GB2040444B - Automatic photomask alignment system for projection printing - Google Patents

Automatic photomask alignment system for projection printing

Info

Publication number
GB2040444B
GB2040444B GB7942386A GB7942386A GB2040444B GB 2040444 B GB2040444 B GB 2040444B GB 7942386 A GB7942386 A GB 7942386A GB 7942386 A GB7942386 A GB 7942386A GB 2040444 B GB2040444 B GB 2040444B
Authority
GB
United Kingdom
Prior art keywords
alignment system
projection printing
photomask alignment
automatic photomask
automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7942386A
Other versions
GB2040444A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of GB2040444A publication Critical patent/GB2040444A/en
Application granted granted Critical
Publication of GB2040444B publication Critical patent/GB2040444B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
GB7942386A 1978-12-08 1979-12-07 Automatic photomask alignment system for projection printing Expired GB2040444B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US96778578A 1978-12-08 1978-12-08

Publications (2)

Publication Number Publication Date
GB2040444A GB2040444A (en) 1980-08-28
GB2040444B true GB2040444B (en) 1983-03-23

Family

ID=25513318

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7942386A Expired GB2040444B (en) 1978-12-08 1979-12-07 Automatic photomask alignment system for projection printing

Country Status (4)

Country Link
JP (1) JPS598059B2 (en)
DE (1) DE2948646C2 (en)
GB (1) GB2040444B (en)
IT (1) IT1125000B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4615621A (en) * 1982-04-02 1986-10-07 Eaton Corporation Auto-focus alignment and measurement system and method
DE3212393A1 (en) * 1982-04-02 1983-10-13 Karl Süss KG, Präzisionsgeräte für Wissenschaft und Industrie - GmbH & Co, 8046 Garching INTERFERENCE LUBRICATION METHOD AND ALIGNMENT METHOD AND DEVICE
US4580900A (en) * 1982-04-02 1986-04-08 Eaton Corporation Auto focus alignment and measurement system and method
DE3236872C2 (en) * 1982-10-05 1986-04-30 Karl Ludwig 8000 München Hörmann Device for the optical determination of the position of an object
GB2146427B (en) * 1983-08-01 1987-10-21 Canon Kk Semiconductor manufacture
NL8401710A (en) * 1984-05-29 1985-12-16 Philips Nv DEVICE FOR IMAGING A MASK PATTERN ON A SUBSTRATE.
JPS6165251A (en) * 1984-09-07 1986-04-03 Matsushita Electric Ind Co Ltd Exposing device
US4725737A (en) * 1984-11-13 1988-02-16 Hitachi, Ltd. Alignment method and apparatus for reduction projection type aligner
JPS63167014U (en) * 1987-04-16 1988-10-31
JP2658051B2 (en) * 1987-05-15 1997-09-30 株式会社ニコン Positioning apparatus, projection exposure apparatus and projection exposure method using the apparatus
JP5268239B2 (en) * 2005-10-18 2013-08-21 キヤノン株式会社 Pattern forming apparatus and pattern forming method
JP2007314898A (en) * 2006-05-23 2007-12-06 Big John Corp Jeans and method for producing the same
CN109309144A (en) * 2018-10-26 2019-02-05 合肥晶澳太阳能科技有限公司 A kind of photovoltaic component lamination localization method, tooling and structure

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2539206A1 (en) * 1975-09-03 1977-03-17 Siemens Ag METHOD FOR AUTOMATIC ADJUSTMENT OF SEMI-CONDUCTOR DISCS
US4200395A (en) * 1977-05-03 1980-04-29 Massachusetts Institute Of Technology Alignment of diffraction gratings

Also Published As

Publication number Publication date
DE2948646A1 (en) 1980-06-19
IT1125000B (en) 1986-05-14
IT7927366A0 (en) 1979-11-16
GB2040444A (en) 1980-08-28
JPS598059B2 (en) 1984-02-22
DE2948646C2 (en) 1984-10-18
JPS5580317A (en) 1980-06-17

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee