IT1125000B - Sistema automatico per l'allineamento di fotomaschere in processi di stampa a proiezione - Google Patents

Sistema automatico per l'allineamento di fotomaschere in processi di stampa a proiezione

Info

Publication number
IT1125000B
IT1125000B IT27366/79A IT2736679A IT1125000B IT 1125000 B IT1125000 B IT 1125000B IT 27366/79 A IT27366/79 A IT 27366/79A IT 2736679 A IT2736679 A IT 2736679A IT 1125000 B IT1125000 B IT 1125000B
Authority
IT
Italy
Prior art keywords
photomasks
alignment
printing processes
automatic system
projection printing
Prior art date
Application number
IT27366/79A
Other languages
English (en)
Other versions
IT7927366A0 (it
Inventor
Hans Peter Kleinknecht
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Publication of IT7927366A0 publication Critical patent/IT7927366A0/it
Application granted granted Critical
Publication of IT1125000B publication Critical patent/IT1125000B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
IT27366/79A 1978-12-08 1979-11-16 Sistema automatico per l'allineamento di fotomaschere in processi di stampa a proiezione IT1125000B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US96778578A 1978-12-08 1978-12-08

Publications (2)

Publication Number Publication Date
IT7927366A0 IT7927366A0 (it) 1979-11-16
IT1125000B true IT1125000B (it) 1986-05-14

Family

ID=25513318

Family Applications (1)

Application Number Title Priority Date Filing Date
IT27366/79A IT1125000B (it) 1978-12-08 1979-11-16 Sistema automatico per l'allineamento di fotomaschere in processi di stampa a proiezione

Country Status (4)

Country Link
JP (1) JPS598059B2 (it)
DE (1) DE2948646C2 (it)
GB (1) GB2040444B (it)
IT (1) IT1125000B (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4580900A (en) * 1982-04-02 1986-04-08 Eaton Corporation Auto focus alignment and measurement system and method
DE3212393A1 (de) * 1982-04-02 1983-10-13 Karl Süss KG, Präzisionsgeräte für Wissenschaft und Industrie - GmbH & Co, 8046 Garching Verfahren zur interferenzverschmierung sowie ausrichtverfahren und -vorrichtung
US4615621A (en) * 1982-04-02 1986-10-07 Eaton Corporation Auto-focus alignment and measurement system and method
DE3236872C2 (de) * 1982-10-05 1986-04-30 Karl Ludwig 8000 München Hörmann Einrichtung zur optischen Lagebestimmung eines Objektes
GB2146427B (en) * 1983-08-01 1987-10-21 Canon Kk Semiconductor manufacture
NL8401710A (nl) * 1984-05-29 1985-12-16 Philips Nv Inrichting voor het afbeelden van een maskerpatroon op een substraat.
JPS6165251A (ja) * 1984-09-07 1986-04-03 Matsushita Electric Ind Co Ltd 露光装置
DE3573864D1 (en) * 1984-11-13 1989-11-23 Hitachi Ltd Alignment method for reduction projection type aligner
JPS63167014U (it) * 1987-04-16 1988-10-31
JP2658051B2 (ja) * 1987-05-15 1997-09-30 株式会社ニコン 位置合わせ装置，該装置を用いた投影露光装置及び投影露光方法
JP5268239B2 (ja) * 2005-10-18 2013-08-21 キヤノン株式会社 パターン形成装置、パターン形成方法
JP2007314898A (ja) * 2006-05-23 2007-12-06 Big John Corp ジーンズ及びジーンズの製造方法
CN109309144A (zh) * 2018-10-26 2019-02-05 合肥晶澳太阳能科技有限公司 一种光伏组件叠层定位方法、工装和结构

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2539206A1 (de) * 1975-09-03 1977-03-17 Siemens Ag Verfahren zur automatischen justierung von halbleiterscheiben
US4200395A (en) * 1977-05-03 1980-04-29 Massachusetts Institute Of Technology Alignment of diffraction gratings

Also Published As

Publication number Publication date
DE2948646C2 (de) 1984-10-18
GB2040444A (en) 1980-08-28
JPS5580317A (en) 1980-06-17
DE2948646A1 (de) 1980-06-19
GB2040444B (en) 1983-03-23
JPS598059B2 (ja) 1984-02-22
IT7927366A0 (it) 1979-11-16

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