GB1555672A - Gas cushion transport systems - Google Patents

Gas cushion transport systems

Info

Publication number
GB1555672A
GB1555672A GB3604676A GB3604676A GB1555672A GB 1555672 A GB1555672 A GB 1555672A GB 3604676 A GB3604676 A GB 3604676A GB 3604676 A GB3604676 A GB 3604676A GB 1555672 A GB1555672 A GB 1555672A
Authority
GB
United Kingdom
Prior art keywords
transport systems
gas cushion
cushion transport
gas
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3604676A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1555672A publication Critical patent/GB1555672A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
GB3604676A 1975-10-01 1976-08-31 Gas cushion transport systems Expired GB1555672A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US61865575A 1975-10-01 1975-10-01

Publications (1)

Publication Number Publication Date
GB1555672A true GB1555672A (en) 1979-11-14

Family

ID=24478589

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3604676A Expired GB1555672A (en) 1975-10-01 1976-08-31 Gas cushion transport systems

Country Status (7)

Country Link
JP (1) JPS5244992A (enrdf_load_stackoverflow)
BR (1) BR7606591A (enrdf_load_stackoverflow)
CA (1) CA1048958A (enrdf_load_stackoverflow)
DE (1) DE2643277A1 (enrdf_load_stackoverflow)
FR (1) FR2345372A1 (enrdf_load_stackoverflow)
GB (1) GB1555672A (enrdf_load_stackoverflow)
IT (1) IT1074075B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4186918A (en) * 1977-12-12 1980-02-05 International Business Machines Corporation Method and apparatus for locating and aligning flimsy sheets
JP2014010862A (ja) * 2012-06-29 2014-01-20 Fujitsu Ltd ライブラリ装置

Also Published As

Publication number Publication date
FR2345372A1 (fr) 1977-10-21
BR7606591A (pt) 1977-07-05
IT1074075B (it) 1985-04-17
JPS5244992A (en) 1977-04-08
JPS5430834B2 (enrdf_load_stackoverflow) 1979-10-03
DE2643277A1 (de) 1977-04-14
CA1048958A (en) 1979-02-20
FR2345372B1 (enrdf_load_stackoverflow) 1980-10-24

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee