IT1220634B - Apparecchiatura per la crescita di nastri di cristalli dendritici di silicio - Google Patents

Apparecchiatura per la crescita di nastri di cristalli dendritici di silicio

Info

Publication number
IT1220634B
IT1220634B IT41521/88A IT4152188A IT1220634B IT 1220634 B IT1220634 B IT 1220634B IT 41521/88 A IT41521/88 A IT 41521/88A IT 4152188 A IT4152188 A IT 4152188A IT 1220634 B IT1220634 B IT 1220634B
Authority
IT
Italy
Prior art keywords
tapes
growth
equipment
dendritic crystal
silicon dendritic
Prior art date
Application number
IT41521/88A
Other languages
English (en)
Other versions
IT8841521A0 (it
Inventor
Paul Anthony Piotrowski
Edgar Leonard Kochka
Charles Stuart Duncan
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of IT8841521A0 publication Critical patent/IT8841521A0/it
Application granted granted Critical
Publication of IT1220634B publication Critical patent/IT1220634B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
    • Y10T117/1044—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die] including means forming a flat shape [e.g., ribbon]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
IT41521/88A 1987-02-09 1988-02-05 Apparecchiatura per la crescita di nastri di cristalli dendritici di silicio IT1220634B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/012,779 US4747774A (en) 1987-02-09 1987-02-09 Conforming crucible/susceptor system for silicon crystal growth

Publications (2)

Publication Number Publication Date
IT8841521A0 IT8841521A0 (it) 1988-02-05
IT1220634B true IT1220634B (it) 1990-06-15

Family

ID=21756655

Family Applications (1)

Application Number Title Priority Date Filing Date
IT41521/88A IT1220634B (it) 1987-02-09 1988-02-05 Apparecchiatura per la crescita di nastri di cristalli dendritici di silicio

Country Status (6)

Country Link
US (1) US4747774A (it)
JP (1) JP2750689B2 (it)
AU (1) AU595675B2 (it)
ES (1) ES2008973A6 (it)
IN (1) IN168934B (it)
IT (1) IT1220634B (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5085582A (en) * 1990-07-24 1992-02-04 Eaton Corporation Silicon nitride containers for the sintering of silicon nitride ceramics
US5395180A (en) * 1993-12-14 1995-03-07 Advanced Ceramics Corporation Boron nitride vaporization vessel
DE102004024358A1 (de) 2004-05-17 2005-12-15 Multivac Sepp Haggenmüller Gmbh & Co. Kg Verpackungsmaschine und Verfahren zum Schneiden von Packungen
FR2963341B1 (fr) * 2010-07-27 2013-02-22 Saint Gobain Quartz Sas Creuset a ouverture polygonale
US9464364B2 (en) * 2011-11-09 2016-10-11 Varian Semiconductor Equipment Associates, Inc. Thermal load leveling during silicon crystal growth from a melt using anisotropic materials

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1318452A (en) * 1919-10-14 Frederick g
US692776A (en) * 1901-06-05 1902-02-04 Harvey Burner And Furnace Company Smelting-furnace.
US1013838A (en) * 1911-04-12 1912-01-02 Willis W Case Melting-furnace.
US1081535A (en) * 1911-08-07 1913-12-16 Norton Co Crucible.
US1372676A (en) * 1917-03-03 1921-03-29 Lava Crucible Company Of Pitts Crucible-furnace
US1441690A (en) * 1919-06-27 1923-01-09 American Encaustic Tiling Comp Crucible
US1358816A (en) * 1919-12-10 1920-11-16 Collins And Roessel Inc Crucible
US1482887A (en) * 1920-08-30 1924-02-05 Bellis Heat Treating Company Crucible
US1612916A (en) * 1925-04-09 1927-01-04 Western Electric Co Ceramic articles and method of producing them
US1720327A (en) * 1927-05-02 1929-07-09 Gaylord H Halvorson Crucible
US1881104A (en) * 1930-05-06 1932-10-04 Carborundum Co Refractory article
US1880242A (en) * 1931-09-24 1932-10-04 Donald C Dickson Plugging means for crucibles or the like
US2195436A (en) * 1937-12-30 1940-04-02 Charles A Weller Chemical apparatus
US2406380A (en) * 1942-11-19 1946-08-27 Jr William Johnston Cinder pot
US2543700A (en) * 1948-01-31 1951-02-27 Electro Refractories & Alloys Crucible for metal melting
CH474032A (de) * 1964-01-13 1969-06-15 Siemens Ag Quarztiegel zum Schmelzen von Silizium
US3554512A (en) * 1969-03-24 1971-01-12 George H Elliott Crucible for holding molten semiconductor materials
SU476891A1 (ru) * 1974-03-20 1975-07-15 Завод Чистых Металлов Им. 50-Летия Ссср Устройство дл выт гивани монокристаллов из расплава
SU616506A1 (ru) * 1976-10-07 1978-07-25 Институт Проблем Литья Ан Украинской Сср Тигель индукционной вакуумной печи
IN161924B (it) * 1984-10-29 1988-02-27 Westinghouse Electric Corp
US4786479A (en) * 1987-09-02 1988-11-22 The United States Of America As Represented By The United States Department Of Energy Apparatus for dendritic web growth systems

Also Published As

Publication number Publication date
AU1076488A (en) 1988-08-11
IN168934B (it) 1991-07-20
AU595675B2 (en) 1990-04-05
JPS63201090A (ja) 1988-08-19
US4747774A (en) 1988-05-31
IT8841521A0 (it) 1988-02-05
JP2750689B2 (ja) 1998-05-13
ES2008973A6 (es) 1989-08-16

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Effective date: 19980225