IT1112793B - Trasduttore di pressione a sensori piezoresistivi elettricamente schermati e metodo per produrre i trasduttori detti - Google Patents

Trasduttore di pressione a sensori piezoresistivi elettricamente schermati e metodo per produrre i trasduttori detti

Info

Publication number
IT1112793B
IT1112793B IT22259/79A IT2225979A IT1112793B IT 1112793 B IT1112793 B IT 1112793B IT 22259/79 A IT22259/79 A IT 22259/79A IT 2225979 A IT2225979 A IT 2225979A IT 1112793 B IT1112793 B IT 1112793B
Authority
IT
Italy
Prior art keywords
transducers
produce
pressure transducer
piezoresistive pressure
electrically shielded
Prior art date
Application number
IT22259/79A
Other languages
English (en)
Other versions
IT7922259A0 (it
Original Assignee
Babcock & Wilcox Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babcock & Wilcox Co filed Critical Babcock & Wilcox Co
Publication of IT7922259A0 publication Critical patent/IT7922259A0/it
Application granted granted Critical
Publication of IT1112793B publication Critical patent/IT1112793B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
IT22259/79A 1978-08-28 1979-04-30 Trasduttore di pressione a sensori piezoresistivi elettricamente schermati e metodo per produrre i trasduttori detti IT1112793B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US93730478A 1978-08-28 1978-08-28

Publications (2)

Publication Number Publication Date
IT7922259A0 IT7922259A0 (it) 1979-04-30
IT1112793B true IT1112793B (it) 1986-01-20

Family

ID=25469756

Family Applications (1)

Application Number Title Priority Date Filing Date
IT22259/79A IT1112793B (it) 1978-08-28 1979-04-30 Trasduttore di pressione a sensori piezoresistivi elettricamente schermati e metodo per produrre i trasduttori detti

Country Status (9)

Country Link
JP (1) JPS5533092A (it)
AU (1) AU503379B1 (it)
BR (1) BR7902641A (it)
CA (1) CA1134021A (it)
DE (1) DE2921043C2 (it)
ES (2) ES480075A1 (it)
FR (1) FR2435022A1 (it)
GB (1) GB2029094B (it)
IT (1) IT1112793B (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4327350A (en) * 1979-07-17 1982-04-27 Data Instruments, Inc. Pressure transducer
JPS5796573A (en) * 1980-12-08 1982-06-15 Hitachi Ltd Semiconductor strain transducer
JPS58197780A (ja) * 1982-05-14 1983-11-17 Hitachi Ltd 半導体圧力変換器
JPS59230101A (ja) * 1983-06-13 1984-12-24 Tokyo Electric Co Ltd 歪センサ
CA1314410C (en) * 1986-12-08 1993-03-16 Masanori Nishiguchi Wiring structure of semiconductor pressure sensor
FR2643148B1 (fr) * 1989-02-15 1991-12-06 Schlumberger Ind Sa Capteur de pression du type semiconducteur sur isolant
DE102007057877A1 (de) 2007-11-29 2009-06-04 Endress + Hauser Gmbh + Co. Kg Drucksensor
CN116222839B (zh) * 2023-05-09 2023-07-18 苏州亿波达光电子科技有限公司 一种感测元件及压力传感器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE875879C (de) * 1951-07-25 1953-05-07 Land Abschirmverfahren fuer Dehnungsmessstreifen
GB1265018A (it) * 1968-08-27 1972-03-01
US4050049A (en) * 1976-02-09 1977-09-20 Signetics Corporation Solid state force transducer, support and method of making same
FR2367280A1 (fr) * 1976-10-08 1978-05-05 Schlumberger Ind Sa Capteur a jauges de contrainte equipe d'une sonde de temperature
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter

Also Published As

Publication number Publication date
JPS5533092A (en) 1980-03-08
FR2435022B1 (it) 1983-04-01
GB2029094B (en) 1983-01-26
ES480075A1 (es) 1979-11-16
CA1134021A (en) 1982-10-19
DE2921043C2 (de) 1985-07-04
IT7922259A0 (it) 1979-04-30
FR2435022A1 (fr) 1980-03-28
AU503379B1 (en) 1979-08-30
ES480076A1 (es) 1979-11-16
GB2029094A (en) 1980-03-12
BR7902641A (pt) 1980-03-18
DE2921043A1 (de) 1980-03-13

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