DE2964186D1 - Improved electromechanical pressure transducer - Google Patents

Improved electromechanical pressure transducer

Info

Publication number
DE2964186D1
DE2964186D1 DE7979300001T DE2964186T DE2964186D1 DE 2964186 D1 DE2964186 D1 DE 2964186D1 DE 7979300001 T DE7979300001 T DE 7979300001T DE 2964186 T DE2964186 T DE 2964186T DE 2964186 D1 DE2964186 D1 DE 2964186D1
Authority
DE
Germany
Prior art keywords
pressure transducer
electromechanical pressure
improved electromechanical
improved
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE7979300001T
Other languages
English (en)
Inventor
Joseph J Simonelic
Roland K Ho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of DE2964186D1 publication Critical patent/DE2964186D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
DE7979300001T 1978-01-23 1979-01-02 Improved electromechanical pressure transducer Expired DE2964186D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/871,274 US4178621A (en) 1978-01-23 1978-01-23 Electromechanical pressure transducer

Publications (1)

Publication Number Publication Date
DE2964186D1 true DE2964186D1 (en) 1983-01-13

Family

ID=25357085

Family Applications (1)

Application Number Title Priority Date Filing Date
DE7979300001T Expired DE2964186D1 (en) 1978-01-23 1979-01-02 Improved electromechanical pressure transducer

Country Status (7)

