IT1271298B - Processo fotolitografico per contatto per la realizzazione di linee metalliche su un substrato - Google Patents
Processo fotolitografico per contatto per la realizzazione di linee metalliche su un substratoInfo
- Publication number
- IT1271298B IT1271298B ITMI942565A ITMI942565A IT1271298B IT 1271298 B IT1271298 B IT 1271298B IT MI942565 A ITMI942565 A IT MI942565A IT MI942565 A ITMI942565 A IT MI942565A IT 1271298 B IT1271298 B IT 1271298B
- Authority
- IT
- Italy
- Prior art keywords
- realization
- substrate
- contact
- metal lines
- photolithographic process
- Prior art date
Links
- 239000002184 metal Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0272—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers for lift-off processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76885—By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI942565A IT1271298B (it) | 1994-12-20 | 1994-12-20 | Processo fotolitografico per contatto per la realizzazione di linee metalliche su un substrato |
US08/561,264 US5856067A (en) | 1994-12-20 | 1995-11-21 | Contact photolithographic process for realizing metal lines on a substrate by varying exposure energy |
JP7310987A JPH08262744A (ja) | 1994-12-20 | 1995-11-29 | 基体上に金属ラインを形成する接触フォトリソグラフ処理方法 |
EP95119460A EP0718875A3 (en) | 1994-12-20 | 1995-12-11 | Contact photolithographic process for making metallic lines on a substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI942565A IT1271298B (it) | 1994-12-20 | 1994-12-20 | Processo fotolitografico per contatto per la realizzazione di linee metalliche su un substrato |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI942565A0 ITMI942565A0 (it) | 1994-12-20 |
ITMI942565A1 ITMI942565A1 (it) | 1996-06-20 |
IT1271298B true IT1271298B (it) | 1997-05-27 |
Family
ID=11370020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI942565A IT1271298B (it) | 1994-12-20 | 1994-12-20 | Processo fotolitografico per contatto per la realizzazione di linee metalliche su un substrato |
Country Status (4)
Country | Link |
---|---|
US (1) | US5856067A (it) |
EP (1) | EP0718875A3 (it) |
JP (1) | JPH08262744A (it) |
IT (1) | IT1271298B (it) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3522470B2 (ja) * | 1996-12-04 | 2004-04-26 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
KR20030068733A (ko) * | 2002-02-16 | 2003-08-25 | 광전자 주식회사 | 평탄화 구조를 갖는 반도체 소자 및 그 제조방법 |
US7772064B2 (en) | 2007-03-05 | 2010-08-10 | United Microelectronics Corp. | Method of fabricating self-aligned contact |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2529054C2 (de) * | 1975-06-30 | 1982-04-29 | Ibm Deutschland Gmbh, 7000 Stuttgart | Verfahren zur Herstellung eines zur Vorlage negativen Resistbildes |
JPS58159326A (ja) * | 1982-03-18 | 1983-09-21 | Toshiba Corp | 半導体用パタ−ン転写方式 |
JPS59141227A (ja) * | 1983-02-01 | 1984-08-13 | Mitsubishi Electric Corp | 微細パタ−ン形成方法 |
US5178986A (en) * | 1988-10-17 | 1993-01-12 | Shipley Company Inc. | Positive photoresist composition with naphthoquinonediazidesulfonate of oligomeric phenol |
US5091342A (en) * | 1989-02-24 | 1992-02-25 | Hewlett-Packard Company | Multilevel resist plated transfer layer process for fine line lithography |
JPH02262155A (ja) * | 1989-03-31 | 1990-10-24 | Toshiba Corp | レジストパターンの形成方法 |
US5178989A (en) * | 1989-07-21 | 1993-01-12 | Board Of Regents, The University Of Texas System | Pattern forming and transferring processes |
US5242770A (en) * | 1992-01-16 | 1993-09-07 | Microunity Systems Engineering, Inc. | Mask for photolithography |
-
1994
- 1994-12-20 IT ITMI942565A patent/IT1271298B/it active IP Right Grant
-
1995
- 1995-11-21 US US08/561,264 patent/US5856067A/en not_active Expired - Fee Related
- 1995-11-29 JP JP7310987A patent/JPH08262744A/ja active Pending
- 1995-12-11 EP EP95119460A patent/EP0718875A3/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
ITMI942565A1 (it) | 1996-06-20 |
EP0718875A3 (en) | 1997-10-01 |
EP0718875A2 (en) | 1996-06-26 |
US5856067A (en) | 1999-01-05 |
ITMI942565A0 (it) | 1994-12-20 |
JPH08262744A (ja) | 1996-10-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19971128 |