CH569275A5 - - Google Patents
Info
- Publication number
- CH569275A5 CH569275A5 CH507173A CH507173A CH569275A5 CH 569275 A5 CH569275 A5 CH 569275A5 CH 507173 A CH507173 A CH 507173A CH 507173 A CH507173 A CH 507173A CH 569275 A5 CH569275 A5 CH 569275A5
- Authority
- CH
- Switzerland
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
- H01J37/2955—Electron or ion diffraction tubes using scanning ray
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7204859A NL7204859A (de) | 1972-04-12 | 1972-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH569275A5 true CH569275A5 (de) | 1975-11-14 |
Family
ID=19815829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH507173A CH569275A5 (de) | 1972-04-12 | 1973-04-09 |
Country Status (8)
| Country | Link |
|---|---|
| CA (1) | CA984524A (de) |
| CH (1) | CH569275A5 (de) |
| DE (1) | DE2315130A1 (de) |
| FR (1) | FR2179978B1 (de) |
| GB (1) | GB1424224A (de) |
| IT (1) | IT983000B (de) |
| NL (1) | NL7204859A (de) |
| SE (1) | SE386770B (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4210806A (en) * | 1979-01-18 | 1980-07-01 | International Business Machines Corporation | High brightness electron probe beam and method |
| DE3636506A1 (de) * | 1986-10-27 | 1988-04-28 | Atomika Tech Physik Gmbh | Spiralabtastverfahren |
| JPH0233843A (ja) * | 1988-07-25 | 1990-02-05 | Hitachi Ltd | 走査電子顕微鏡 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1248201A (en) * | 1967-07-03 | 1971-09-29 | Nat Res Dev | Electron microscopes |
| GB1284061A (en) * | 1970-01-21 | 1972-08-02 | Cambridge Scientific Instr Ltd | Electron beam apparatus |
-
1972
- 1972-04-12 NL NL7204859A patent/NL7204859A/xx unknown
-
1973
- 1973-03-27 DE DE19732315130 patent/DE2315130A1/de active Pending
- 1973-04-09 IT IT4930373A patent/IT983000B/it active
- 1973-04-09 GB GB1691873A patent/GB1424224A/en not_active Expired
- 1973-04-09 SE SE7304969A patent/SE386770B/xx unknown
- 1973-04-09 CA CA168,263A patent/CA984524A/en not_active Expired
- 1973-04-09 CH CH507173A patent/CH569275A5/xx not_active IP Right Cessation
- 1973-04-11 FR FR7313064A patent/FR2179978B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2179978A1 (de) | 1973-11-23 |
| IT983000B (it) | 1974-10-21 |
| GB1424224A (en) | 1976-02-11 |
| NL7204859A (de) | 1973-10-16 |
| DE2315130A1 (de) | 1973-10-18 |
| CA984524A (en) | 1976-02-24 |
| FR2179978B1 (de) | 1978-02-10 |
| SE386770B (sv) | 1976-08-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |