IN2012DN02514A - - Google Patents

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Publication number
IN2012DN02514A
IN2012DN02514A IN2514DEN2012A IN2012DN02514A IN 2012DN02514 A IN2012DN02514 A IN 2012DN02514A IN 2514DEN2012 A IN2514DEN2012 A IN 2514DEN2012A IN 2012DN02514 A IN2012DN02514 A IN 2012DN02514A
Authority
IN
India
Prior art keywords
retaining member
seed
seed retaining
polycrystalline silicon
breaking
Prior art date
Application number
Other languages
English (en)
Inventor
Jun Ishizaki
Masaki Izumiya
Original Assignee
Toyo Tanso Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Tanso Co filed Critical Toyo Tanso Co
Publication of IN2012DN02514A publication Critical patent/IN2012DN02514A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • C01B33/021Preparation
    • C01B33/027Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24Stationary reactors without moving elements inside

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
IN2514DEN2012 2009-09-02 2010-09-02 IN2012DN02514A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009202389A JP5431074B2 (ja) 2009-09-02 2009-09-02 シード保持部材及びそのシード保持部材を用いた多結晶シリコン製造方法
PCT/JP2010/064986 WO2011027803A1 (ja) 2009-09-02 2010-09-02 シード保持部材及びそのシード保持部材を用いた多結晶シリコン製造方法

Publications (1)

Publication Number Publication Date
IN2012DN02514A true IN2012DN02514A (ja) 2015-08-28

Family

ID=43649337

Family Applications (1)

Application Number Title Priority Date Filing Date
IN2514DEN2012 IN2012DN02514A (ja) 2009-09-02 2010-09-02

Country Status (9)

Country Link
US (1) US20120186300A1 (ja)
EP (1) EP2474504A1 (ja)
JP (1) JP5431074B2 (ja)
KR (1) KR20120091034A (ja)
CN (1) CN102482104A (ja)
IN (1) IN2012DN02514A (ja)
SG (1) SG178958A1 (ja)
TW (1) TW201129500A (ja)
WO (1) WO2011027803A1 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010003064A1 (de) * 2010-03-19 2011-09-22 Wacker Chemie Ag Graphitelektrode
JP5507493B2 (ja) * 2011-05-09 2014-05-28 信越化学工業株式会社 シリコン芯線ホルダおよび多結晶シリコンの製造方法
JP2013006747A (ja) * 2011-06-27 2013-01-10 Toyo Tanso Kk シード保持部材、多結晶シリコン製造装置、及びシード保持部材の製造方法
KR101435875B1 (ko) 2012-03-12 2014-09-01 (주)아폴로테크 폴리실리콘 제조용 흑연척 재활용 방법
JP5761099B2 (ja) * 2012-03-28 2015-08-12 三菱マテリアル株式会社 多結晶シリコン反応炉
DE102014201096A1 (de) * 2014-01-22 2015-07-23 Wacker Chemie Ag Verfahren zur Herstellung von polykristallinem Silicium
JP6373724B2 (ja) * 2014-11-04 2018-08-15 株式会社トクヤマ 芯線ホルダ及びシリコンの製造方法
CN110352177B (zh) * 2017-03-08 2023-08-01 株式会社德山 多晶硅加工品的制造方法
CN111646475B (zh) * 2020-06-03 2024-06-11 洛阳中硅高科技有限公司 一体式石墨底座和电子级多晶硅生产系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960003734B1 (ko) * 1990-06-27 1996-03-21 유니온 카바이드 코팅즈 서비스 테크놀러지 코포레이션 다결정 실리콘 제조에서의 스타터 필라멘트용 흑연 척 및 그 보호 방법
JP2867306B2 (ja) 1991-11-15 1999-03-08 三菱マテリアルポリシリコン株式会社 半導体級多結晶シリコンの製造方法とその装置
JP3449201B2 (ja) * 1997-11-28 2003-09-22 日亜化学工業株式会社 窒化物半導体素子の製造方法
JP3559244B2 (ja) * 2001-01-18 2004-08-25 住友チタニウム株式会社 ロッド解体機
JP2002260915A (ja) * 2001-02-28 2002-09-13 Matsushita Electric Ind Co Ltd プラスチック磁石
JP5119950B2 (ja) * 2008-01-28 2013-01-16 パナソニック株式会社 軒樋支持具装置

Also Published As

Publication number Publication date
EP2474504A1 (en) 2012-07-11
KR20120091034A (ko) 2012-08-17
TW201129500A (en) 2011-09-01
CN102482104A (zh) 2012-05-30
JP5431074B2 (ja) 2014-03-05
JP2011051837A (ja) 2011-03-17
SG178958A1 (en) 2012-04-27
WO2011027803A1 (ja) 2011-03-10
US20120186300A1 (en) 2012-07-26

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