IL29456A - Heat treatment of multilayered thin film structures employing oxide-parting layers - Google Patents

Heat treatment of multilayered thin film structures employing oxide-parting layers

Info

Publication number
IL29456A
IL29456A IL29456A IL2945668A IL29456A IL 29456 A IL29456 A IL 29456A IL 29456 A IL29456 A IL 29456A IL 2945668 A IL2945668 A IL 2945668A IL 29456 A IL29456 A IL 29456A
Authority
IL
Israel
Prior art keywords
layer
tantalum
heat treatment
substrate
etch
Prior art date
Application number
IL29456A
Other languages
English (en)
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of IL29456A publication Critical patent/IL29456A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/702Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
    • H01L21/707Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thin-film circuits or parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C1/00Details
    • H01C1/14Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors
    • H01C1/142Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors the terminals or tapping points being coated on the resistive element
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/30Apparatus or processes specially adapted for manufacturing resistors adapted for baking
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49082Resistor making
    • Y10T29/49099Coating resistive material on a base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
IL29456A 1967-04-13 1968-02-11 Heat treatment of multilayered thin film structures employing oxide-parting layers IL29456A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63068867A 1967-04-13 1967-04-13

Publications (1)

Publication Number Publication Date
IL29456A true IL29456A (en) 1971-04-28

Family

ID=24528189

Family Applications (1)

Application Number Title Priority Date Filing Date
IL29456A IL29456A (en) 1967-04-13 1968-02-11 Heat treatment of multilayered thin film structures employing oxide-parting layers

Country Status (11)

Country Link
US (1) US3544287A (nl)
BE (1) BE713642A (nl)
CH (1) CH479229A (nl)
DE (1) DE1765003B2 (nl)
ES (1) ES352939A1 (nl)
FR (1) FR1561665A (nl)
GB (1) GB1228956A (nl)
IE (1) IE32016B1 (nl)
IL (1) IL29456A (nl)
NL (1) NL139864B (nl)
SE (1) SE330926B (nl)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3786557A (en) * 1972-05-22 1974-01-22 G Bodway Fabrication of thin film resistors
US4035226A (en) * 1975-04-14 1977-07-12 Rca Corporation Method of preparing portions of a semiconductor wafer surface for further processing
JPS5375472A (en) * 1976-12-17 1978-07-04 Hitachi Ltd Method of producing thin film resistive ic
JPS5820160B2 (ja) * 1978-06-17 1983-04-21 日本碍子株式会社 メタライズ層を備えたセラミツクス体
DE2906813C2 (de) * 1979-02-22 1982-06-03 Robert Bosch Gmbh, 7000 Stuttgart Elektronische Dünnschichtschaltung
DE2948253C2 (de) * 1979-11-30 1981-12-17 Robert Bosch Gmbh, 7000 Stuttgart Elektronische Dünnschichtschaltung
DE3204054A1 (de) * 1981-02-23 1982-09-09 Intel Corp., Santa Clara, Calif. Widerstand in integrierter schaltungstechnik und verfahren zu dessen herstellung
US5254202A (en) * 1992-04-07 1993-10-19 International Business Machines Corporation Fabrication of laser ablation masks by wet etching
US11752500B2 (en) 2018-04-27 2023-09-12 Corning Incorporated Microfluidic devices and methods for manufacturing microfluidic devices
CN114599954A (zh) * 2019-10-23 2022-06-07 康宁股份有限公司 包含流动通道的玻璃制品及其制作方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA655852A (en) * 1963-01-15 Reich Bernard Method of stabilizing the characteristics of semiconductor devices
US3159556A (en) * 1960-12-08 1964-12-01 Bell Telephone Labor Inc Stabilized tantalum film resistors
US3386011A (en) * 1962-10-23 1968-05-28 Philco Ford Corp Thin-film rc circuits on single substrate
US3406043A (en) * 1964-11-09 1968-10-15 Western Electric Co Integrated circuit containing multilayer tantalum compounds

Also Published As

Publication number Publication date
US3544287A (en) 1970-12-01
SE330926B (nl) 1970-12-07
BE713642A (nl) 1968-08-16
IE32016B1 (en) 1973-03-21
NL6805074A (nl) 1968-10-14
IE32016L (en) 1968-10-13
ES352939A1 (es) 1969-09-01
GB1228956A (nl) 1971-04-21
DE1765003A1 (de) 1971-12-30
NL139864B (nl) 1973-09-17
FR1561665A (nl) 1969-03-28
DE1765003B2 (de) 1972-05-18
CH479229A (de) 1969-09-30

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