 Nissan Motor Co., Ltd. Chain drive system
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
US8096205B2 (en) 2003-07-31 2012-01-17 Nissan Motor Co., Ltd. Gear

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US20060118242A1 (en) * 2001-02-12 2006-06-08 Anthony Herbert Atmospheric pressure plasma system
EP1581347B1 (de) * 2002-12-17 2009-02-25 Wipf AG Substrat mit einer polaren plasmapolymerisierten schicht
EP1482190B1 (en) 2003-05-27 2012-12-05 Nissan Motor Company Limited Rolling element
EP1666573B1 (en) 2003-08-06 2019-05-15 Nissan Motor Company Limited Low-friction sliding mechanism and method of friction reduction
US9012506B2 (en) 2004-09-28 2015-04-21 Atrium Medical Corporation Cross-linked fatty acid-based biomaterials
US9801982B2 (en) * 2004-09-28 2017-10-31 Atrium Medical Corporation Implantable barrier device
US8367099B2 (en) * 2004-09-28 2013-02-05 Atrium Medical Corporation Perforated fatty acid films
US9000040B2 (en) 2004-09-28 2015-04-07 Atrium Medical Corporation Cross-linked fatty acid-based biomaterials
US20090011116A1 (en) * 2004-09-28 2009-01-08 Atrium Medical Corporation Reducing template with coating receptacle containing a medical device to be coated
US20060067977A1 (en) 2004-09-28 2006-03-30 Atrium Medical Corporation Pre-dried drug delivery coating for use with a stent
US8312836B2 (en) * 2004-09-28 2012-11-20 Atrium Medical Corporation Method and apparatus for application of a fresh coating on a medical device
US9592324B2 (en) * 2006-11-06 2017-03-14 Atrium Medical Corporation Tissue separating device with reinforced support for anchoring mechanisms
EP1811935B1 (en) * 2004-09-28 2016-03-30 Atrium Medical Corporation Heat cured gel and method of making
US20060079863A1 (en) * 2004-10-08 2006-04-13 Scimed Life Systems, Inc. Medical devices coated with diamond-like carbon
US9427423B2 (en) * 2009-03-10 2016-08-30 Atrium Medical Corporation Fatty-acid based particles
US9278161B2 (en) 2005-09-28 2016-03-08 Atrium Medical Corporation Tissue-separating fatty acid adhesion barrier
JP4976677B2 (ja) * 2005-10-03 2012-07-18 株式会社ピュアロンジャパン 成膜装置、成膜方法およびフィールドエミッションランプに用いるワイヤ状陰極
AU2006304590A1 (en) 2005-10-15 2007-04-26 Atrium Medical Corporation Hydrophobic cross-linked gels for bioabsorbable drug carrier coatings
US9440003B2 (en) * 2005-11-04 2016-09-13 Boston Scientific Scimed, Inc. Medical devices having particle-containing regions with diamond-like coatings
US9526814B2 (en) * 2006-02-16 2016-12-27 Boston Scientific Scimed, Inc. Medical balloons and methods of making the same
US7801623B2 (en) * 2006-06-29 2010-09-21 Medtronic, Inc. Implantable medical device having a conformal coating
US9492596B2 (en) * 2006-11-06 2016-11-15 Atrium Medical Corporation Barrier layer with underlying medical device and one or more reinforcing support structures
JP5172180B2 (ja) * 2007-03-19 2013-03-27 トーヨーエイテック株式会社 Ｄｌｃ膜の修飾方法及び、医療用材料、医療用器具の製造方法
JP4948231B2 (ja) * 2007-03-30 2012-06-06 トーヨーエイテック株式会社 バルーンカテーテル
US20080312639A1 (en) * 2007-06-13 2008-12-18 Jan Weber Hardened polymeric lumen surfaces
KR100931258B1 (ko) * 2007-08-16 2009-12-11 주식회사 코텍 마그네슘 합금제품의 표면처리방법
CN104327758A (zh) * 2007-12-28 2015-02-04 3M创新有限公司 柔性封装膜系统
US20110038910A1 (en) 2009-08-11 2011-02-17 Atrium Medical Corporation Anti-infective antimicrobial-containing biomaterials
US10322213B2 (en) 2010-07-16 2019-06-18 Atrium Medical Corporation Compositions and methods for altering the rate of hydrolysis of cured oil-based materials
US9867880B2 (en) 2012-06-13 2018-01-16 Atrium Medical Corporation Cured oil-hydrogel biomaterial compositions for controlled drug delivery
FR3019708B1 (fr) * 2014-04-04 2016-05-06 Hydromecanique & Frottement Procede et dispositif pour generer un plasma excite par une energie micro-onde dans le domaine de la resonnance cyclonique electronique (rce), pour realiser un traitement de surface ou revetement autour d'un element filiforme.
GB201412656D0 (en) 2014-07-16 2014-08-27 Imp Innovations Ltd Process
US11709156B2 (en) 2017-09-18 2023-07-25 Waters Technologies Corporation Use of vapor deposition coated flow paths for improved analytical analysis
US12180581B2 (en) 2017-09-18 2024-12-31 Waters Technologies Corporation Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes
US11709155B2 (en) 2017-09-18 2023-07-25 Waters Technologies Corporation Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes
US12181452B2 (en) 2017-09-18 2024-12-31 Waters Technologies Corporation Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes
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US11918936B2 (en) 2020-01-17 2024-03-05 Waters Technologies Corporation Performance and dynamic range for oligonucleotide bioanalysis through reduction of non specific binding
US12352734B2 (en) 2020-09-24 2025-07-08 Waters Technologies Corporation Chromatographic hardware improvements for separation of reactive molecules

