IT1208646B - Fasi di mascherature. procedimento per la fabbricazione di condensatori in processi cmos e nmos con riduzione del numero di - Google Patents
Fasi di mascherature. procedimento per la fabbricazione di condensatori in processi cmos e nmos con riduzione del numero diInfo
- Publication number
- IT1208646B IT1208646B IT8720879A IT2087987A IT1208646B IT 1208646 B IT1208646 B IT 1208646B IT 8720879 A IT8720879 A IT 8720879A IT 2087987 A IT2087987 A IT 2087987A IT 1208646 B IT1208646 B IT 1208646B
- Authority
- IT
- Italy
- Prior art keywords
- capacitors
- manufacture
- cmos
- procedure
- reduction
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 4
- 230000000873 masking effect Effects 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 230000000295 complement effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8720879A IT1208646B (it) | 1987-06-11 | 1987-06-11 | Fasi di mascherature. procedimento per la fabbricazione di condensatori in processi cmos e nmos con riduzione del numero di |
DE8888108774T DE3874416T2 (de) | 1987-06-11 | 1988-06-01 | Verfahren zum herstellen von kondensatoren bei cmos- und nmos-verfahren. |
EP88108774A EP0294699B1 (en) | 1987-06-11 | 1988-06-01 | Method for making capacitors in cmos and nmos processes |
JP63144560A JPS63318149A (ja) | 1987-06-11 | 1988-06-10 | Cmosおよびnmosプロセスでコンデンサを作るための方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8720879A IT1208646B (it) | 1987-06-11 | 1987-06-11 | Fasi di mascherature. procedimento per la fabbricazione di condensatori in processi cmos e nmos con riduzione del numero di |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8720879A0 IT8720879A0 (it) | 1987-06-11 |
IT1208646B true IT1208646B (it) | 1989-07-10 |
Family
ID=11173449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8720879A IT1208646B (it) | 1987-06-11 | 1987-06-11 | Fasi di mascherature. procedimento per la fabbricazione di condensatori in processi cmos e nmos con riduzione del numero di |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0294699B1 (it) |
JP (1) | JPS63318149A (it) |
DE (1) | DE3874416T2 (it) |
IT (1) | IT1208646B (it) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1237894B (it) * | 1989-12-14 | 1993-06-18 | Sgs Thomson Microelectronics | Processo per la fabbricazione di circuiti integrati comprendenti componenti elettronici di due tipi diversi aventi ciascuno coppie di elettrodi ricavati dagli stessi strati di silicio policristallino e separati da dielettrici diversi |
DE19528991C2 (de) | 1995-08-07 | 2002-05-16 | Infineon Technologies Ag | Herstellungsverfahren für eine nichtflüchtige Speicherzelle |
EP1181666A1 (en) * | 2000-02-14 | 2002-02-27 | Koninklijke Philips Electronics N.V. | Transponder and appliance |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4577390A (en) * | 1983-02-23 | 1986-03-25 | Texas Instruments Incorporated | Fabrication of polysilicon to polysilicon capacitors with a composite dielectric layer |
-
1987
- 1987-06-11 IT IT8720879A patent/IT1208646B/it active
-
1988
- 1988-06-01 EP EP88108774A patent/EP0294699B1/en not_active Expired
- 1988-06-01 DE DE8888108774T patent/DE3874416T2/de not_active Expired - Fee Related
- 1988-06-10 JP JP63144560A patent/JPS63318149A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0294699A3 (en) | 1989-09-06 |
EP0294699A2 (en) | 1988-12-14 |
EP0294699B1 (en) | 1992-09-09 |
JPS63318149A (ja) | 1988-12-27 |
DE3874416T2 (de) | 1993-03-25 |
DE3874416D1 (de) | 1992-10-15 |
IT8720879A0 (it) | 1987-06-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970628 |