EP0004065A3 - Apparatus and method for focussing and analyzing a charged particle beam - Google Patents

Apparatus and method for focussing and analyzing a charged particle beam Download PDF

Info

Publication number
EP0004065A3
EP0004065A3 EP79100669A EP79100669A EP0004065A3 EP 0004065 A3 EP0004065 A3 EP 0004065A3 EP 79100669 A EP79100669 A EP 79100669A EP 79100669 A EP79100669 A EP 79100669A EP 0004065 A3 EP0004065 A3 EP 0004065A3
Authority
EP
European Patent Office
Prior art keywords
focussing
analyzing
charged particle
particle beam
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP79100669A
Other languages
German (de)
Other versions
EP0004065B1 (en
EP0004065A2 (en
Inventor
Friedrich Prof.Dr. Rudenauer
Wolfgang Dr. Steiger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oesterreichisches Forschungszentrum Seibersdorf GmbH
Original Assignee
Oesterreichisches Forschungszentrum Seibersdorf GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterreichisches Forschungszentrum Seibersdorf GmbH filed Critical Oesterreichisches Forschungszentrum Seibersdorf GmbH
Publication of EP0004065A2 publication Critical patent/EP0004065A2/en
Publication of EP0004065A3 publication Critical patent/EP0004065A3/en
Application granted granted Critical
Publication of EP0004065B1 publication Critical patent/EP0004065B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP19790100669 1978-03-07 1979-03-06 Apparatus for focussing and analyzing a charged particle beam Expired EP0004065B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT1621/78 1978-03-07
AT162178A AT376044B (en) 1978-03-07 1978-03-07 DEVICE FOR FOCUSING AND ANALYZING A CHARGED BODY RAY

Publications (3)

Publication Number Publication Date
EP0004065A2 EP0004065A2 (en) 1979-09-19
EP0004065A3 true EP0004065A3 (en) 1979-10-03
EP0004065B1 EP0004065B1 (en) 1983-02-23

Family

ID=3517373

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19790100669 Expired EP0004065B1 (en) 1978-03-07 1979-03-06 Apparatus for focussing and analyzing a charged particle beam

Country Status (3)

Country Link
EP (1) EP0004065B1 (en)
AT (1) AT376044B (en)
DE (1) DE2964883D1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111982945B (en) * 2019-05-24 2023-04-28 北京纳米能源与系统研究所 Method for acquiring time resolution dark field image based on ultra-fast transmission electron microscope system and application

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679896A (en) * 1969-12-23 1972-07-25 Ibm Electrostatic prism
FR2317650A1 (en) * 1975-06-27 1977-02-04 Minnesota Mining & Mfg METHOD AND APPARATUS FOR ANALYSIS OF THE SURFACE OF A MATERIAL BY ION DIFFUSION

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679896A (en) * 1969-12-23 1972-07-25 Ibm Electrostatic prism
FR2317650A1 (en) * 1975-06-27 1977-02-04 Minnesota Mining & Mfg METHOD AND APPARATUS FOR ANALYSIS OF THE SURFACE OF A MATERIAL BY ION DIFFUSION

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF APPLIED PHYSICS, Vol. 48, No. 7, Juli 1977 New York K. WIESEMANN et al.: "Energy Analysis of H-ions from a hollowdischarge duoplasmatron" Seiten 2668-2672 * Seiten 2668-2669, Absatz "Experimental set up", figur 2 * *
JOURNAL OF PHYSICS B. ATOMIC AND MOLECULAR PHYSICS, Vol. 8, No. 7, 1975 London M. EYB und H. HOFMANN: "Elastic Electron-Alkali Atom Scattering Near the first Inelestic Threshold" Seiten 1095-1108. * Seiten 1096-1098 Absatz 2.1; Figur 1 * *
ZEITSCHRIFT FUER PHYSIK, Vol. 214 1968, Berlin D. ANDRICK et al.: "Kurzlebige Compoundzustande in der Niederenergetischen Elektron-Helium-Streuung" Seiten 388-401 * Seite 392, Zeile 35 - Seite 394, Zeile 3; Figur 2 * *

Also Published As

Publication number Publication date
DE2964883D1 (en) 1983-03-31
EP0004065B1 (en) 1983-02-23
AT376044B (en) 1984-10-10
ATA162178A (en) 1984-02-15
EP0004065A2 (en) 1979-09-19

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