JP1730992S - 研磨パッド用ドレッサ - Google Patents
研磨パッド用ドレッサInfo
- Publication number
- JP1730992S JP1730992S JP2022000012F JP2022000012F JP1730992S JP 1730992 S JP1730992 S JP 1730992S JP 2022000012 F JP2022000012 F JP 2022000012F JP 2022000012 F JP2022000012 F JP 2022000012F JP 1730992 S JP1730992 S JP 1730992S
- Authority
- JP
- Japan
- Prior art keywords
- polishing pad
- pad dresser
- dresser
- polishing
- dressing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005498 polishing Methods 0.000 title abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Abstract
本物品は、シリコンウエハなどの研磨加工に用いる研磨パッドのドレッシングに用いるドレッサである。
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022000012F JP1730992S (ja) | 2022-01-04 | 2022-01-04 | 研磨パッド用ドレッサ |
| TW111303107F TWD225936S (zh) | 2022-01-04 | 2022-06-24 | 研磨墊用修整器 |
| US29/844,534 USD1029602S1 (en) | 2022-01-04 | 2022-06-29 | Polishing pad dresser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022000012F JP1730992S (ja) | 2022-01-04 | 2022-01-04 | 研磨パッド用ドレッサ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1730992S true JP1730992S (ja) | 2022-11-30 |
Family
ID=84228010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022000012F Active JP1730992S (ja) | 2022-01-04 | 2022-01-04 | 研磨パッド用ドレッサ |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP1730992S (ja) |
| TW (1) | TWD225936S (ja) |
-
2022
- 2022-01-04 JP JP2022000012F patent/JP1730992S/ja active Active
- 2022-06-24 TW TW111303107F patent/TWD225936S/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWD225936S (zh) | 2023-06-21 |
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