FR2317650A1 - Procede et appareil d'analyse de la surface d'une matiere par diffusion d'ions - Google Patents

Procede et appareil d'analyse de la surface d'une matiere par diffusion d'ions

Info

Publication number
FR2317650A1
FR2317650A1 FR7619329A FR7619329A FR2317650A1 FR 2317650 A1 FR2317650 A1 FR 2317650A1 FR 7619329 A FR7619329 A FR 7619329A FR 7619329 A FR7619329 A FR 7619329A FR 2317650 A1 FR2317650 A1 FR 2317650A1
Authority
FR
France
Prior art keywords
analysis
ion diffusion
diffusion
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7619329A
Other languages
English (en)
Other versions
FR2317650B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of FR2317650A1 publication Critical patent/FR2317650A1/fr
Application granted granted Critical
Publication of FR2317650B1 publication Critical patent/FR2317650B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
FR7619329A 1975-06-27 1976-06-25 Procede et appareil d'analyse de la surface d'une matiere par diffusion d'ions Granted FR2317650A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/591,104 US4058724A (en) 1975-06-27 1975-06-27 Ion Scattering spectrometer with two analyzers preferably in tandem

Publications (2)

Publication Number Publication Date
FR2317650A1 true FR2317650A1 (fr) 1977-02-04
FR2317650B1 FR2317650B1 (fr) 1981-12-24

Family

ID=24365073

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7619329A Granted FR2317650A1 (fr) 1975-06-27 1976-06-25 Procede et appareil d'analyse de la surface d'une matiere par diffusion d'ions

Country Status (6)

Country Link
US (1) US4058724A (fr)
JP (1) JPS5214481A (fr)
CA (1) CA1058772A (fr)
DE (1) DE2627085A1 (fr)
FR (1) FR2317650A1 (fr)
GB (1) GB1558828A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0004065A2 (fr) * 1978-03-07 1979-09-19 Österreichisches Forschungszentrum Seibersdorf Ges.m.b.H. Dispositif pour la focalisation et l'analyse d'un faisceau de particules chargées
FR2597260A1 (fr) * 1986-04-10 1987-10-16 Univ Pasteur Procede d'introduction directe automatique d'echantillons dans un spectrometre de masse, et dispositif pour la mise en oeuvre de ce procede

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4296323A (en) * 1980-03-10 1981-10-20 The Perkin-Elmer Corporation Secondary emission mass spectrometer mechanism to be used with other instrumentation
US4591984A (en) * 1981-08-10 1986-05-27 Tokyo Shibaura Denki Kabushiki Kaisha Radiation measuring device
JPS60135846A (ja) * 1983-12-26 1985-07-19 Anelva Corp 二次イオン質量分析方法
US4818872A (en) * 1987-05-11 1989-04-04 Microbeam Inc. Integrated charge neutralization and imaging system
DE3905631A1 (de) * 1989-02-23 1990-08-30 Finnigan Mat Gmbh Verfahren zur massenspektroskopischen untersuchung von isotopen sowie isotopenmassenspektrometer
JPH0589817A (ja) * 1991-03-16 1993-04-09 Eiko Eng:Kk 複合分析装置
CA2124237C (fr) * 1994-02-18 2004-11-02 Bernard Cohen Barriere non tisse amelioree et methode de fabrication
CA2136576C (fr) * 1994-06-27 2005-03-08 Bernard Cohen Barriere non tissee amelioree et methode pour sa fabrication
AU4961696A (en) * 1994-12-08 1996-06-26 Kimberly-Clark Worldwide, Inc. Method of forming a particle size gradient in an absorbent article
CA2153278A1 (fr) * 1994-12-30 1996-07-01 Bernard Cohen Materiau de protection forme de couches de non-tisse
ZA965786B (en) * 1995-07-19 1997-01-27 Kimberly Clark Co Nonwoven barrier and method of making the same
US5834384A (en) * 1995-11-28 1998-11-10 Kimberly-Clark Worldwide, Inc. Nonwoven webs with one or more surface treatments
US6537932B1 (en) 1997-10-31 2003-03-25 Kimberly-Clark Worldwide, Inc. Sterilization wrap, applications therefor, and method of sterilizing
US6365088B1 (en) 1998-06-26 2002-04-02 Kimberly-Clark Worldwide, Inc. Electret treatment of high loft and low density nonwoven webs
GB0511083D0 (en) 2005-05-31 2005-07-06 Thermo Finnigan Llc Multiple ion injection in mass spectrometry
WO2008050321A2 (fr) 2006-10-24 2008-05-02 B-Nano Ltd. Interface, procédé pour observer un objet dans un environnement non vide et microscope électronique à balayage
US8981294B2 (en) 2008-07-03 2015-03-17 B-Nano Ltd. Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
US8492716B2 (en) * 2008-09-28 2013-07-23 B-Nano Ltd. Vacuumed device and a scanning electron microscope
US8309936B2 (en) * 2009-02-27 2012-11-13 Trustees Of Columbia University In The City Of New York Ion deflector for two-dimensional control of ion beam cross sectional spread
JP5885474B2 (ja) * 2011-11-17 2016-03-15 キヤノン株式会社 質量分布分析方法及び質量分布分析装置
EP2959287A4 (fr) 2013-02-20 2016-10-19 Nano Ltd B Microscope électronique à balayage
SE545450C2 (en) * 2021-03-24 2023-09-12 Scienta Omicron Ab Charged particle spectrometer and method for calibration

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2266166A1 (fr) * 1974-03-25 1975-10-24 Max Planck Gesellschaft

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
US3665182A (en) * 1969-08-18 1972-05-23 Minnesota Mining & Mfg Elemental analyzing apparatus
JPS5214999B2 (fr) * 1972-03-21 1977-04-26
DE2255302C3 (de) * 1972-11-11 1980-09-11 Leybold-Heraeus Gmbh, 5000 Koeln Einrichtung für die Sekundär-Ionen-Massenspektroskopie

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2266166A1 (fr) * 1974-03-25 1975-10-24 Max Planck Gesellschaft

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NV2318/74 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0004065A2 (fr) * 1978-03-07 1979-09-19 Österreichisches Forschungszentrum Seibersdorf Ges.m.b.H. Dispositif pour la focalisation et l'analyse d'un faisceau de particules chargées
EP0004065A3 (en) * 1978-03-07 1979-10-03 Oesterr Forsch Seibersdorf Apparatus and method for focussing and analyzing a charged particle beam
FR2597260A1 (fr) * 1986-04-10 1987-10-16 Univ Pasteur Procede d'introduction directe automatique d'echantillons dans un spectrometre de masse, et dispositif pour la mise en oeuvre de ce procede

Also Published As

Publication number Publication date
US4058724A (en) 1977-11-15
GB1558828A (en) 1980-01-09
JPS5214481A (en) 1977-02-03
FR2317650B1 (fr) 1981-12-24
CA1058772A (fr) 1979-07-17
DE2627085A1 (de) 1977-01-20

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Legal Events

Date Code Title Description
ST Notification of lapse