IT1205737B - Bobina di riscaldamento ad induzione per tipo a zone senza crogiolo di barre cristalline - Google Patents

Bobina di riscaldamento ad induzione per tipo a zone senza crogiolo di barre cristalline

Info

Publication number
IT1205737B
IT1205737B IT47609/87A IT4760987A IT1205737B IT 1205737 B IT1205737 B IT 1205737B IT 47609/87 A IT47609/87 A IT 47609/87A IT 4760987 A IT4760987 A IT 4760987A IT 1205737 B IT1205737 B IT 1205737B
Authority
IT
Italy
Prior art keywords
induction heating
heating coil
zone type
crucible
crystalline bar
Prior art date
Application number
IT47609/87A
Other languages
English (en)
Other versions
IT8747609A0 (it
Inventor
Ammon Wilfried Von
Heinz Klinger
Original Assignee
Wacker Chemitronic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic
Publication of IT8747609A0 publication Critical patent/IT8747609A0/it
Application granted granted Critical
Publication of IT1205737B publication Critical patent/IT1205737B/it

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/22Furnaces without an endless core
    • H05B6/30Arrangements for remelting or zone melting
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16Heating of the molten zone
    • C30B13/20Heating of the molten zone by induction, e.g. hot wire technique
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/36Coil arrangements
    • H05B6/362Coil arrangements with flat coil conductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
IT47609/87A 1986-02-06 1987-02-04 Bobina di riscaldamento ad induzione per tipo a zone senza crogiolo di barre cristalline IT1205737B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863603766 DE3603766A1 (de) 1986-02-06 1986-02-06 Induktionsheizspule fuer das tiegelfreie zonenziehen von kristallstaeben

Publications (2)

Publication Number Publication Date
IT8747609A0 IT8747609A0 (it) 1987-02-04
IT1205737B true IT1205737B (it) 1989-03-31

Family

ID=6293578

Family Applications (1)

Application Number Title Priority Date Filing Date
IT47609/87A IT1205737B (it) 1986-02-06 1987-02-04 Bobina di riscaldamento ad induzione per tipo a zone senza crogiolo di barre cristalline

Country Status (5)

Country Link
US (1) US4749837A (it)
JP (1) JPS62222594A (it)
DE (1) DE3603766A1 (it)
DK (1) DK169803B1 (it)
IT (1) IT1205737B (it)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3805118A1 (de) * 1988-02-18 1989-08-24 Wacker Chemitronic Verfahren zum tiegelfreien zonenziehen von halbleiterstaeben und induktionsheizspule zu seiner durchfuehrung
JP2986876B2 (ja) * 1989-09-11 1999-12-06 株式会社日立製作所 ロータリトランス
US4994637A (en) * 1989-10-30 1991-02-19 Fmc Corporation Induction coil with lapped joint
US5114528A (en) * 1990-08-07 1992-05-19 Wisconsin Alumni Research Foundation Edge-defined contact heater apparatus and method for floating zone crystal growth
JP3127981B2 (ja) * 1995-01-31 2001-01-29 信越半導体株式会社 高周波誘導加熱装置
US6555801B1 (en) 2002-01-23 2003-04-29 Melrose, Inc. Induction heating coil, device and method of use
US7951091B2 (en) * 2003-07-31 2011-05-31 Tyco Healthcare Group Lp Guide wire with stranded tip
GB2478275A (en) * 2010-02-24 2011-09-07 Tubefuse Applic V O F Induction heating apparatus and method
JP5505365B2 (ja) * 2011-04-28 2014-05-28 信越半導体株式会社 誘導加熱コイルにおける放電防止用絶縁部材及びこれを用いた単結晶製造装置並びに単結晶製造方法
DE102012022965B4 (de) 2012-11-19 2018-12-06 Forschungsverbund Berlin E.V. Vorrichtung für das tiegelfreie Zonenziehen von Kristallstäben

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1891481A (en) * 1931-02-24 1932-12-20 Heintz & Kaufman Ltd Inductance coil
US3886509A (en) * 1972-11-24 1975-05-27 Siemens Ag Adjustable induction coil for zone melting of semiconductor rods
DE2319700C3 (de) * 1973-04-18 1980-11-27 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Beeinflussung des radialen Widerstandsverlaufs in einem Halbleitereinkristallstab beim tiegellosen Zonenschmelzen und Vorrichtungen zur Durchführung des Verfahrens
DE2422077A1 (de) * 1974-05-07 1975-11-20 Siemens Ag Induktionsheizspule zum tiegelfreien zonenschmelzen
DE2538831A1 (de) * 1975-09-01 1977-03-03 Wacker Chemitronic Vorrichtung zum tiegelfreien zonenschmelzen
DE3143207A1 (de) * 1981-10-30 1983-05-11 Siemens AG, 1000 Berlin und 8000 München Als flachspule ausgebildete induktionsspule zum tiegelfreien zonenschmelzen

Also Published As

Publication number Publication date
US4749837A (en) 1988-06-07
IT8747609A0 (it) 1987-02-04
DK59887D0 (da) 1987-02-05
JPS6310556B2 (it) 1988-03-08
DE3603766C2 (it) 1993-09-23
DE3603766A1 (de) 1987-08-13
JPS62222594A (ja) 1987-09-30
DK59887A (da) 1987-08-07
DK169803B1 (da) 1995-02-27

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19930215