IL71255A - Polymeric pellicle compositions and pellicles therefrom for projection printing - Google Patents

Polymeric pellicle compositions and pellicles therefrom for projection printing

Info

Publication number
IL71255A
IL71255A IL71255A IL7125584A IL71255A IL 71255 A IL71255 A IL 71255A IL 71255 A IL71255 A IL 71255A IL 7125584 A IL7125584 A IL 7125584A IL 71255 A IL71255 A IL 71255A
Authority
IL
Israel
Prior art keywords
pellicles
polymeric
therefrom
projection printing
pellicle
Prior art date
Application number
IL71255A
Other languages
English (en)
Other versions
IL71255A0 (en
Original Assignee
Baker Chem Co J T
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baker Chem Co J T filed Critical Baker Chem Co J T
Publication of IL71255A0 publication Critical patent/IL71255A0/xx
Publication of IL71255A publication Critical patent/IL71255A/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31942—Of aldehyde or ketone condensation product

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Processes Of Treating Macromolecular Substances (AREA)
  • Adhesives Or Adhesive Processes (AREA)
IL71255A 1983-04-18 1984-03-16 Polymeric pellicle compositions and pellicles therefrom for projection printing IL71255A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/486,082 US4476172A (en) 1983-04-18 1983-04-18 Pellicle compositions and pellicles thereof for projection printing

Publications (2)

Publication Number Publication Date
IL71255A0 IL71255A0 (en) 1984-06-29
IL71255A true IL71255A (en) 1987-10-20

Family

ID=23930523

Family Applications (1)

Application Number Title Priority Date Filing Date
IL71255A IL71255A (en) 1983-04-18 1984-03-16 Polymeric pellicle compositions and pellicles therefrom for projection printing

Country Status (9)

Country Link
US (1) US4476172A (da)
EP (1) EP0122613A3 (da)
JP (1) JPS59206406A (da)
AU (1) AU566307B2 (da)
CA (1) CA1200947A (da)
DK (1) DK197984A (da)
ES (1) ES531701A0 (da)
IL (1) IL71255A (da)
NO (1) NO165758C (da)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4796973A (en) * 1984-10-16 1989-01-10 Tau Laboratories, Inc. Pellicle structure for transmission of mid ultraviolet light
CA1276744C (en) * 1985-07-02 1990-11-20 George Etienne Cartier Cross-linked polyvinyl butyral
US4654179A (en) * 1985-07-02 1987-03-31 Monsanto Company Polyvinyl butyral sheet roughness control
CA1274647A (en) * 1986-06-25 1990-09-25 Takahisa Iwahara Curable isobutylene polymer
US5008156A (en) * 1986-11-07 1991-04-16 Exion Technology, Inc. Photochemically stable mid and deep ultraviolet pellicles
JPS63138352A (ja) * 1986-11-29 1988-06-10 Dainippon Printing Co Ltd ペリクル用高分子薄膜
JPH0769603B2 (ja) * 1986-12-26 1995-07-31 東ソー株式会社 マスクの保護防塵体
JPH07104595B2 (ja) * 1986-12-26 1995-11-13 東ソー株式会社 フオトマスク、レチクルの保護防塵体
US5100957A (en) * 1986-12-26 1992-03-31 Tosoh Corporation Protective dust cover for photomask or reticle
JP2642637B2 (ja) * 1987-08-18 1997-08-20 三井石油化学工業 株式会社 防塵膜
US5234742A (en) * 1989-03-03 1993-08-10 Shin-Etsu Chemical Co., Ltd. Pellicle for lithography
US5026775A (en) * 1989-08-03 1991-06-25 Ward Irl E Polyvinyl butyral pellicle compositions
US5061024C1 (en) * 1989-09-06 2002-02-26 Dupont Photomasks Inc Amorphous fluoropolymer pellicle films
US5229229A (en) * 1990-04-27 1993-07-20 Tosoh Corporation Pellicle having reflection-preventing function
DE10140131B4 (de) * 2001-08-16 2007-05-24 Wacker Polymer Systems Gmbh & Co. Kg Silan-modifizierte Polyvinylacetale
DE10140129B4 (de) * 2001-08-16 2009-04-23 Wacker Chemie Ag Silan-modifizierte Polyvinylacetale
DE10233934A1 (de) * 2002-07-25 2004-02-12 Wacker Polymer Systems Gmbh & Co. Kg Silan-haltige Polyvinylalkohole und Polyvinylacetale
DE10233936A1 (de) * 2002-07-25 2004-02-12 Wacker Polymer Systems Gmbh & Co. Kg Silan-haltige Polymerisate
US9950349B2 (en) * 2015-09-15 2018-04-24 Internationa Business Machines Corporation Drying an extreme ultraviolet (EUV) pellicle
CN108164621B (zh) * 2017-12-27 2020-07-07 吉晟光电（深圳）有限公司 一种基于聚乙烯醇缩丁醛的改性聚合物及其制备工艺与应用
US11007685B1 (en) * 2018-09-26 2021-05-18 United States Of America As Represented By The Administrator Of Nasa Fabricating ultra-thin structured polymer films

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US30601A (en) * 1860-11-06 weight
NL132245C (da) * 1962-12-17
DE1298221B (de) * 1962-12-17 1969-06-26 Bunker Hill Company Verfahren zur Herstellung einer UEberzugs- bzw. Anstrichmasse
US4148637A (en) * 1973-09-04 1979-04-10 Ricoh Co., Ltd. Silane coupling agent in protective layer of photoconductive element
US4110762A (en) * 1974-05-10 1978-08-29 Commissariat A L'energie Atomique Drawing machines especially for integrated circuit masks
US3959242A (en) * 1974-08-12 1976-05-25 The Goodyear Tire & Rubber Company Silane grafted poly(vinyl alcohol) film
US4131363A (en) * 1977-12-05 1978-12-26 International Business Machines Corporation Pellicle cover for projection printing system
JPS552237A (en) * 1978-06-21 1980-01-09 Ricoh Co Ltd Photoreceptor for electrophotography
USRE30601E (en) 1978-12-11 1981-05-05 International Business Machines Corporation Alignment apparatus
US4255216A (en) * 1980-01-14 1981-03-10 International Business Machines Corporation Pellicle ring removal method and tool
JPS5783536A (en) * 1980-11-12 1982-05-25 Daicel Chem Ind Ltd Coating composition for molded polycarbonate article

Also Published As

Publication number Publication date
AU566307B2 (en) 1987-10-15
ES8602059A1 (es) 1985-11-16
DK197984D0 (da) 1984-04-17
IL71255A0 (en) 1984-06-29
DK197984A (da) 1984-10-19
NO165758B (no) 1990-12-27
AU2612984A (en) 1984-10-25
US4476172A (en) 1984-10-09
EP0122613A2 (en) 1984-10-24
NO165758C (no) 1991-04-10
ES531701A0 (es) 1985-11-16
CA1200947A (en) 1986-02-18
NO841536L (no) 1984-10-19
EP0122613A3 (en) 1987-03-25
JPS59206406A (ja) 1984-11-22

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