EP0004065A3 - Apparatus and method for focussing and analyzing a charged particle beam - Google Patents
Apparatus and method for focussing and analyzing a charged particle beam Download PDFInfo
- Publication number
- EP0004065A3 EP0004065A3 EP79100669A EP79100669A EP0004065A3 EP 0004065 A3 EP0004065 A3 EP 0004065A3 EP 79100669 A EP79100669 A EP 79100669A EP 79100669 A EP79100669 A EP 79100669A EP 0004065 A3 EP0004065 A3 EP 0004065A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- focussing
- analyzing
- charged particle
- particle beam
- charged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/067—Ion lenses, apertures, skimmers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT162178A AT376044B (en) | 1978-03-07 | 1978-03-07 | DEVICE FOR FOCUSING AND ANALYZING A CHARGED BODY RAY |
AT1621/78 | 1978-03-07 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0004065A2 EP0004065A2 (en) | 1979-09-19 |
EP0004065A3 true EP0004065A3 (en) | 1979-10-03 |
EP0004065B1 EP0004065B1 (en) | 1983-02-23 |
Family
ID=3517373
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19790100669 Expired EP0004065B1 (en) | 1978-03-07 | 1979-03-06 | Apparatus for focussing and analyzing a charged particle beam |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0004065B1 (en) |
AT (1) | AT376044B (en) |
DE (1) | DE2964883D1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111982945B (en) * | 2019-05-24 | 2023-04-28 | 北京纳米能源与系统研究所 | Method for acquiring time resolution dark field image based on ultra-fast transmission electron microscope system and application |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3679896A (en) * | 1969-12-23 | 1972-07-25 | Ibm | Electrostatic prism |
FR2317650A1 (en) * | 1975-06-27 | 1977-02-04 | Minnesota Mining & Mfg | METHOD AND APPARATUS FOR ANALYSIS OF THE SURFACE OF A MATERIAL BY ION DIFFUSION |
-
1978
- 1978-03-07 AT AT162178A patent/AT376044B/en not_active IP Right Cessation
-
1979
- 1979-03-06 DE DE7979100669T patent/DE2964883D1/en not_active Expired
- 1979-03-06 EP EP19790100669 patent/EP0004065B1/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3679896A (en) * | 1969-12-23 | 1972-07-25 | Ibm | Electrostatic prism |
FR2317650A1 (en) * | 1975-06-27 | 1977-02-04 | Minnesota Mining & Mfg | METHOD AND APPARATUS FOR ANALYSIS OF THE SURFACE OF A MATERIAL BY ION DIFFUSION |
Non-Patent Citations (3)
Title |
---|
JOURNAL OF APPLIED PHYSICS, Vol. 48, No. 7, Juli 1977 New York K. WIESEMANN et al.: "Energy Analysis of H-ions from a hollowdischarge duoplasmatron" Seiten 2668-2672 * Seiten 2668-2669, Absatz "Experimental set up", figur 2 * * |
JOURNAL OF PHYSICS B. ATOMIC AND MOLECULAR PHYSICS, Vol. 8, No. 7, 1975 London M. EYB und H. HOFMANN: "Elastic Electron-Alkali Atom Scattering Near the first Inelestic Threshold" Seiten 1095-1108. * Seiten 1096-1098 Absatz 2.1; Figur 1 * * |
ZEITSCHRIFT FUER PHYSIK, Vol. 214 1968, Berlin D. ANDRICK et al.: "Kurzlebige Compoundzustande in der Niederenergetischen Elektron-Helium-Streuung" Seiten 388-401 * Seite 392, Zeile 35 - Seite 394, Zeile 3; Figur 2 * * |
Also Published As
Publication number | Publication date |
---|---|
AT376044B (en) | 1984-10-10 |
ATA162178A (en) | 1984-02-15 |
EP0004065B1 (en) | 1983-02-23 |
DE2964883D1 (en) | 1983-03-31 |
EP0004065A2 (en) | 1979-09-19 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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PUAL | Search report despatched |
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AK | Designated contracting states |
Designated state(s): DE FR GB |
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AK | Designated contracting states |
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17P | Request for examination filed | ||
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: OESTERREICHISCHES FORSCHUNGSZENTRUM SEIBERSDORF GE |
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GRAA | (expected) grant |
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AK | Designated contracting states |
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REF | Corresponds to: |
Ref document number: 2964883 Country of ref document: DE Date of ref document: 19830331 |
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ET | Fr: translation filed | ||
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
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