ITMI20111755A1 - Procedimento per il rivestimento di un substrato - Google Patents

Procedimento per il rivestimento di un substrato

Info

Publication number
ITMI20111755A1
ITMI20111755A1 ITMI20111755A ITMI20111755A1 IT MI20111755 A1 ITMI20111755 A1 IT MI20111755A1 IT MI20111755 A ITMI20111755 A IT MI20111755A IT MI20111755 A1 ITMI20111755 A1 IT MI20111755A1
Authority
IT
Italy
Prior art keywords
carbon
substrate
coating
metal
source
Prior art date
Application number
Other languages
English (en)
Inventor
Andreas Krauss
Alexander Martin
Gilbert Moersch
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20111755A1 publication Critical patent/ITMI20111755A1/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
ITMI20111755 2010-10-06 2011-09-30 Procedimento per il rivestimento di un substrato ITMI20111755A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010042017 DE102010042017A1 (de) 2010-10-06 2010-10-06 Verfahren zum Beschichten eines Substrats

Publications (1)

Publication Number Publication Date
ITMI20111755A1 true ITMI20111755A1 (it) 2012-04-07

Family

ID=45872178

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI20111755 ITMI20111755A1 (it) 2010-10-06 2011-09-30 Procedimento per il rivestimento di un substrato

Country Status (3)

Country Link
DE (1) DE102010042017A1 (it)
FR (1) FR2965821A1 (it)
IT (1) ITMI20111755A1 (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014004323B4 (de) 2014-03-25 2021-11-11 Gottfried Wilhelm Leibniz Universität Hannover Beschichtungseinrichtung zum zumindest teilweisen Beschichten einer Oberfläche
DE102020207873A1 (de) 2020-06-25 2021-12-30 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen einer Vorrichtung zum Erfassen einer tribologischen Beanspruchung zumindest eines Bauteils und Vorrichtung zum Erfassen tribologischer Beanspruchung zumindest eines Bauteils

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3075070B2 (ja) 1994-03-18 2000-08-07 富士電機株式会社 一酸化炭素ガスセンサ
KR100988511B1 (ko) 2006-11-29 2010-10-20 유니마이크론 테크놀로지 코퍼레이션 반도체 소자가 매립된 지지 기판 적층 구조체 및 그제조방법
CN101299461A (zh) 2008-07-03 2008-11-05 昆明贵金属研究所 铂钌掺杂La系稀土元素多相催化剂的制备方法

Also Published As

Publication number Publication date
DE102010042017A1 (de) 2012-04-12
FR2965821A1 (fr) 2012-04-13

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