IT222135Z2 - Dispositivo per il rivestimento continuo di substrati nastriformi - Google Patents
Dispositivo per il rivestimento continuo di substrati nastriformiInfo
- Publication number
- IT222135Z2 IT222135Z2 ITMI911027U ITMI911027U IT222135Z2 IT 222135 Z2 IT222135 Z2 IT 222135Z2 IT MI911027 U ITMI911027 U IT MI911027U IT MI911027 U ITMI911027 U IT MI911027U IT 222135 Z2 IT222135 Z2 IT 222135Z2
- Authority
- IT
- Italy
- Prior art keywords
- evaporation
- substrates
- cavities
- belt
- vessels
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
In un dispositivo per il rivestimento continuo di substrati nastriformi in una camera di rivestimento sotto vuoto, con una molteplicità di navicelle di evaporazione (1, 1',...) di grandezza e configurazione all'incirca uguali, formanti un banco di evaporazione, disposte longitudinalmente rispetto alla direzione di scorrimento (A) del nastro e parallele, all'incirca ad uguali distanze fra loro, che complessivamente sono formate da una ceramica elettricamente conduttiva e sono riscaldabili mediante il passaggio diretto di una corrente, e in cui è previsto un dispositivo per l'alimentazione continua nelle navicelle di evaporazione di un filo da evaporare, le cavità (K, K'...) delle singole navicelle di evaporazione (1, 1'...) del banco di evaporazione sono disposte, ciascuna, sfalsate fra loro, tutte le cavità (K, K'...) ricoprendo complessivamente una stretta zona di rivestimento (B) che si estende trasversalmente alla direzione di scorrimento (A) del nastro.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4120910A DE4120910A1 (de) | 1990-08-27 | 1991-06-25 | Vorrichtung zur laufenden beschichtung von bandfoermigen substraten |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI911027V0 ITMI911027V0 (it) | 1991-11-25 |
ITMI911027U1 ITMI911027U1 (it) | 1993-05-25 |
IT222135Z2 true IT222135Z2 (it) | 1995-01-09 |
Family
ID=6434677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI911027U IT222135Z2 (it) | 1991-06-25 | 1991-11-25 | Dispositivo per il rivestimento continuo di substrati nastriformi |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0520133B1 (it) |
JP (1) | JPH05179446A (it) |
KR (1) | KR960002118B1 (it) |
DE (2) | DE4120910A1 (it) |
ES (1) | ES2073790T3 (it) |
IT (1) | IT222135Z2 (it) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE970246C (de) * | 1948-10-02 | 1958-08-28 | Siemens Ag | Vorrichtung zur laufenden Bedampfung endloser Gebilde |
DE3615487A1 (de) * | 1986-05-07 | 1987-11-19 | Helmuth Schmoock | Vorrichtung zur gleichmaessigen metallisierung von folien |
DE4027034C1 (it) * | 1990-08-27 | 1991-09-12 | Leybold Ag, 6450 Hanau, De |
-
1991
- 1991-06-25 DE DE4120910A patent/DE4120910A1/de not_active Withdrawn
- 1991-11-25 IT ITMI911027U patent/IT222135Z2/it active IP Right Grant
-
1992
- 1992-01-22 ES ES92100972T patent/ES2073790T3/es not_active Expired - Lifetime
- 1992-01-22 DE DE59202673T patent/DE59202673D1/de not_active Expired - Fee Related
- 1992-01-22 EP EP92100972A patent/EP0520133B1/de not_active Expired - Lifetime
- 1992-02-07 KR KR1019920001751A patent/KR960002118B1/ko not_active IP Right Cessation
- 1992-06-25 JP JP4167402A patent/JPH05179446A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE59202673D1 (de) | 1995-08-03 |
JPH05179446A (ja) | 1993-07-20 |
EP0520133B1 (de) | 1995-06-28 |
DE4120910A1 (de) | 1993-01-07 |
ITMI911027V0 (it) | 1991-11-25 |
ES2073790T3 (es) | 1995-08-16 |
ITMI911027U1 (it) | 1993-05-25 |
KR930000707A (ko) | 1993-01-15 |
EP0520133A1 (de) | 1992-12-30 |
KR960002118B1 (ko) | 1996-02-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted |