JPS5580317A - Device for automatically projecting and printing - Google Patents
Device for automatically projecting and printingInfo
- Publication number
- JPS5580317A JPS5580317A JP15971179A JP15971179A JPS5580317A JP S5580317 A JPS5580317 A JP S5580317A JP 15971179 A JP15971179 A JP 15971179A JP 15971179 A JP15971179 A JP 15971179A JP S5580317 A JPS5580317 A JP S5580317A
- Authority
- JP
- Japan
- Prior art keywords
- printing
- automatically projecting
- projecting
- automatically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7073—Alignment marks and their environment
- G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7049—Technique, e.g. interferometric
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US96778578A | 1978-12-08 | 1978-12-08 | |
US9677851-5F64 | 1978-12-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5580317A true JPS5580317A (en) | 1980-06-17 |
JPS598059B2 JPS598059B2 (en) | 1984-02-22 |
Family
ID=25513318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54159711A Expired JPS598059B2 (en) | 1978-12-08 | 1979-12-07 | Automatic projection printing device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS598059B2 (en) |
DE (1) | DE2948646C2 (en) |
GB (1) | GB2040444B (en) |
IT (1) | IT1125000B (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60257450A (en) * | 1984-05-29 | 1985-12-19 | エヌ・ベー・フイリツプス・フルーイランペンフアブリケン | Mask pattern image forming apparatus |
JPS6165251A (en) * | 1984-09-07 | 1986-04-03 | Matsushita Electric Ind Co Ltd | Exposing device |
JPS63283129A (en) * | 1987-05-15 | 1988-11-21 | Nikon Corp | Alignment device |
JP2007139752A (en) * | 2005-10-18 | 2007-06-07 | Canon Inc | Pattern formation device and method, and mold for pattern formation |
JP2007314898A (en) * | 2006-05-23 | 2007-12-06 | Big John Corp | Jeans and method for producing the same |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4580900A (en) * | 1982-04-02 | 1986-04-08 | Eaton Corporation | Auto focus alignment and measurement system and method |
DE3212393A1 (en) * | 1982-04-02 | 1983-10-13 | Karl Süss KG, Präzisionsgeräte für Wissenschaft und Industrie - GmbH & Co, 8046 Garching | INTERFERENCE LUBRICATION METHOD AND ALIGNMENT METHOD AND DEVICE |
US4615621A (en) * | 1982-04-02 | 1986-10-07 | Eaton Corporation | Auto-focus alignment and measurement system and method |
DE3236872C2 (en) * | 1982-10-05 | 1986-04-30 | Karl Ludwig 8000 München Hörmann | Device for the optical determination of the position of an object |
GB2146427B (en) * | 1983-08-01 | 1987-10-21 | Canon Kk | Semiconductor manufacture |
EP0182251B1 (en) * | 1984-11-13 | 1989-10-18 | Hitachi, Ltd. | Alignment method for reduction projection type aligner |
JPS63167014U (en) * | 1987-04-16 | 1988-10-31 | ||
CN109309144A (en) * | 2018-10-26 | 2019-02-05 | 合肥晶澳太阳能科技有限公司 | A kind of photovoltaic component lamination localization method, tooling and structure |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2539206A1 (en) * | 1975-09-03 | 1977-03-17 | Siemens Ag | METHOD FOR AUTOMATIC ADJUSTMENT OF SEMI-CONDUCTOR DISCS |
US4200395A (en) * | 1977-05-03 | 1980-04-29 | Massachusetts Institute Of Technology | Alignment of diffraction gratings |
-
1979
- 1979-11-16 IT IT27366/79A patent/IT1125000B/en active
- 1979-12-04 DE DE2948646A patent/DE2948646C2/en not_active Expired
- 1979-12-07 GB GB7942386A patent/GB2040444B/en not_active Expired
- 1979-12-07 JP JP54159711A patent/JPS598059B2/en not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60257450A (en) * | 1984-05-29 | 1985-12-19 | エヌ・ベー・フイリツプス・フルーイランペンフアブリケン | Mask pattern image forming apparatus |
JPS6165251A (en) * | 1984-09-07 | 1986-04-03 | Matsushita Electric Ind Co Ltd | Exposing device |
JPH0544817B2 (en) * | 1984-09-07 | 1993-07-07 | Matsushita Electric Ind Co Ltd | |
JPS63283129A (en) * | 1987-05-15 | 1988-11-21 | Nikon Corp | Alignment device |
JP2007139752A (en) * | 2005-10-18 | 2007-06-07 | Canon Inc | Pattern formation device and method, and mold for pattern formation |
JP2007314898A (en) * | 2006-05-23 | 2007-12-06 | Big John Corp | Jeans and method for producing the same |
Also Published As
Publication number | Publication date |
---|---|
DE2948646A1 (en) | 1980-06-19 |
GB2040444A (en) | 1980-08-28 |
GB2040444B (en) | 1983-03-23 |
IT1125000B (en) | 1986-05-14 |
IT7927366A0 (en) | 1979-11-16 |
DE2948646C2 (en) | 1984-10-18 |
JPS598059B2 (en) | 1984-02-22 |
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