IT983000B - Procedimento ed apparecchio per generare e registrare configura zioni di diffrazione di parti scelte di provini sotto osserva zione in microscopi elettronici - Google Patents

Procedimento ed apparecchio per generare e registrare configura zioni di diffrazione di parti scelte di provini sotto osserva zione in microscopi elettronici

Info

Publication number
IT983000B
IT983000B IT4930373A IT4930373A IT983000B IT 983000 B IT983000 B IT 983000B IT 4930373 A IT4930373 A IT 4930373A IT 4930373 A IT4930373 A IT 4930373A IT 983000 B IT983000 B IT 983000B
Authority
IT
Italy
Prior art keywords
procedure
generating
equipment
selected parts
under observation
Prior art date
Application number
IT4930373A
Other languages
English (en)
Italian (it)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of IT983000B publication Critical patent/IT983000B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
IT4930373A 1972-04-12 1973-04-09 Procedimento ed apparecchio per generare e registrare configura zioni di diffrazione di parti scelte di provini sotto osserva zione in microscopi elettronici IT983000B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7204859A NL7204859A (de) 1972-04-12 1972-04-12

Publications (1)

Publication Number Publication Date
IT983000B true IT983000B (it) 1974-10-21

Family

ID=19815829

Family Applications (1)

Application Number Title Priority Date Filing Date
IT4930373A IT983000B (it) 1972-04-12 1973-04-09 Procedimento ed apparecchio per generare e registrare configura zioni di diffrazione di parti scelte di provini sotto osserva zione in microscopi elettronici

Country Status (8)

Country Link
CA (1) CA984524A (de)
CH (1) CH569275A5 (de)
DE (1) DE2315130A1 (de)
FR (1) FR2179978B1 (de)
GB (1) GB1424224A (de)
IT (1) IT983000B (de)
NL (1) NL7204859A (de)
SE (1) SE386770B (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
DE3636506A1 (de) * 1986-10-27 1988-04-28 Atomika Tech Physik Gmbh Spiralabtastverfahren
JPH0233843A (ja) * 1988-07-25 1990-02-05 Hitachi Ltd 走査電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248201A (en) * 1967-07-03 1971-09-29 Nat Res Dev Electron microscopes
GB1284061A (en) * 1970-01-21 1972-08-02 Cambridge Scientific Instr Ltd Electron beam apparatus

Also Published As

Publication number Publication date
SE386770B (sv) 1976-08-16
CA984524A (en) 1976-02-24
FR2179978B1 (de) 1978-02-10
GB1424224A (en) 1976-02-11
NL7204859A (de) 1973-10-16
DE2315130A1 (de) 1973-10-18
CH569275A5 (de) 1975-11-14
FR2179978A1 (de) 1973-11-23

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