IT1392793B1 - Condensatore integrato con piatto a spessore non-uniforme - Google Patents

Condensatore integrato con piatto a spessore non-uniforme

Info

Publication number
IT1392793B1
IT1392793B1 ITMI2008A002353A ITMI20082353A IT1392793B1 IT 1392793 B1 IT1392793 B1 IT 1392793B1 IT MI2008A002353 A ITMI2008A002353 A IT MI2008A002353A IT MI20082353 A ITMI20082353 A IT MI20082353A IT 1392793 B1 IT1392793 B1 IT 1392793B1
Authority
IT
Italy
Prior art keywords
uniform thickness
thickness plate
integrated condenser
condenser
integrated
Prior art date
Application number
ITMI2008A002353A
Other languages
English (en)
Inventor
Franco Antonio Di
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITMI2008A002353A priority Critical patent/IT1392793B1/it
Priority to US12/649,235 priority patent/US9054225B2/en
Publication of ITMI20082353A1 publication Critical patent/ITMI20082353A1/it
Application granted granted Critical
Publication of IT1392793B1 publication Critical patent/IT1392793B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/86—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions
    • H01L28/87—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions made by depositing layers, e.g. by depositing alternating conductive and insulating layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
    • H01L23/5223—Capacitor integral with wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/75—Electrodes comprising two or more layers, e.g. comprising a barrier layer and a metal layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/86—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Inorganic Insulating Materials (AREA)
  • Soft Magnetic Materials (AREA)
  • Battery Electrode And Active Subsutance (AREA)
ITMI2008A002353A 2008-12-30 2008-12-30 Condensatore integrato con piatto a spessore non-uniforme IT1392793B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITMI2008A002353A IT1392793B1 (it) 2008-12-30 2008-12-30 Condensatore integrato con piatto a spessore non-uniforme
US12/649,235 US9054225B2 (en) 2008-12-30 2009-12-29 Integrated capacitor having a non-uniform thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI2008A002353A IT1392793B1 (it) 2008-12-30 2008-12-30 Condensatore integrato con piatto a spessore non-uniforme

Publications (2)

Publication Number Publication Date
ITMI20082353A1 ITMI20082353A1 (it) 2010-06-30
IT1392793B1 true IT1392793B1 (it) 2012-03-23

Family

ID=41110437

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2008A002353A IT1392793B1 (it) 2008-12-30 2008-12-30 Condensatore integrato con piatto a spessore non-uniforme

Country Status (2)

Country Link
US (1) US9054225B2 (it)
IT (1) IT1392793B1 (it)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102664161B (zh) * 2012-05-25 2016-11-16 杭州士兰集成电路有限公司 高压bcd工艺中高压器件的隔离结构及其制造方法
CN102779732A (zh) * 2012-08-16 2012-11-14 上海华力微电子有限公司 多层金属-氧化硅-金属电容器的制作方法
CN103839916B (zh) * 2012-11-26 2016-06-08 上海华虹宏力半导体制造有限公司 Mom电容
CN103839917B (zh) * 2012-11-27 2017-08-25 中芯国际集成电路制造(上海)有限公司 Mim电容及其形成方法
US9589914B2 (en) * 2014-11-28 2017-03-07 Infineon Technologies Ag Semiconductor chip
US10840205B2 (en) 2017-09-24 2020-11-17 Invensas Bonding Technologies, Inc. Chemical mechanical polishing for hybrid bonding
US11056348B2 (en) 2018-04-05 2021-07-06 Invensas Bonding Technologies, Inc. Bonding surfaces for microelectronics
US11749645B2 (en) 2018-06-13 2023-09-05 Adeia Semiconductor Bonding Technologies Inc. TSV as pad
US11393779B2 (en) 2018-06-13 2022-07-19 Invensas Bonding Technologies, Inc. Large metal pads over TSV
US11011494B2 (en) * 2018-08-31 2021-05-18 Invensas Bonding Technologies, Inc. Layer structures for making direct metal-to-metal bonds at low temperatures in microelectronics
US11158573B2 (en) 2018-10-22 2021-10-26 Invensas Bonding Technologies, Inc. Interconnect structures
US11264357B1 (en) 2020-10-20 2022-03-01 Invensas Corporation Mixed exposure for large die

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10010288C1 (de) * 2000-02-25 2001-09-20 Infineon Technologies Ag Verfahren zur Herstellung einer ferroelektrischen Kondensatoranordnung
TWI301915B (it) * 2000-03-17 2008-10-11 Seiko Epson Corp
EP1170797A3 (en) * 2000-07-04 2005-05-25 Alps Electric Co., Ltd. Thin-film capacitor element and electronic circuit board on which thin-film capacitor element is formed
JP3843708B2 (ja) * 2000-07-14 2006-11-08 日本電気株式会社 半導体装置およびその製造方法ならびに薄膜コンデンサ
JP2002076298A (ja) * 2000-08-23 2002-03-15 Matsushita Electric Ind Co Ltd 半導体記憶装置およびその製造方法
US6806553B2 (en) * 2001-03-30 2004-10-19 Kyocera Corporation Tunable thin film capacitor
US6825080B1 (en) * 2003-10-02 2004-11-30 Chartered Semiconductor Manufacturing Ltd. Method for forming a MIM capacitor
DE102004039803B4 (de) * 2004-08-17 2006-12-07 Infineon Technologies Ag Verfahren zur Herstellung einer Leitbahnanordnung mit erhöhter kapazitiver Kopplung sowie zugehörige Leitbahnanordnung
KR100796499B1 (ko) * 2005-12-29 2008-01-21 동부일렉트로닉스 주식회사 커패시터를 갖는 반도체 소자 및 이의 제조방법
JP5055768B2 (ja) * 2006-01-16 2012-10-24 富士通セミコンダクター株式会社 半導体装置及びその製造方法
KR100764741B1 (ko) * 2006-06-08 2007-10-08 삼성전자주식회사 반도체 장치 및 그 형성 방법
KR100831268B1 (ko) * 2006-12-29 2008-05-22 동부일렉트로닉스 주식회사 반도체 소자의 커패시터 및 그 형성방법

Also Published As

Publication number Publication date
US9054225B2 (en) 2015-06-09
US20100164066A1 (en) 2010-07-01
ITMI20082353A1 (it) 2010-06-30

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