SE388721B - Anordning vid ett svepelektronmikroskop - Google Patents

Anordning vid ett svepelektronmikroskop

Info

Publication number
SE388721B
SE388721B SE7405430A SE7405430A SE388721B SE 388721 B SE388721 B SE 388721B SE 7405430 A SE7405430 A SE 7405430A SE 7405430 A SE7405430 A SE 7405430A SE 388721 B SE388721 B SE 388721B
Authority
SE
Sweden
Prior art keywords
screwing
electronic microscope
microscope
electronic
screwing electronic
Prior art date
Application number
SE7405430A
Other languages
English (en)
Swedish (sv)
Inventor
A E Gee
E Snitzer
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Publication of SE388721B publication Critical patent/SE388721B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
SE7405430A 1973-04-24 1974-04-23 Anordning vid ett svepelektronmikroskop SE388721B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00354039A US3842271A (en) 1973-04-24 1973-04-24 Scanning electron microscope

Publications (1)

Publication Number Publication Date
SE388721B true SE388721B (sv) 1976-10-11

Family

ID=23391641

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7405430A SE388721B (sv) 1973-04-24 1974-04-23 Anordning vid ett svepelektronmikroskop

Country Status (11)

Country Link
US (1) US3842271A (xx)
JP (1) JPS5014273A (xx)
AU (1) AU474023B2 (xx)
CA (1) CA1006990A (xx)
DD (1) DD113660A5 (xx)
DE (1) DE2417319A1 (xx)
FR (1) FR2227632B1 (xx)
GB (1) GB1436278A (xx)
IT (1) IT1004276B (xx)
NL (1) NL7405307A (xx)
SE (1) SE388721B (xx)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7902963A (nl) * 1979-04-13 1980-10-15 Philips Nv Detektor voor elektronenmikroskoop.
EP0275306B1 (en) * 1986-08-01 1990-10-24 Electro-Scan Corporation Multipurpose gaseous detector device for electron microscopes
JPH0766766B2 (ja) * 1989-03-30 1995-07-19 株式会社日立製作所 電子顕微鏡
DE69104082T2 (de) * 1990-02-23 1995-03-30 Ibm Mehrdetektoren-System zur Probenuntersuchung mittels hochenergetischer Rückstreuelektronen.
WO2000079565A1 (en) * 1999-06-22 2000-12-28 Philips Electron Optics B.V. Particle-optical apparatus including a particle source that can be switched between high brightness and large beam current
WO2002061458A1 (fr) * 2001-01-31 2002-08-08 Hamamatsu Photonics K. K. Detecteur de faisceau electronique, microscope electronique de type a balayage, spectrometre de masse et detecteur d'ions
EP2088614B1 (en) * 2008-02-08 2010-12-15 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam current calibration system
US9190241B2 (en) * 2013-03-25 2015-11-17 Hermes-Microvision, Inc. Charged particle beam apparatus
US10236156B2 (en) 2015-03-25 2019-03-19 Hermes Microvision Inc. Apparatus of plural charged-particle beams
US10393887B2 (en) * 2015-07-19 2019-08-27 Afo Research, Inc. Fluorine resistant, radiation resistant, and radiation detection glass systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3052637A (en) * 1961-06-05 1962-09-04 Adli M Bishay Glass composition and process of making
US3472997A (en) * 1966-08-26 1969-10-14 Us Navy Secondary electron collection system

Also Published As

Publication number Publication date
FR2227632B1 (xx) 1978-03-31
DE2417319A1 (de) 1974-11-07
AU6763374A (en) 1975-10-09
US3842271A (en) 1974-10-15
JPS5014273A (xx) 1975-02-14
GB1436278A (en) 1976-05-19
DD113660A5 (xx) 1975-06-12
CA1006990A (en) 1977-03-15
AU474023B2 (en) 1976-07-08
IT1004276B (it) 1976-07-10
FR2227632A1 (xx) 1974-11-22
NL7405307A (xx) 1974-10-28

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