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US5888594A (en) * 1996-11-05 1999-03-30 Minnesota Mining And Manufacturing Company Process for depositing a carbon-rich coating on a moving substrate

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7273655B2 (en) 1999-04-09 2007-09-25 Shojiro Miyake Slidably movable member and method of producing same
US7255083B2 (en) 2002-10-16 2007-08-14 Nissan Motor Co., Ltd. Sliding structure for automotive engine
US8152377B2 (en) 2002-11-06 2012-04-10 Nissan Motor Co., Ltd. Low-friction sliding mechanism
US7322749B2 (en) 2002-11-06 2008-01-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
US7500472B2 (en) 2003-04-15 2009-03-10 Nissan Motor Co., Ltd. Fuel injection valve
US7406940B2 (en) 2003-05-23 2008-08-05 Nissan Motor Co., Ltd. Piston for internal combustion engine
US7228786B2 (en) 2003-06-06 2007-06-12 Nissan Motor Co., Ltd. Engine piston-pin sliding structure
US8096205B2 (en) 2003-07-31 2012-01-17 Nissan Motor Co., Ltd. Gear
US7458585B2 (en) 2003-08-08 2008-12-02 Nissan Motor Co., Ltd. Sliding member and production process thereof
US7146956B2 (en) 2003-08-08 2006-12-12 Nissan Motor Co., Ltd. Valve train for internal combustion engine
US7572200B2 (en) 2003-08-13 2009-08-11 Nissan Motor Co., Ltd. Chain drive system
US7284525B2 (en) 2003-08-13 2007-10-23 Nissan Motor Co., Ltd. Structure for connecting piston to crankshaft
US7134381B2 (en) 2003-08-21 2006-11-14 Nissan Motor Co., Ltd. Refrigerant compressor and friction control process therefor
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
US7318514B2 (en) 2003-08-22 2008-01-15 Nissan Motor Co., Ltd. Low-friction sliding member in transmission, and transmission oil therefor

Also Published As

Publication number Publication date
GB9914950D0 (en) 1999-08-25
JP2000064047A (ja) 2000-02-29
GB2338716A (en) 1999-12-29
US20020026899A1 (en) 2002-03-07
DE19929184A1 (de) 1999-12-30
IE990532A1 (en) 2001-03-21
US6638569B2 (en) 2003-10-28

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20130625