MX146078A - Mejoras a transductor de presion capacitivo - Google Patents
Mejoras a transductor de presion capacitivoInfo
- Publication number
- MX146078A MX146078A MX176283A MX17628379A MX146078A MX 146078 A MX146078 A MX 146078A MX 176283 A MX176283 A MX 176283A MX 17628379 A MX17628379 A MX 17628379A MX 146078 A MX146078 A MX 146078A
- Authority
- MX
- Mexico
- Prior art keywords
- pressure transducer
- capacitive pressure
- capacitive
- transducer
- pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/871,274 US4178621A (en) | 1978-01-23 | 1978-01-23 | Electromechanical pressure transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
MX146078A true MX146078A (es) | 1982-05-11 |
Family
ID=25357085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX176283A MX146078A (es) | 1978-01-23 | 1979-01-15 | Mejoras a transductor de presion capacitivo |
Country Status (7)
Country | Link |
---|---|
US (1) | US4178621A (es) |
EP (1) | EP0003387B1 (es) |
JP (1) | JPS54118283A (es) |
AU (1) | AU518221B2 (es) |
BR (1) | BR7900408A (es) |
DE (1) | DE2964186D1 (es) |
MX (1) | MX146078A (es) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4380041A (en) * | 1978-09-25 | 1983-04-12 | Motorola Inc. | Capacitor pressure transducer with housing |
US4227419A (en) * | 1979-09-04 | 1980-10-14 | Kavlico Corporation | Capacitive pressure transducer |
JPS56162026A (en) * | 1980-05-16 | 1981-12-12 | Matsushita Electric Ind Co Ltd | Pressure detector |
US4336567A (en) * | 1980-06-30 | 1982-06-22 | The Bendix Corporation | Differential pressure transducer |
US4345299A (en) * | 1980-11-03 | 1982-08-17 | Motorola, Inc. | Capacitive pressure transducer assembly with improved output lead design |
US4392382A (en) * | 1981-03-09 | 1983-07-12 | Motorola Inc. | Linearized electronic capacitive pressure transducer |
JPS58731A (ja) * | 1981-06-25 | 1983-01-05 | Matsushita Electric Ind Co Ltd | 静電容量式圧力センサ |
US4414851A (en) * | 1981-08-28 | 1983-11-15 | Motorola, Inc. | Gauge pressure sensor |
DE3310643C2 (de) * | 1983-03-24 | 1986-04-10 | Karlheinz Dr. 7801 Schallstadt Ziegler | Drucksensor |
US4530029A (en) * | 1984-03-12 | 1985-07-16 | United Technologies Corporation | Capacitive pressure sensor with low parasitic capacitance |
US4746893A (en) * | 1985-01-31 | 1988-05-24 | Motorola, Inc. | Pressure transducer with sealed conductors |
US4586109A (en) * | 1985-04-01 | 1986-04-29 | Bourns Instruments, Inc. | Batch-process silicon capacitive pressure sensor |
JPS62170538U (es) * | 1986-04-18 | 1987-10-29 | ||
US4716492A (en) * | 1986-05-05 | 1987-12-29 | Texas Instruments Incorporated | Pressure sensor with improved capacitive pressure transducer |
US4774626A (en) * | 1986-05-05 | 1988-09-27 | Texas Instruments Incorporated | Pressure sensor with improved capacitive pressure transducer |
JPH0750789B2 (ja) * | 1986-07-18 | 1995-05-31 | 日産自動車株式会社 | 半導体圧力変換装置の製造方法 |
JPS63292032A (ja) * | 1987-05-26 | 1988-11-29 | Ngk Insulators Ltd | 圧力検出器 |
GB2217846A (en) * | 1988-04-22 | 1989-11-01 | Stc Plc | Pressure sensor |
DE8815425U1 (de) * | 1988-12-12 | 1990-04-12 | Fibronix Sensoren GmbH, 2300 Kiel | Überlastfester kapazitiver Drucksensor |
US5020377A (en) * | 1990-01-23 | 1991-06-04 | Kavlico Corporation | Low pressure transducer using metal foil diaphragm |
SE9700613D0 (sv) * | 1997-02-20 | 1997-02-20 | Cecap Ab | Sensorelement med temperaturmätning |
TW387198B (en) | 1997-09-03 | 2000-04-11 | Hosiden Corp | Audio sensor and its manufacturing method, and semiconductor electret capacitance microphone using the same |
US20040099061A1 (en) | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
JP3339563B2 (ja) * | 1998-06-09 | 2002-10-28 | 株式会社山武 | 静電容量式センサ |
US6223603B1 (en) * | 1999-05-18 | 2001-05-01 | Texas Instruments Incorporated | Capacitive pressure transducer having reduced output error |
US6698294B2 (en) * | 2000-09-07 | 2004-03-02 | Vega Grieshaber Kg | Pressure cell with temperature sensors and pressure measuring method |
