IT1193203B - Procedimento per la produzione di silicio policristallino - Google Patents

Procedimento per la produzione di silicio policristallino

Info

Publication number
IT1193203B
IT1193203B IT22753/79A IT2275379A IT1193203B IT 1193203 B IT1193203 B IT 1193203B IT 22753/79 A IT22753/79 A IT 22753/79A IT 2275379 A IT2275379 A IT 2275379A IT 1193203 B IT1193203 B IT 1193203B
Authority
IT
Italy
Prior art keywords
procedure
production
polycrystalline silicon
polycrystalline
silicon
Prior art date
Application number
IT22753/79A
Other languages
English (en)
Italian (it)
Other versions
IT7922753A0 (it
Original Assignee
Schumacher Co J C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schumacher Co J C filed Critical Schumacher Co J C
Publication of IT7922753A0 publication Critical patent/IT7922753A0/it
Application granted granted Critical
Publication of IT1193203B publication Critical patent/IT1193203B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
IT22753/79A 1978-08-18 1979-05-17 Procedimento per la produzione di silicio policristallino IT1193203B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US93500978A 1978-08-18 1978-08-18

Publications (2)

Publication Number Publication Date
IT7922753A0 IT7922753A0 (it) 1979-05-17
IT1193203B true IT1193203B (it) 1988-06-15

Family

ID=25466438

Family Applications (1)

Application Number Title Priority Date Filing Date
IT22753/79A IT1193203B (it) 1978-08-18 1979-05-17 Procedimento per la produzione di silicio policristallino

Country Status (6)

Country Link
JP (1) JPS5527890A (ja)
CA (1) CA1145117A (ja)
DE (2) DE2919086C2 (ja)
FR (1) FR2433479B1 (ja)
GB (1) GB2028289B (ja)
IT (1) IT1193203B (ja)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4676967A (en) * 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
US4374182A (en) * 1980-07-07 1983-02-15 Dow Corning Corporation Preparation of silicon metal through polymer degradation
US4390510A (en) 1982-02-16 1983-06-28 General Electric Company Process for treating spent silicon-containing reaction masses to produce halosilanes
JPS61101410A (ja) * 1984-10-24 1986-05-20 Hiroshi Ishizuka 多結晶珪素の製造法及びそのための装置
US4696834A (en) * 1986-02-28 1987-09-29 Dow Corning Corporation Silicon-containing coatings and a method for their preparation
US4743344A (en) * 1986-03-26 1988-05-10 Union Carbide Corporation Treatment of wastes from high purity silicon process
US4871524A (en) * 1987-09-03 1989-10-03 Ethyl Corporation Hydrogen purification process
JP2008506621A (ja) * 2004-07-16 2008-03-06 インスティチュート フォー エネルギーテックニック 半導体級（ｓｅｇ）シリコンを連続生産するための方法およびリアクタ
WO2007120871A2 (en) * 2006-04-13 2007-10-25 Cabot Corporation Production of silicon through a closed-loop process
US7935327B2 (en) * 2006-08-30 2011-05-03 Hemlock Semiconductor Corporation Silicon production with a fluidized bed reactor integrated into a siemens-type process
US7656661B2 (en) * 2007-07-31 2010-02-02 Donald Shaum Electronic apparatus with multiple data input modes
DE102008017304A1 (de) 2008-03-31 2009-10-01 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Herstellung von Reinstsilizium
DE102009032833A1 (de) 2009-07-08 2011-01-13 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Herstellung von Monosilan
DE102009037154B3 (de) 2009-08-04 2010-12-09 Schmid Silicon Technology Gmbh Verfahren zur Herstellung von Monosilan
DE102009037155B3 (de) 2009-08-04 2010-11-04 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Herstellung von Trichlorsilan
DE102010000981A1 (de) 2010-01-18 2011-07-21 Evonik Degussa GmbH, 45128 Closed loop-Verfahren zur Herstellung von Trichlorsilan aus metallurgischem Silicium
DE102010034469A1 (de) 2010-08-06 2012-02-09 Schmid Silicon Technology Gmbh Anlage zur Herstellung von Monosilan
US20120100061A1 (en) 2010-10-22 2012-04-26 Memc Electronic Materials, Inc. Production of Polycrystalline Silicon in Substantially Closed-loop Processes
JP5946835B2 (ja) * 2010-10-22 2016-07-06 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッドＭｅｍｃ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 実質的に閉ループの方法およびシステムにおける多結晶シリコンの製造
US8449848B2 (en) 2010-10-22 2013-05-28 Memc Electronic Materials, Inc. Production of polycrystalline silicon in substantially closed-loop systems
DE102011089695A1 (de) 2011-12-22 2013-06-27 Schmid Silicon Technology Gmbh Reaktor und Verfahren zur Herstellung von Reinstsilizium
DE102015203618A1 (de) 2015-02-27 2016-09-01 Schmid Silicon Technology Gmbh Kolonne und Verfahren zur Disproportionierung von Chlorsilanen zu Monosilan und Tetrachlorsilan sowie Anlage zur Gewinnung von Monosilan
DE102015209008A1 (de) 2015-05-15 2016-11-17 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Zersetzung von Monosilan
US10953469B2 (en) * 2016-04-21 2021-03-23 Tokuyama Corporation Method of producing metal powder
DE102019209898A1 (de) 2019-07-04 2021-01-07 Schmid Silicon Technology Gmbh Vorrichtung und Verfahren zur Bildung von flüssigem Silizium

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2595620A (en) * 1948-11-27 1952-05-06 Union Carbide & Carbon Corp Hydrogenation of halogenosilanes
DE1054436B (de) * 1956-02-11 1959-04-09 Pechiney Prod Chimiques Sa Verfahren zur Herstellung von kompaktem Silicium hohen Reinheitsgrades
NL231067A (ja) * 1957-09-07
US3012861A (en) * 1960-01-15 1961-12-12 Du Pont Production of silicon
GB1498266A (en) * 1974-05-13 1978-01-18 Texas Instruments Inc Method of silicon production
DE2620739A1 (de) * 1976-05-11 1977-12-01 Wacker Chemitronic Verfahren zur herstellung von hochreinem silicium
US4117094A (en) * 1977-06-13 1978-09-26 Texas Instruments Incorporated Process for silicon and trichlorosilane production

Also Published As

Publication number Publication date
GB2028289B (en) 1982-09-02
FR2433479A1 (fr) 1980-03-14
CA1145117A (en) 1983-04-26
DE2954368A1 (ja) 1984-07-12
FR2433479B1 (fr) 1985-10-18
DE2919086A1 (de) 1980-03-06
DE2954368C2 (de) 1986-10-16
GB2028289A (en) 1980-03-05
IT7922753A0 (it) 1979-05-17
JPS5527890A (en) 1980-02-28
DE2919086C2 (de) 1986-10-16
JPS6228083B2 (ja) 1987-06-18

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