JP2000049061A5 - - Google Patents

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Publication number
JP2000049061A5
JP2000049061A5 JP1998211509A JP21150998A JP2000049061A5 JP 2000049061 A5 JP2000049061 A5 JP 2000049061A5 JP 1998211509 A JP1998211509 A JP 1998211509A JP 21150998 A JP21150998 A JP 21150998A JP 2000049061 A5 JP2000049061 A5 JP 2000049061A5
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JP
Japan
Prior art keywords
sample
separation
region
separation layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998211509A
Other languages
English (en)
Japanese (ja)
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JP2000049061A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10211509A priority Critical patent/JP2000049061A/ja
Priority claimed from JP10211509A external-priority patent/JP2000049061A/ja
Priority to TW88112483A priority patent/TW522488B/zh
Priority to US09/359,575 priority patent/US6427748B1/en
Priority to EP19990305837 priority patent/EP0977242A3/en
Publication of JP2000049061A publication Critical patent/JP2000049061A/ja
Priority to US10/175,201 priority patent/US6773534B2/en
Priority to US10/175,004 priority patent/US6609553B2/en
Publication of JP2000049061A5 publication Critical patent/JP2000049061A5/ja
Pending legal-status Critical Current

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JP10211509A 1998-07-27 1998-07-27 試料の処理装置及び処理方法 Pending JP2000049061A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP10211509A JP2000049061A (ja) 1998-07-27 1998-07-27 試料の処理装置及び処理方法
TW88112483A TW522488B (en) 1998-07-27 1999-07-22 Sample processing apparatus and method
US09/359,575 US6427748B1 (en) 1998-07-27 1999-07-22 Sample processing apparatus and method
EP19990305837 EP0977242A3 (en) 1998-07-27 1999-07-23 Sample processing apparatus and method
US10/175,201 US6773534B2 (en) 1998-07-27 2002-06-20 Sample processing apparatus and method
US10/175,004 US6609553B2 (en) 1998-07-27 2002-06-20 Sample processing apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10211509A JP2000049061A (ja) 1998-07-27 1998-07-27 試料の処理装置及び処理方法

Publications (2)

Publication Number Publication Date
JP2000049061A JP2000049061A (ja) 2000-02-18
JP2000049061A5 true JP2000049061A5 (enExample) 2005-10-13

Family

ID=16607112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10211509A Pending JP2000049061A (ja) 1998-07-27 1998-07-27 試料の処理装置及び処理方法

Country Status (1)

Country Link
JP (1) JP2000049061A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2823373B1 (fr) * 2001-04-10 2005-02-04 Soitec Silicon On Insulator Dispositif de coupe de couche d'un substrat, et procede associe
JP6101084B2 (ja) * 2013-01-17 2017-03-22 株式会社ディスコ 分離装置
WO2025070639A1 (ja) * 2023-09-29 2025-04-03 芝浦メカトロニクス株式会社 基板分離装置

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