IT1034386B - Apparecchio di ottica delle particelle per l analisi spettrome trica di dispersioni ioniche e di massa deglio ioni secondari - Google Patents

Apparecchio di ottica delle particelle per l analisi spettrome trica di dispersioni ioniche e di massa deglio ioni secondari

Info

Publication number
IT1034386B
IT1034386B IT2138775A IT2138775A IT1034386B IT 1034386 B IT1034386 B IT 1034386B IT 2138775 A IT2138775 A IT 2138775A IT 2138775 A IT2138775 A IT 2138775A IT 1034386 B IT1034386 B IT 1034386B
Authority
IT
Italy
Prior art keywords
ion
spectrometric analysis
secondary ions
particle optics
optics apparatus
Prior art date
Application number
IT2138775A
Other languages
English (en)
Italian (it)
Original Assignee
Max Planck Gesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft filed Critical Max Planck Gesellschaft
Application granted granted Critical
Publication of IT1034386B publication Critical patent/IT1034386B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
IT2138775A 1974-03-25 1975-03-18 Apparecchio di ottica delle particelle per l analisi spettrome trica di dispersioni ioniche e di massa deglio ioni secondari IT1034386B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742414221 DE2414221C3 (de) 1974-03-25 1974-03-25 Ionenoptisches Gerät zur Untersuchung der Oberfläche einer Probe durch IonenbeschuB und Analyse der vom beschossenen Oberflächenbereich ausgehenden Ionen

Publications (1)

Publication Number Publication Date
IT1034386B true IT1034386B (it) 1979-09-10

Family

ID=5911045

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2138775A IT1034386B (it) 1974-03-25 1975-03-18 Apparecchio di ottica delle particelle per l analisi spettrome trica di dispersioni ioniche e di massa deglio ioni secondari

Country Status (8)

Country Link
JP (1) JPS5199094A (da)
BE (1) BE826966A (da)
DE (1) DE2414221C3 (da)
DK (1) DK144898C (da)
FR (1) FR2266166B3 (da)
GB (1) GB1445963A (da)
IT (1) IT1034386B (da)
NL (1) NL7503567A (da)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
DE2556291C3 (de) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Raster-Ionenmikroskop
WO1981003395A1 (en) * 1980-05-12 1981-11-26 Univ Trobe Angular resolved spectrometer
JPH083988B2 (ja) * 1986-10-08 1996-01-17 株式会社日立製作所 二次イオン質量分析方法
JPH0589817A (ja) * 1991-03-16 1993-04-09 Eiko Eng:Kk 複合分析装置

Also Published As

Publication number Publication date
DK144898B (da) 1982-06-28
JPS5199094A (da) 1976-09-01
DE2414221C3 (de) 1979-01-18
FR2266166A1 (da) 1975-10-24
GB1445963A (en) 1976-08-11
DK144898C (da) 1982-11-22
DK122675A (da) 1975-09-26
FR2266166B3 (da) 1977-12-02
DE2414221B2 (de) 1978-04-20
BE826966A (fr) 1975-07-16
NL7503567A (nl) 1975-09-29
DE2414221A1 (de) 1975-10-09

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