KR930000707A - 밴드형 기초재의 연속 코팅 장치 - Google Patents

밴드형 기초재의 연속 코팅 장치 Download PDF

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Publication number
KR930000707A
KR930000707A KR1019920001751A KR920001751A KR930000707A KR 930000707 A KR930000707 A KR 930000707A KR 1019920001751 A KR1019920001751 A KR 1019920001751A KR 920001751 A KR920001751 A KR 920001751A KR 930000707 A KR930000707 A KR 930000707A
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KR
South Korea
Prior art keywords
continuous coating
band
base material
type base
coating device
Prior art date
Application number
KR1019920001751A
Other languages
English (en)
Other versions
KR960002118B1 (ko
Inventor
엘베르스 브조에른
루엡잠 클레멘스
하인쯔 조헨
하르바르트 게오르크
라이볼트 울리히
로쓰 노르베르트
Original Assignee
페텔 솜멜캄프 에리히 투테
레이볼드 앗크티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 페텔 솜멜캄프 에리히 투테, 레이볼드 앗크티엔게젤샤프트 filed Critical 페텔 솜멜캄프 에리히 투테
Publication of KR930000707A publication Critical patent/KR930000707A/ko
Application granted granted Critical
Publication of KR960002118B1 publication Critical patent/KR960002118B1/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

내용 없음

Description

밴드형 기초재의 연속 코팅 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 독립소스로서 배열된 선행기술의 알루미늄 밴드코팅용의 증착용기의 평면도.

Claims (4)

  1. 모두 전도성의 세라믹으로 만들어져 전류가 직접 통과함으로서 가열될 수 있는 같은 크기와 모양을 한 여러개의 증착기(1, 1`,...)가 밴드(A)의 진행방향과 같은 간격(X)의 평행한 증착기열을 형성하고, 증착할 와이어를 증착용기에 연속적으로 공급할 장치가 진공실 내에 설치되고, 증착용기열의 각 증착기(1, 1`,...)가 서로 엇갈려 배열되고, 전체 증착기(1, 1`,...)가 같이 밴드의 진행방향(A)과 수직인 좁은 코팅지역(B)을 카바함을 특징으로 하는 밴드형 기초재의 연속코팅장치.
  2. 제1항에 있어서, 코팅지역(B)의 넓이가 2×a이고, 이 넓이가 증착기(1, 1`,...)의 전반길이 보다 작음을 특징으로 하는 배드형 기초재의 연속코팅장치.
  3. 제1항 내지 제2항에 있어서, 인접한 두 증착기(1, 1`,...)의 간격(x)는 증착기(1,1',...)길이의 2/3 길이임을 특징으로 하는 밴드형 기초재의 연속코팅장치.
  4. 제1항 내지 제3항에 있어서, 각 증착기(1, 1`,...)에 공급된 전력은 독자적으로 통제될 수 있음을 특징으로 하는 밴드형 기초재의 연속코팅장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920001751A 1991-06-25 1992-02-07 밴드형 기초재의 연속 코팅 장치 KR960002118B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4120910A DE4120910A1 (de) 1990-08-27 1991-06-25 Vorrichtung zur laufenden beschichtung von bandfoermigen substraten
DEP4120910.9 1991-06-25

Publications (2)

Publication Number Publication Date
KR930000707A true KR930000707A (ko) 1993-01-15
KR960002118B1 KR960002118B1 (ko) 1996-02-10

Family

ID=6434677

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920001751A KR960002118B1 (ko) 1991-06-25 1992-02-07 밴드형 기초재의 연속 코팅 장치

Country Status (6)

Country Link
EP (1) EP0520133B1 (ko)
JP (1) JPH05179446A (ko)
KR (1) KR960002118B1 (ko)
DE (2) DE4120910A1 (ko)
ES (1) ES2073790T3 (ko)
IT (1) IT222135Z2 (ko)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE970246C (de) * 1948-10-02 1958-08-28 Siemens Ag Vorrichtung zur laufenden Bedampfung endloser Gebilde
DE3615487A1 (de) * 1986-05-07 1987-11-19 Helmuth Schmoock Vorrichtung zur gleichmaessigen metallisierung von folien
DE4027034C1 (ko) * 1990-08-27 1991-09-12 Leybold Ag, 6450 Hanau, De

Also Published As

Publication number Publication date
DE59202673D1 (de) 1995-08-03
JPH05179446A (ja) 1993-07-20
EP0520133B1 (de) 1995-06-28
DE4120910A1 (de) 1993-01-07
ITMI911027V0 (it) 1991-11-25
ES2073790T3 (es) 1995-08-16
ITMI911027U1 (it) 1993-05-25
IT222135Z2 (it) 1995-01-09
EP0520133A1 (de) 1992-12-30
KR960002118B1 (ko) 1996-02-10

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