IT1180177B - Procedimento migliorato per il disproporzionamento di clorosilani - Google Patents

Procedimento migliorato per il disproporzionamento di clorosilani

Info

Publication number
IT1180177B
IT1180177B IT21149/84A IT2114984A IT1180177B IT 1180177 B IT1180177 B IT 1180177B IT 21149/84 A IT21149/84 A IT 21149/84A IT 2114984 A IT2114984 A IT 2114984A IT 1180177 B IT1180177 B IT 1180177B
Authority
IT
Italy
Prior art keywords
chlorosilans
disproportionation
improved procedure
procedure
improved
Prior art date
Application number
IT21149/84A
Other languages
English (en)
Other versions
IT8421149A1 (it
IT8421149A0 (it
Inventor
Morimoto Shiro
Original Assignee
Osaka Titanium
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Titanium filed Critical Osaka Titanium
Publication of IT8421149A0 publication Critical patent/IT8421149A0/it
Publication of IT8421149A1 publication Critical patent/IT8421149A1/it
Application granted granted Critical
Publication of IT1180177B publication Critical patent/IT1180177B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10773—Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Catalysts (AREA)
IT21149/84A 1983-08-10 1984-05-29 Procedimento migliorato per il disproporzionamento di clorosilani IT1180177B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58147066A JPS6042216A (ja) 1983-08-10 1983-08-10 トリクロロシラン・ジクロロシラン・モノクロロシランの不均斉化方法

Publications (3)

Publication Number Publication Date
IT8421149A0 IT8421149A0 (it) 1984-05-29
IT8421149A1 IT8421149A1 (it) 1985-11-29
IT1180177B true IT1180177B (it) 1987-09-23

Family

ID=15421708

Family Applications (1)

Application Number Title Priority Date Filing Date
IT21149/84A IT1180177B (it) 1983-08-10 1984-05-29 Procedimento migliorato per il disproporzionamento di clorosilani

Country Status (4)

Country Link
US (1) US4613489A (it)
JP (1) JPS6042216A (it)
DE (1) DE3412705C2 (it)
IT (1) IT1180177B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5118485A (en) * 1988-03-25 1992-06-02 Hemlock Semiconductor Corporation Recovery of lower-boiling silanes in a cvd process
DE3925357C1 (it) * 1989-07-31 1991-04-25 Degussa Ag, 6000 Frankfurt, De
JP5441924B2 (ja) * 2008-12-25 2014-03-12 株式会社トクヤマ クロロシランの製造方法
DE102009032833A1 (de) * 2009-07-08 2011-01-13 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Herstellung von Monosilan
DE102009037154B3 (de) * 2009-08-04 2010-12-09 Schmid Silicon Technology Gmbh Verfahren zur Herstellung von Monosilan
DE102010034469A1 (de) 2010-08-06 2012-02-09 Schmid Silicon Technology Gmbh Anlage zur Herstellung von Monosilan
EP4317062A1 (en) * 2022-08-02 2024-02-07 Alexander Lygin Optimized process for silicon deposition

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3044845A (en) * 1958-09-30 1962-07-17 Union Carbide Corp Process for producing dichlorosilane
BE784818A (fr) * 1971-06-14 1972-12-13 Westinghouse Electric Corp Etalonnage du profil de deplacement de la position d'un entrainement par moteur
US3968199A (en) * 1974-02-25 1976-07-06 Union Carbide Corporation Process for making silane
US3928542A (en) * 1974-04-05 1975-12-23 Union Carbide Corp Process for the preparation of anion exchange resin for use in the redistribution of chlorosilanes
FR2290447A1 (fr) * 1974-11-07 1976-06-04 Rhone Poulenc Ind Dismutation du trichlorosilane en presence de pyrrolidone n substituee
JPS5218678A (en) * 1975-08-01 1977-02-12 Hitachi Ltd Guidance line for autopilot truck
US4395389A (en) * 1982-03-01 1983-07-26 Ethyl Corporation Chlorosilane disproportionation process

Also Published As

Publication number Publication date
DE3412705C2 (de) 1993-12-23
US4613489A (en) 1986-09-23
JPS6319442B2 (it) 1988-04-22
IT8421149A1 (it) 1985-11-29
IT8421149A0 (it) 1984-05-29
JPS6042216A (ja) 1985-03-06
DE3412705A1 (de) 1985-02-21

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970429