IT1074075B - Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori - Google Patents

Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori

Info

Publication number
IT1074075B
IT1074075B IT26821/76A IT2682176A IT1074075B IT 1074075 B IT1074075 B IT 1074075B IT 26821/76 A IT26821/76 A IT 26821/76A IT 2682176 A IT2682176 A IT 2682176A IT 1074075 B IT1074075 B IT 1074075B
Authority
IT
Italy
Prior art keywords
pieces
semiconductor wafers
controlled transport
transport
controlled
Prior art date
Application number
IT26821/76A
Other languages
English (en)
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1074075B publication Critical patent/IT1074075B/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H10P72/36—

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
IT26821/76A 1975-10-01 1976-09-03 Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori IT1074075B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US61865575A 1975-10-01 1975-10-01

Publications (1)

Publication Number Publication Date
IT1074075B true IT1074075B (it) 1985-04-17

Family

ID=24478589

Family Applications (1)

Application Number Title Priority Date Filing Date
IT26821/76A IT1074075B (it) 1975-10-01 1976-09-03 Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori

Country Status (7)

Country Link
JP (1) JPS5244992A (enExample)
BR (1) BR7606591A (enExample)
CA (1) CA1048958A (enExample)
DE (1) DE2643277A1 (enExample)
FR (1) FR2345372A1 (enExample)
GB (1) GB1555672A (enExample)
IT (1) IT1074075B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4186918A (en) * 1977-12-12 1980-02-05 International Business Machines Corporation Method and apparatus for locating and aligning flimsy sheets
JP2014010862A (ja) * 2012-06-29 2014-01-20 Fujitsu Ltd ライブラリ装置

Also Published As

Publication number Publication date
FR2345372A1 (fr) 1977-10-21
BR7606591A (pt) 1977-07-05
DE2643277A1 (de) 1977-04-14
GB1555672A (en) 1979-11-14
FR2345372B1 (enExample) 1980-10-24
CA1048958A (en) 1979-02-20
JPS5244992A (en) 1977-04-08
JPS5430834B2 (enExample) 1979-10-03

Similar Documents

Publication Publication Date Title
IT1074053B (it) Sistema per convogliare in modo prestabilito,pezzi,quali wafer semiconduttori
IT1114695B (it) Apparecchiatura per il trasporto di oggetti quali wafer semiconduttori
JPS5264872A (en) Apparatus for holding semiconductor wafers
IT8026865A0 (it) Sistema per il trattamento ed il trasferimento di elementi stratificati sottili (wafer) a semiconduttori.
JPS5272579A (en) Method of liquid treatment for semiconductor wafer
DE2966008D1 (en) Device for the precise alignment of planar workpieces, e.g. semiconductor wafers
CA1027465A (en) Processing of semiconductor wafers
IT1034378B (it) Sistema di montaggio per wafer semiconduttori
FR2322456A1 (fr) Procede de superfinition de surfaces de semi-conducteurs, en particulier de surfaces d'arseniure de gallium d'orientation (111)
IT1031241B (it) Sistema perfezionato per la fabricazione di resistori su wafer di silicio e simili
IT1022968B (it) Procedimento perfezionato per la lavorazione di wafer semiconduttori
IT1074075B (it) Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori
JPS5318967A (en) Wafer sucking jig
FR2332616A1 (fr) Procede de fabrication de dispositifs semi-conducteurs, notamment par la technique de la crepitation
BE768643A (fr) Procede de fabrication de gaufrettes semiconductrices ultraminces
JPS5424571A (en) Manufacture for semiconductor wafer
CA970073A (en) Semiconductor wafer
JPS52156552A (en) Wafer inspection apparatus
JPS5242365A (en) Tool for semiconductors
JPS52155968A (en) Semiconductor wafer and its production
JPS522163A (en) Wafer cleaning and drying device
JPS5270753A (en) Wafer for semiconductor device
JPS52140275A (en) Processing method for semiconductor wafer
JPS52146558A (en) Production of beam lead type semiconductor device
JPS5310967A (en) Polishing method of semiconductor wafers