CN100454455C (zh) * | 2001-07-17 | 2009-01-21 | Smc株式会社 | 微机电传感器 |
AU2003258296A1 (en) * | 2002-08-19 | 2004-03-03 | Czarnek And Orkin Laboratories, Inc. | Capacitive uterine contraction sensor |
US7570065B2 (en) * | 2006-03-01 | 2009-08-04 | Loadstar Sensors Inc | Cylindrical capacitive force sensing device and method |
US7231832B2 (en) * | 2004-09-13 | 2007-06-19 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | System and method for detecting cracks and their location |
US7201057B2 (en) | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
US7141447B2 (en) | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
US7137301B2 (en) | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
US7204150B2 (en) * | 2005-01-14 | 2007-04-17 | Mks Instruments, Inc. | Turbo sump for use with capacitive pressure sensor |
DE102009027742A1 (de) * | 2009-07-15 | 2011-01-27 | Endress + Hauser Gmbh + Co. Kg | Kapazitive keramische Druckmesszelle und Drucksensor mit einer solchen Druckmesszelle |
US10954709B2 (en) | 2009-08-21 | 2021-03-23 | Uusi, Llc | Vehicle assembly having a capacitive sensor |
US9051769B2 (en) | 2009-08-21 | 2015-06-09 | Uusi, Llc | Vehicle assembly having a capacitive sensor |
US10017977B2 (en) | 2009-08-21 | 2018-07-10 | Uusi, Llc | Keyless entry assembly having capacitance sensor operative for detecting objects |
US9575481B2 (en) | 2009-08-21 | 2017-02-21 | Uusi, Llc | Fascia panel assembly having capacitance sensor operative for detecting objects |
US9199608B2 (en) * | 2009-08-21 | 2015-12-01 | Uusi, Llc | Keyless entry assembly having capacitance sensor operative for detecting objects |
US9705494B2 (en) | 2009-08-21 | 2017-07-11 | Uusi, Llc | Vehicle assemblies having fascia panels with capacitance sensors operative for detecting proximal objects |
US11634937B2 (en) | 2009-08-21 | 2023-04-25 | Uusi, Llc | Vehicle assembly having a capacitive sensor |
US9845629B2 (en) | 2009-08-21 | 2017-12-19 | Uusi, Llc | Vehicle keyless entry assembly having capacitance sensor operative for detecting objects |
US9383283B2 (en) * | 2014-01-16 | 2016-07-05 | Sensata Technologies, Inc. | Pressure transducer with capacitively coupled source electrode |
CA3021078C (en) * | 2016-04-11 | 2024-02-13 | The Alfred E. Mann Foundation For Scientific Research | Pressure sensors with tensioned membranes |
CN109374194B (zh) * | 2018-11-22 | 2020-05-19 | 华中科技大学 | 一种参考压力可调的柔性压力传感器阵列及其制备方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL281794A (es) * | 1961-08-07 | |||
US3308357A (en) * | 1964-03-11 | 1967-03-07 | Micromatic Hone Corp | Hydraulic/pneumatic to electric transducer |
US3405559A (en) * | 1966-11-07 | 1968-10-15 | United Aircraft Corp | Pressure transducer |
US3619742A (en) * | 1970-05-21 | 1971-11-09 | Rosemount Eng Co Ltd | Shielded capacitance pressure sensor |
US3962921A (en) * | 1972-02-04 | 1976-06-15 | The Garrett Corporation | Compensated pressure transducer |
GB1450709A (en) * | 1973-12-31 | 1976-09-29 | Birchall D J | Pressure transducers |
US3965746A (en) * | 1974-11-04 | 1976-06-29 | Teledyne Industries, Inc. | Pressure transducer |
US4064550A (en) * | 1976-03-22 | 1977-12-20 | Hewlett-Packard Company | High fidelity pressure transducer |
-
1978
- 1978-01-23 US US05/871,274 patent/US4178621A/en not_active Expired - Lifetime
-
1979
- 1979-01-02 EP EP79300001A patent/EP0003387B1/en not_active Expired
- 1979-01-02 DE DE7979300001T patent/DE2964186D1/de not_active Expired
- 1979-01-15 MX MX176283A patent/MX146078A/es unknown
- 1979-01-17 AU AU43426/79A patent/AU518221B2/en not_active Ceased
- 1979-01-22 BR BR7900408A patent/BR7900408A/pt unknown
- 1979-01-22 JP JP652679A patent/JPS54118283A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE2964186D1 (en) | 1983-01-13 |
US4178621A (en) | 1979-12-11 |
EP0003387B1 (en) | 1982-12-08 |
JPS54118283A (en) | 1979-09-13 |
AU518221B2 (en) | 1981-09-17 |
BR7900408A (pt) | 1979-08-21 |
EP0003387A1 (en) | 1979-08-08 |
AU4342679A (en) | 1979-08-02 |
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