IT1074075B - Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori - Google Patents
Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttoriInfo
- Publication number
- IT1074075B IT1074075B IT2682176A IT2682176A IT1074075B IT 1074075 B IT1074075 B IT 1074075B IT 2682176 A IT2682176 A IT 2682176A IT 2682176 A IT2682176 A IT 2682176A IT 1074075 B IT1074075 B IT 1074075B
- Authority
- IT
- Italy
- Prior art keywords
- pieces
- semiconductor wafers
- controlled transport
- transport
- controlled
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 235000012431 wafers Nutrition 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US61865575A | 1975-10-01 | 1975-10-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT1074075B true IT1074075B (it) | 1985-04-17 |
Family
ID=24478589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT2682176A IT1074075B (it) | 1975-10-01 | 1976-09-03 | Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5244992A (enrdf_load_stackoverflow) |
| BR (1) | BR7606591A (enrdf_load_stackoverflow) |
| CA (1) | CA1048958A (enrdf_load_stackoverflow) |
| DE (1) | DE2643277A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2345372A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1555672A (enrdf_load_stackoverflow) |
| IT (1) | IT1074075B (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4186918A (en) * | 1977-12-12 | 1980-02-05 | International Business Machines Corporation | Method and apparatus for locating and aligning flimsy sheets |
| JP2014010862A (ja) * | 2012-06-29 | 2014-01-20 | Fujitsu Ltd | ライブラリ装置 |
-
1976
- 1976-07-28 FR FR7623753A patent/FR2345372A1/fr active Granted
- 1976-08-31 GB GB3604676A patent/GB1555672A/en not_active Expired
- 1976-09-03 IT IT2682176A patent/IT1074075B/it active
- 1976-09-13 JP JP10893176A patent/JPS5244992A/ja active Granted
- 1976-09-25 DE DE19762643277 patent/DE2643277A1/de not_active Withdrawn
- 1976-10-01 BR BR7606591A patent/BR7606591A/pt unknown
- 1976-10-01 CA CA76262578A patent/CA1048958A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1555672A (en) | 1979-11-14 |
| FR2345372A1 (fr) | 1977-10-21 |
| BR7606591A (pt) | 1977-07-05 |
| JPS5244992A (en) | 1977-04-08 |
| JPS5430834B2 (enrdf_load_stackoverflow) | 1979-10-03 |
| DE2643277A1 (de) | 1977-04-14 |
| CA1048958A (en) | 1979-02-20 |
| FR2345372B1 (enrdf_load_stackoverflow) | 1980-10-24 |
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