Country Link
US (1) US4178621A (de)
EP (1) EP0003387B1 (de)
JP (1) JPS54118283A (de)
AU (1) AU518221B2 (de)
BR (1) BR7900408A (de)
DE (1) DE2964186D1 (de)
MX (1) MX146078A (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4380041A (en) * 1978-09-25 1983-04-12 Motorola Inc. Capacitor pressure transducer with housing
US4227419A (en) * 1979-09-04 1980-10-14 Kavlico Corporation Capacitive pressure transducer
JPS56162026A (en) * 1980-05-16 1981-12-12 Matsushita Electric Ind Co Ltd Pressure detector
US4336567A (en) * 1980-06-30 1982-06-22 The Bendix Corporation Differential pressure transducer
US4345299A (en) * 1980-11-03 1982-08-17 Motorola, Inc. Capacitive pressure transducer assembly with improved output lead design
US4392382A (en) * 1981-03-09 1983-07-12 Motorola Inc. Linearized electronic capacitive pressure transducer
JPS58731A (ja) * 1981-06-25 1983-01-05 Matsushita Electric Ind Co Ltd 静電容量式圧力センサ
US4414851A (en) * 1981-08-28 1983-11-15 Motorola, Inc. Gauge pressure sensor
DE3310643C2 (de) * 1983-03-24 1986-04-10 Karlheinz Dr. 7801 Schallstadt Ziegler Drucksensor
US4530029A (en) * 1984-03-12 1985-07-16 United Technologies Corporation Capacitive pressure sensor with low parasitic capacitance
US4746893A (en) * 1985-01-31 1988-05-24 Motorola, Inc. Pressure transducer with sealed conductors
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
JPS62170538U (de) * 1986-04-18 1987-10-29
US4774626A (en) * 1986-05-05 1988-09-27 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4716492A (en) * 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
JPS63292032A (ja) * 1987-05-26 1988-11-29 Ngk Insulators Ltd 圧力検出器
GB2217846A (en) * 1988-04-22 1989-11-01 Stc Plc Pressure sensor
DE8815425U1 (de) * 1988-12-12 1990-04-12 Fibronix Sensoren Gmbh, 2300 Kiel, De
US5020377A (en) * 1990-01-23 1991-06-04 Kavlico Corporation Low pressure transducer using metal foil diaphragm
SE9700613D0 (sv) * 1997-02-20 1997-02-20 Cecap Ab Sensorelement med temperaturmätning
TW387198B (en) 1997-09-03 2000-04-11 Hosiden Corp Audio sensor and its manufacturing method, and semiconductor electret capacitance microphone using the same
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
JP3339563B2 (ja) * 1998-06-09 2002-10-28 株式会社山武 静電容量式センサ
US6223603B1 (en) * 1999-05-18 2001-05-01 Texas Instruments Incorporated Capacitive pressure transducer having reduced output error
US6698294B2 (en) * 2000-09-07 2004-03-02 Vega Grieshaber Kg Pressure cell with temperature sensors and pressure measuring method
US7047814B2 (en) * 2001-07-17 2006-05-23 Redwood Microsystems, Inc. Micro-electromechanical sensor
US20060149168A1 (en) * 2002-08-19 2006-07-06 Robert Czarnek Capacitive uterine contraction sensor
US7570065B2 (en) * 2006-03-01 2009-08-04 Loadstar Sensors Inc Cylindrical capacitive force sensing device and method
US7231832B2 (en) * 2004-09-13 2007-06-19 United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration System and method for detecting cracks and their location
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7204150B2 (en) * 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
DE102009027742A1 (de) * 2009-07-15 2011-01-27 Endress + Hauser Gmbh + Co. Kg Kapazitive keramische Druckmesszelle und Drucksensor mit einer solchen Druckmesszelle
US9575481B2 (en) 2009-08-21 2017-02-21 Uusi, Llc Fascia panel assembly having capacitance sensor operative for detecting objects
US9845629B2 (en) 2009-08-21 2017-12-19 Uusi, Llc Vehicle keyless entry assembly having capacitance sensor operative for detecting objects
US10954709B2 (en) 2009-08-21 2021-03-23 Uusi, Llc Vehicle assembly having a capacitive sensor
US11634937B2 (en) 2009-08-21 2023-04-25 Uusi, Llc Vehicle assembly having a capacitive sensor
US9051769B2 (en) 2009-08-21 2015-06-09 Uusi, Llc Vehicle assembly having a capacitive sensor
US9199608B2 (en) * 2009-08-21 2015-12-01 Uusi, Llc Keyless entry assembly having capacitance sensor operative for detecting objects
US9705494B2 (en) 2009-08-21 2017-07-11 Uusi, Llc Vehicle assemblies having fascia panels with capacitance sensors operative for detecting proximal objects
US10017977B2 (en) 2009-08-21 2018-07-10 Uusi, Llc Keyless entry assembly having capacitance sensor operative for detecting objects
US9383283B2 (en) 2014-01-16 2016-07-05 Sensata Technologies, Inc. Pressure transducer with capacitively coupled source electrode
EP3443315B1 (de) * 2016-04-11 2021-06-16 The Alfred E. Mann Foundation for Scientific Research Implantierbare drucksensoren mit spannmembranen für den gebrauch im menschlichen körper
CN109374194B (zh) * 2018-11-22 2020-05-19 华中科技大学 一种参考压力可调的柔性压力传感器阵列及其制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL281794A (de) * 1961-08-07
US3308357A (en) * 1964-03-11 1967-03-07 Micromatic Hone Corp Hydraulic/pneumatic to electric transducer
US3405559A (en) * 1966-11-07 1968-10-15 United Aircraft Corp Pressure transducer
US3619742A (en) * 1970-05-21 1971-11-09 Rosemount Eng Co Ltd Shielded capacitance pressure sensor
US3962921A (en) * 1972-02-04 1976-06-15 The Garrett Corporation Compensated pressure transducer
GB1450709A (en) * 1973-12-31 1976-09-29 Birchall D J Pressure transducers
US3965746A (en) * 1974-11-04 1976-06-29 Teledyne Industries, Inc. Pressure transducer
US4064550A (en) * 1976-03-22 1977-12-20 Hewlett-Packard Company High fidelity pressure transducer

Also Published As

Publication number Publication date
EP0003387B1 (de) 1982-12-08
MX146078A (es) 1982-05-11
AU518221B2 (en) 1981-09-17
AU4342679A (en) 1979-08-02
US4178621A (en) 1979-12-11
JPS54118283A (en) 1979-09-13
BR7900408A (pt) 1979-08-21
EP0003387A1 (de) 1979-08-08

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee