IT976172B - Procedimento per aggiustare il coef ficiente di temperatura di resisten za di pellicole sottili di lega di tantalio e alluminio - Google Patents
Procedimento per aggiustare il coef ficiente di temperatura di resisten za di pellicole sottili di lega di tantalio e alluminioInfo
- Publication number
- IT976172B IT976172B IT7110172A IT7110172A IT976172B IT 976172 B IT976172 B IT 976172B IT 7110172 A IT7110172 A IT 7110172A IT 7110172 A IT7110172 A IT 7110172A IT 976172 B IT976172 B IT 976172B
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- adjusting
- resistance
- aluminum alloy
- alloy films
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Thermal Sciences (AREA)
- Inorganic Chemistry (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
- Heat Treatment Of Nonferrous Metals Or Alloys (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US21420571A | 1971-12-30 | 1971-12-30 | |
US24363072A | 1972-04-13 | 1972-04-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
IT976172B true IT976172B (it) | 1974-08-20 |
Family
ID=26908776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT7110172A IT976172B (it) | 1971-12-30 | 1972-12-27 | Procedimento per aggiustare il coef ficiente di temperatura di resisten za di pellicole sottili di lega di tantalio e alluminio |
Country Status (9)
Country | Link |
---|---|
JP (1) | JPS5436564B2 (ja) |
BE (1) | BE793097A (ja) |
CA (1) | CA971649A (ja) |
DE (1) | DE2262022C2 (ja) |
FR (1) | FR2167177A5 (ja) |
GB (1) | GB1379510A (ja) |
IT (1) | IT976172B (ja) |
NL (1) | NL7217204A (ja) |
SE (1) | SE382714B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5114861A (ja) * | 1974-07-30 | 1976-02-05 | Toyo Satsushi Kogyo Kk | Damiiburotsuku |
DE4028776C2 (de) * | 1990-07-03 | 1994-03-10 | Samsung Electronics Co Ltd | Verfahren zur Bildung einer metallischen Verdrahtungsschicht und Füllen einer Kontaktöffnung in einem Halbleiterbauelement |
DE4215664C1 (de) * | 1992-05-13 | 1993-11-25 | Mtu Muenchen Gmbh | Verfahren zum Aufbringen von metallischen Zwischenschichten und seine Anwendung |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3159556A (en) * | 1960-12-08 | 1964-12-01 | Bell Telephone Labor Inc | Stabilized tantalum film resistors |
BE634012A (ja) * | 1961-10-03 | |||
US3261082A (en) * | 1962-03-27 | 1966-07-19 | Ibm | Method of tailoring thin film impedance devices |
GB1067831A (en) * | 1964-03-11 | 1967-05-03 | Ultra Electronics Ltd | Improvements in thin film circuits |
US3420706A (en) * | 1964-06-23 | 1969-01-07 | Bell Telephone Labor Inc | Technique for fabrication of printed circuit resistors |
US3558461A (en) * | 1968-10-28 | 1971-01-26 | Bell Telephone Labor Inc | Thin film resistor and preparation thereof |
-
0
- BE BE793097D patent/BE793097A/xx unknown
-
1972
- 1972-07-26 CA CA147,987A patent/CA971649A/en not_active Expired
- 1972-12-11 SE SE1612172A patent/SE382714B/xx unknown
- 1972-12-18 NL NL7217204A patent/NL7217204A/xx not_active Application Discontinuation
- 1972-12-19 DE DE19722262022 patent/DE2262022C2/de not_active Expired
- 1972-12-27 IT IT7110172A patent/IT976172B/it active
- 1972-12-27 JP JP13012772A patent/JPS5436564B2/ja not_active Expired
- 1972-12-28 GB GB5975672A patent/GB1379510A/en not_active Expired
- 1972-12-29 FR FR7246996A patent/FR2167177A5/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4874411A (ja) | 1973-10-06 |
NL7217204A (ja) | 1973-07-03 |
CA971649A (en) | 1975-07-22 |
DE2262022A1 (de) | 1973-07-05 |
DE2262022C2 (de) | 1982-03-25 |
FR2167177A5 (ja) | 1973-08-17 |
BE793097A (fr) | 1973-04-16 |
GB1379510A (en) | 1975-01-02 |
JPS5436564B2 (ja) | 1979-11-09 |
SE382714B (sv) | 1976-02-09 |
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