DE102010042017A1 - Verfahren zum Beschichten eines Substrats - Google Patents

Verfahren zum Beschichten eines Substrats Download PDF

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Publication number
DE102010042017A1
DE102010042017A1 DE201010042017 DE102010042017A DE102010042017A1 DE 102010042017 A1 DE102010042017 A1 DE 102010042017A1 DE 201010042017 DE201010042017 DE 201010042017 DE 102010042017 A DE102010042017 A DE 102010042017A DE 102010042017 A1 DE102010042017 A1 DE 102010042017A1
Authority
DE
Germany
Prior art keywords
carbon
coating
substrate
metal
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE201010042017
Other languages
German (de)
English (en)
Inventor
Andreas Krauss
Gilbert Moersch
Alexander Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE201010042017 priority Critical patent/DE102010042017A1/de
Priority to ITMI20111755 priority patent/ITMI20111755A1/it
Priority to FR1158967A priority patent/FR2965821A1/fr
Publication of DE102010042017A1 publication Critical patent/DE102010042017A1/de
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
DE201010042017 2010-10-06 2010-10-06 Verfahren zum Beschichten eines Substrats Withdrawn DE102010042017A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE201010042017 DE102010042017A1 (de) 2010-10-06 2010-10-06 Verfahren zum Beschichten eines Substrats
ITMI20111755 ITMI20111755A1 (it) 2010-10-06 2011-09-30 Procedimento per il rivestimento di un substrato
FR1158967A FR2965821A1 (fr) 2010-10-06 2011-10-05 Procede de revetement d'un substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010042017 DE102010042017A1 (de) 2010-10-06 2010-10-06 Verfahren zum Beschichten eines Substrats

Publications (1)

Publication Number Publication Date
DE102010042017A1 true DE102010042017A1 (de) 2012-04-12

Family

ID=45872178

Family Applications (1)

Application Number Title Priority Date Filing Date
DE201010042017 Withdrawn DE102010042017A1 (de) 2010-10-06 2010-10-06 Verfahren zum Beschichten eines Substrats

Country Status (3)

Country Link
DE (1) DE102010042017A1 (it)
FR (1) FR2965821A1 (it)
IT (1) ITMI20111755A1 (it)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014004323B4 (de) 2014-03-25 2021-11-11 Gottfried Wilhelm Leibniz Universität Hannover Beschichtungseinrichtung zum zumindest teilweisen Beschichten einer Oberfläche
DE102020207873A1 (de) 2020-06-25 2021-12-30 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen einer Vorrichtung zum Erfassen einer tribologischen Beanspruchung zumindest eines Bauteils und Vorrichtung zum Erfassen tribologischer Beanspruchung zumindest eines Bauteils

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07260728A (ja) 1994-03-18 1995-10-13 Fuji Electric Co Ltd 一酸化炭素ガスセンサ
KR20080048846A (ko) 2006-11-29 2008-06-03 피닉스 프리시젼 테크날로지 코포레이션 반도체 소자가 매립된 지지 기판 적층 구조체 및 그제조방법
CN101299461A (zh) 2008-07-03 2008-11-05 昆明贵金属研究所 铂钌掺杂La系稀土元素多相催化剂的制备方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07260728A (ja) 1994-03-18 1995-10-13 Fuji Electric Co Ltd 一酸化炭素ガスセンサ
KR20080048846A (ko) 2006-11-29 2008-06-03 피닉스 프리시젼 테크날로지 코포레이션 반도체 소자가 매립된 지지 기판 적층 구조체 및 그제조방법
CN101299461A (zh) 2008-07-03 2008-11-05 昆明贵金属研究所 铂钌掺杂La系稀土元素多相催化剂的制备方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014004323B4 (de) 2014-03-25 2021-11-11 Gottfried Wilhelm Leibniz Universität Hannover Beschichtungseinrichtung zum zumindest teilweisen Beschichten einer Oberfläche
DE102020207873A1 (de) 2020-06-25 2021-12-30 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen einer Vorrichtung zum Erfassen einer tribologischen Beanspruchung zumindest eines Bauteils und Vorrichtung zum Erfassen tribologischer Beanspruchung zumindest eines Bauteils

Also Published As

Publication number Publication date
FR2965821A1 (fr) 2012-04-13
ITMI20111755A1 (it) 2012-04-07

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R012 Request for examination validly filed
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee