IT1149293B - Sistema ottico a proiezione per allineare un' immagine su una superficie - Google Patents

Sistema ottico a proiezione per allineare un' immagine su una superficie

Info

Publication number
IT1149293B
IT1149293B IT20728/80A IT2072880A IT1149293B IT 1149293 B IT1149293 B IT 1149293B IT 20728/80 A IT20728/80 A IT 20728/80A IT 2072880 A IT2072880 A IT 2072880A IT 1149293 B IT1149293 B IT 1149293B
Authority
IT
Italy
Prior art keywords
align
image
optical system
projection optical
projection
Prior art date
Application number
IT20728/80A
Other languages
English (en)
Other versions
IT8020728A0 (it
Inventor
Janusz Stanislaw Wilczynski
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IT8020728A0 publication Critical patent/IT8020728A0/it
Application granted granted Critical
Publication of IT1149293B publication Critical patent/IT1149293B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
IT20728/80A 1979-05-30 1980-03-18 Sistema ottico a proiezione per allineare un' immagine su una superficie IT1149293B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/043,924 US4232969A (en) 1979-05-30 1979-05-30 Projection optical system for aligning an image on a surface

Publications (2)

Publication Number Publication Date
IT8020728A0 IT8020728A0 (it) 1980-03-18
IT1149293B true IT1149293B (it) 1986-12-03

Family

ID=21929618

Family Applications (1)

Application Number Title Priority Date Filing Date
IT20728/80A IT1149293B (it) 1979-05-30 1980-03-18 Sistema ottico a proiezione per allineare un' immagine su una superficie

Country Status (5)

Country Link
US (1) US4232969A (it)
EP (1) EP0019721B1 (it)
JP (1) JPS55162230A (it)
DE (1) DE3065248D1 (it)
IT (1) IT1149293B (it)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122128A (en) * 1980-02-29 1981-09-25 Telmec Co Ltd Positioning system for printing device of semiconductor or the like
JPS5719726A (en) * 1980-07-10 1982-02-02 Nippon Kogaku Kk <Nikon> Positioning device
US4391494A (en) * 1981-05-15 1983-07-05 General Signal Corporation Apparatus for projecting a series of images onto dies of a semiconductor wafer
NL8220224A (nl) * 1981-05-15 1983-04-05 Gen Signal Corp Inrichting voor het projecteren van een reeks beelden op vormplaatsen van een halfgeleiderwafel.
US4425037A (en) 1981-05-15 1984-01-10 General Signal Corporation Apparatus for projecting a series of images onto dies of a semiconductor wafer
JPS58108745A (ja) * 1981-12-23 1983-06-28 Canon Inc 転写装置
US4595295A (en) * 1982-01-06 1986-06-17 International Business Machines Corporation Alignment system for lithographic proximity printing
DE3265891D1 (en) * 1982-01-06 1985-10-03 Ibm Alignment system for lithographic proximity printing
JPS58182718A (ja) * 1982-04-20 1983-10-25 Datsuku Eng Kk 位置合わせ装置
US4444492A (en) * 1982-05-15 1984-04-24 General Signal Corporation Apparatus for projecting a series of images onto dies of a semiconductor wafer
US4682037A (en) * 1984-07-10 1987-07-21 Canon Kabushiki Kaisha Projection exposure apparatus having an alignment light of a wavelength other than that of the exposure light
US4737033A (en) * 1986-10-07 1988-04-12 General Electric Co. Alignment key and method of making the same
JPH0766192B2 (ja) * 1988-05-30 1995-07-19 株式会社オーク製作所 自動露光装置におけるワーク位置決め方法
JPH04215417A (ja) * 1990-12-14 1992-08-06 Fujitsu Ltd 露光方法
US5483345A (en) * 1994-09-06 1996-01-09 Mrs Technology, Inc. Alignment system for use in lithography utilizing a spherical reflector having a centered etched-on projection object
TW538256B (en) 2000-01-14 2003-06-21 Zeiss Stiftung Microlithographic reduction projection catadioptric objective
JP2004514943A (ja) * 2000-11-28 2004-05-20 カール・ツアイス・エスエムテイ・アーゲー １５７ｎｍリソグラフィ用の反射屈折投影系
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US20080151365A1 (en) 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
KR101213831B1 (ko) 2004-05-17 2012-12-24 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
US7148957B2 (en) 2004-06-09 2006-12-12 3M Innovative Properties Company, Imaging system for thermal transfer
JP4369504B2 (ja) * 2007-09-03 2009-11-25 日立ビアメカニクス株式会社 レーザ直接描画装置および描画方法
US8780359B2 (en) * 2012-04-30 2014-07-15 Apple Inc. Optical base plate alignment
US20180275389A1 (en) * 2015-10-08 2018-09-27 The Regents of the University of Colorado, a body corporation Remote Focusing All-Optical Digital Scanning Light Sheet Microscopy for Optically Cleared Tissue Sections
GB201701296D0 (en) * 2017-01-26 2017-03-15 Univ College Cork - Nat Univ Of Ireland Smart coded access optical sensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1943509A (en) * 1931-09-28 1934-01-16 Zeiss Carl Fa Apparatus for illuminating microscopic objects
GB1320671A (en) * 1971-01-01 1973-06-20 Fickers Ltd Incident-light dark ground illumination systems for microscopes
GB1473301A (en) * 1973-05-03 1977-05-11 Nippon Kogaku Kk Manufacture of multi-layer structures
US3885877A (en) * 1973-10-11 1975-05-27 Ibm Electro-optical fine alignment process
IT1037606B (it) * 1974-06-06 1979-11-20 Ibm Apparecchiatura ottica perfezionata utile per la fabbricazione di circuiti integrati
JPS593791B2 (ja) * 1975-04-07 1984-01-26 キヤノン株式会社 物体の像認識方法
JPS52109875A (en) * 1976-02-25 1977-09-14 Hitachi Ltd Position matching system for mask and wafer and its unit
JPS607764B2 (ja) * 1976-04-28 1985-02-27 キヤノン株式会社 走査型光検出装置
JPS5391754A (en) * 1977-01-21 1978-08-11 Canon Inc Scannint type photo detector
US4200395A (en) * 1977-05-03 1980-04-29 Massachusetts Institute Of Technology Alignment of diffraction gratings

Also Published As

Publication number Publication date
DE3065248D1 (en) 1983-11-17
EP0019721A1 (de) 1980-12-10
US4232969A (en) 1980-11-11
IT8020728A0 (it) 1980-03-18
JPS5723415B2 (it) 1982-05-18
JPS55162230A (en) 1980-12-17
EP0019721B1 (de) 1983-10-12

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19940330