IT7921081A0 - Sensore di pressione a semiconduttori, dotato di una pluralita' di diaframmi sensibili alla pressione e procedimento relativo. - Google Patents
Sensore di pressione a semiconduttori, dotato di una pluralita' di diaframmi sensibili alla pressione e procedimento relativo.Info
- Publication number
- IT7921081A0 IT7921081A0 IT7921081A IT2108179A IT7921081A0 IT 7921081 A0 IT7921081 A0 IT 7921081A0 IT 7921081 A IT7921081 A IT 7921081A IT 2108179 A IT2108179 A IT 2108179A IT 7921081 A0 IT7921081 A0 IT 7921081A0
- Authority
- IT
- Italy
- Prior art keywords
- pressure
- pressure sensor
- diaphragm sensitive
- relative procedure
- semiconductor
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
- G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2993678A JPS54123077A (en) | 1978-03-17 | 1978-03-17 | Pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
IT7921081A0 true IT7921081A0 (it) | 1979-03-16 |
IT1111588B IT1111588B (it) | 1986-01-13 |
Family
ID=12289864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT21081/79A IT1111588B (it) | 1978-03-17 | 1979-03-16 | Sensore di pressione a semiconduttori,dotato di una pluralita' di diaframmi sensibili alla pressione e procedimento relativo |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS54123077A (it) |
AU (1) | AU4500279A (it) |
FR (1) | FR2420210A1 (it) |
GB (1) | GB2036425B (it) |
IT (1) | IT1111588B (it) |
WO (1) | WO1979000783A1 (it) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4407296A (en) * | 1980-09-12 | 1983-10-04 | Medtronic, Inc. | Integral hermetic impantable pressure transducer |
EP0049955A1 (en) * | 1980-10-09 | 1982-04-21 | General Motors Corporation | Dual cavity pressure sensor |
JPS57104835A (en) * | 1980-12-23 | 1982-06-30 | Toyota Motor Corp | Detecting method for pressure in internal combustion engine |
US4432372A (en) * | 1981-08-28 | 1984-02-21 | Medtronic, Inc. | Two-lead power/signal multiplexed transducer |
JPS5915944U (ja) * | 1982-07-21 | 1984-01-31 | 株式会社日立製作所 | 差圧検出器 |
US4730496A (en) * | 1986-06-23 | 1988-03-15 | Rosemount Inc. | Capacitance pressure sensor |
US4773269A (en) * | 1986-07-28 | 1988-09-27 | Rosemount Inc. | Media isolated differential pressure sensors |
DE3772514D1 (de) * | 1986-10-28 | 1991-10-02 | Sumitomo Electric Industries | Messverfahren fuer einen halbleiter-druckmessfuehler. |
US4850228A (en) * | 1987-05-27 | 1989-07-25 | Smc Corporation | Pressure meter |
JPS6461634A (en) * | 1987-09-02 | 1989-03-08 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JPS6461637A (en) * | 1987-09-02 | 1989-03-08 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JPH0814518B2 (ja) * | 1987-12-28 | 1996-02-14 | 松下電器産業株式会社 | 半導体圧力センサの製造方法 |
JPH03200034A (ja) * | 1989-12-28 | 1991-09-02 | Matsushita Electric Ind Co Ltd | 半導体圧力センサ |
JPH03200035A (ja) * | 1989-12-28 | 1991-09-02 | Matsushita Electric Ind Co Ltd | 半導体圧力センサ |
JP2771070B2 (ja) * | 1992-03-25 | 1998-07-02 | 日立建機株式会社 | 差圧センサ |
AU658524B1 (en) * | 1993-08-17 | 1995-04-13 | Yokogawa Electric Corporation | Semiconductor type differential pressure measurement apparatus and method for manufacturing the same |
US5992240A (en) * | 1995-11-21 | 1999-11-30 | Fuji Electric Co., Ltd. | Pressure detecting apparatus for measuring pressure based on detected capacitance |
US7077008B2 (en) * | 2004-07-02 | 2006-07-18 | Honeywell International Inc. | Differential pressure measurement using backside sensing and a single ASIC |
JP2008511003A (ja) * | 2004-08-23 | 2008-04-10 | ハネウェル・インターナショナル・インコーポレーテッド | 微細加工された絶対圧検知ダイを使用している排ガス循環装置 |
US7401522B2 (en) * | 2005-05-26 | 2008-07-22 | Rosemount Inc. | Pressure sensor using compressible sensor body |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE336042B (it) * | 1967-05-03 | 1971-06-21 | Mallory & Co Inc P R | |
JPS5135294A (ja) * | 1974-09-20 | 1976-03-25 | Hitachi Ltd | Handotaiatsuryokuhenkanki |
JPS5190587A (it) * | 1975-02-07 | 1976-08-09 | ||
JPS5255392A (en) * | 1975-10-31 | 1977-05-06 | Hitachi Ltd | Semiconductor pressure sensor |
-
1978
- 1978-03-17 JP JP2993678A patent/JPS54123077A/ja active Pending
-
1979
- 1979-03-09 AU AU45002/79A patent/AU4500279A/en not_active Abandoned
- 1979-03-12 GB GB7937207A patent/GB2036425B/en not_active Expired
- 1979-03-12 WO PCT/JP1979/000062 patent/WO1979000783A1/ja unknown
- 1979-03-15 FR FR7906606A patent/FR2420210A1/fr active Granted
- 1979-03-16 IT IT21081/79A patent/IT1111588B/it active
Also Published As
Publication number | Publication date |
---|---|
GB2036425A (en) | 1980-06-25 |
JPS54123077A (en) | 1979-09-25 |
GB2036425B (en) | 1983-02-09 |
WO1979000783A1 (en) | 1979-10-18 |
IT1111588B (it) | 1986-01-13 |
FR2420210A1 (fr) | 1979-10-12 |
AU4500279A (en) | 1979-09-20 |
FR2420210B1 (it) | 1984-07-06 |
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