DE2964883D1 - Apparatus for focussing and analyzing a charged particle beam - Google Patents

Apparatus for focussing and analyzing a charged particle beam

Info

Publication number
DE2964883D1
DE2964883D1 DE7979100669T DE2964883T DE2964883D1 DE 2964883 D1 DE2964883 D1 DE 2964883D1 DE 7979100669 T DE7979100669 T DE 7979100669T DE 2964883 T DE2964883 T DE 2964883T DE 2964883 D1 DE2964883 D1 DE 2964883D1
Authority
DE
Germany
Prior art keywords
focussing
analyzing
charged particle
particle beam
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE7979100669T
Other languages
German (de)
Inventor
Friedrich Prof Dr Rudenauer
Wolfgang Dr Steiger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oesterreichisches Forschungszentrum Seibersdorf GmbH
Original Assignee
Oesterreichisches Forschungszentrum Seibersdorf GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterreichisches Forschungszentrum Seibersdorf GmbH filed Critical Oesterreichisches Forschungszentrum Seibersdorf GmbH
Application granted granted Critical
Publication of DE2964883D1 publication Critical patent/DE2964883D1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
DE7979100669T 1978-03-07 1979-03-06 Apparatus for focussing and analyzing a charged particle beam Expired DE2964883D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT162178A AT376044B (en) 1978-03-07 1978-03-07 DEVICE FOR FOCUSING AND ANALYZING A CHARGED BODY RAY

Publications (1)

Publication Number Publication Date
DE2964883D1 true DE2964883D1 (en) 1983-03-31

Family

ID=3517373

Family Applications (1)

Application Number Title Priority Date Filing Date
DE7979100669T Expired DE2964883D1 (en) 1978-03-07 1979-03-06 Apparatus for focussing and analyzing a charged particle beam

Country Status (3)

Country Link
EP (1) EP0004065B1 (en)
AT (1) AT376044B (en)
DE (1) DE2964883D1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111982945B (en) * 2019-05-24 2023-04-28 北京纳米能源与系统研究所 Method for acquiring time resolution dark field image based on ultra-fast transmission electron microscope system and application

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679896A (en) * 1969-12-23 1972-07-25 Ibm Electrostatic prism
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem

Also Published As

Publication number Publication date
EP0004065A3 (en) 1979-10-03
AT376044B (en) 1984-10-10
EP0004065A2 (en) 1979-09-19
EP0004065B1 (en) 1983-02-23
ATA162178A (en) 1984-02-15

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