IT1004276B - Perfezionamento nei microscopi elettronici a scansione - Google Patents

Perfezionamento nei microscopi elettronici a scansione

Info

Publication number
IT1004276B
IT1004276B IT50584/74A IT5058474A IT1004276B IT 1004276 B IT1004276 B IT 1004276B IT 50584/74 A IT50584/74 A IT 50584/74A IT 5058474 A IT5058474 A IT 5058474A IT 1004276 B IT1004276 B IT 1004276B
Authority
IT
Italy
Prior art keywords
improvement
electronic scanning
scanning microscopes
microscopes
electronic
Prior art date
Application number
IT50584/74A
Other languages
English (en)
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Application granted granted Critical
Publication of IT1004276B publication Critical patent/IT1004276B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
IT50584/74A 1973-04-24 1974-04-23 Perfezionamento nei microscopi elettronici a scansione IT1004276B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00354039A US3842271A (en) 1973-04-24 1973-04-24 Scanning electron microscope

Publications (1)

Publication Number Publication Date
IT1004276B true IT1004276B (it) 1976-07-10

Family

ID=23391641

Family Applications (1)

Application Number Title Priority Date Filing Date
IT50584/74A IT1004276B (it) 1973-04-24 1974-04-23 Perfezionamento nei microscopi elettronici a scansione

Country Status (11)

Country Link
US (1) US3842271A (it)
JP (1) JPS5014273A (it)
AU (1) AU474023B2 (it)
CA (1) CA1006990A (it)
DD (1) DD113660A5 (it)
DE (1) DE2417319A1 (it)
FR (1) FR2227632B1 (it)
GB (1) GB1436278A (it)
IT (1) IT1004276B (it)
NL (1) NL7405307A (it)
SE (1) SE388721B (it)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7902963A (nl) * 1979-04-13 1980-10-15 Philips Nv Detektor voor elektronenmikroskoop.
JPH0687410B2 (ja) * 1986-08-01 1994-11-02 エレクトロ‐スキャン コーポレーション 走査電子顕微鏡及び試料の表面を電子顕微鏡的に像形成する方法
JPH0766766B2 (ja) * 1989-03-30 1995-07-19 株式会社日立製作所 電子顕微鏡
EP0443410B1 (en) * 1990-02-23 1994-09-21 International Business Machines Corporation Multiple detector system for specimen inspection using high energy backscatter electrons
DE60033767T2 (de) * 1999-06-22 2007-11-15 Fei Co., Hillsboro Korpuskularoptisches gerät mit einer teilchenquelle umschaltbar zwischen hoher helligkeit und grossem strahlstrom
CN1307432C (zh) * 2001-01-31 2007-03-28 滨松光子学株式会社 电子束检测器、扫描型电子显微镜、质量分析装置及离子检测器
DE602008003970D1 (de) * 2008-02-08 2011-01-27 Integrated Circuit Testing Strahlstromkalibriersystem
US9190241B2 (en) 2013-03-25 2015-11-17 Hermes-Microvision, Inc. Charged particle beam apparatus
US10236156B2 (en) 2015-03-25 2019-03-19 Hermes Microvision Inc. Apparatus of plural charged-particle beams
US10393887B2 (en) * 2015-07-19 2019-08-27 Afo Research, Inc. Fluorine resistant, radiation resistant, and radiation detection glass systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3052637A (en) * 1961-06-05 1962-09-04 Adli M Bishay Glass composition and process of making
US3472997A (en) * 1966-08-26 1969-10-14 Us Navy Secondary electron collection system

Also Published As

Publication number Publication date
FR2227632B1 (it) 1978-03-31
US3842271A (en) 1974-10-15
AU474023B2 (en) 1976-07-08
NL7405307A (it) 1974-10-28
AU6763374A (en) 1975-10-09
FR2227632A1 (it) 1974-11-22
DD113660A5 (it) 1975-06-12
SE388721B (sv) 1976-10-11
CA1006990A (en) 1977-03-15
GB1436278A (en) 1976-05-19
DE2417319A1 (de) 1974-11-07
JPS5014273A (it) 1975-02-14

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