IL178321A - Optical test system - Google Patents

Optical test system

Info

Publication number
IL178321A
IL178321A IL178321A IL17832106A IL178321A IL 178321 A IL178321 A IL 178321A IL 178321 A IL178321 A IL 178321A IL 17832106 A IL17832106 A IL 17832106A IL 178321 A IL178321 A IL 178321A
Authority
IL
Israel
Prior art keywords
inspection
region
output
optical inspection
functionality
Prior art date
Application number
IL178321A
Other languages
English (en)
Hebrew (he)
Other versions
IL178321A0 (en
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Priority to IL178321A priority Critical patent/IL178321A/en
Publication of IL178321A0 publication Critical patent/IL178321A0/en
Priority to KR20070089249A priority patent/KR20080028278A/ko
Priority to JP2007231102A priority patent/JP2008083044A/ja
Priority to TW96133429A priority patent/TW200815746A/zh
Priority to CN200710153935.3A priority patent/CN101153854B/zh
Publication of IL178321A publication Critical patent/IL178321A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
IL178321A 2006-09-26 2006-09-26 Optical test system IL178321A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IL178321A IL178321A (en) 2006-09-26 2006-09-26 Optical test system
KR20070089249A KR20080028278A (ko) 2006-09-26 2007-09-04 전기 회로 소자의 광학 검사 시스템 및 방법
JP2007231102A JP2008083044A (ja) 2006-09-26 2007-09-06 光学検査システム及び光学検査方法
TW96133429A TW200815746A (en) 2006-09-26 2007-09-07 System and method for optical inspection of electrical circuit devices
CN200710153935.3A CN101153854B (zh) 2006-09-26 2007-09-14 光学检验系统

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL178321A IL178321A (en) 2006-09-26 2006-09-26 Optical test system

Publications (2)

Publication Number Publication Date
IL178321A0 IL178321A0 (en) 2007-02-11
IL178321A true IL178321A (en) 2014-08-31

Family

ID=39255622

Family Applications (1)

Application Number Title Priority Date Filing Date
IL178321A IL178321A (en) 2006-09-26 2006-09-26 Optical test system

Country Status (5)

Country Link
JP (1) JP2008083044A (ja)
KR (1) KR20080028278A (ja)
CN (1) CN101153854B (ja)
IL (1) IL178321A (ja)
TW (1) TW200815746A (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201716167A (zh) * 2011-08-18 2017-05-16 奧寶科技有限公司 用於電路之檢測/維修/再檢測系統及雷射寫入系統
CN111079564B (zh) 2019-11-27 2021-06-01 奥特斯科技(重庆)有限公司 处理部件承载件的方法及光学检查设备和计算机可读介质
CN111307817B (zh) * 2020-02-12 2021-04-09 武汉大学 一种智能产线pcb生产过程的在线检测方法及系统
US11922619B2 (en) * 2022-03-31 2024-03-05 Kla Corporation Context-based defect inspection
US20230314336A1 (en) 2022-03-31 2023-10-05 Kla Corporation Multi-mode optical inspection

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758888A (en) * 1987-02-17 1988-07-19 Orbot Systems, Ltd. Method of and means for inspecting workpieces traveling along a production line

Also Published As

Publication number Publication date
IL178321A0 (en) 2007-02-11
TW200815746A (en) 2008-04-01
KR20080028278A (ko) 2008-03-31
CN101153854B (zh) 2015-08-19
JP2008083044A (ja) 2008-04-10
CN101153854A (zh) 2008-04-02

Similar Documents

Publication Publication Date Title
US7355692B2 (en) System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery
US6879392B2 (en) Method and apparatus for inspecting defects
US7127099B2 (en) Image searching defect detector
US20070165939A1 (en) Reduction of false alarms in pcb inspection
IL178321A (en) Optical test system
JP2002267615A (ja) 欠陥検出方法及びその装置
JP2006251561A (ja) 欠陥画素リペア方法
JP2009264876A (ja) 製品品質の検査システム及びその方法
KR20070101669A (ko) 마운팅 플레이트 어셈블리의 비전 검사장치 및 검사방법
CN113933309B (zh) 一种复测aoi机台检盲孔孔内不良的方法
JP2009264882A (ja) 外観検査装置
WO2013124958A1 (ja) 視線位置特定手段を備えた目視検査装置
KR100484812B1 (ko) 이미지 센서를 이용한 표면 검사방법 및 검사장치
JPH0526636A (ja) プリント基板はんだ付け検査方法および検査装置
JP3249216B2 (ja) 照明装置の照度確認方法
JPH11150169A (ja) 回路検査方法および装置
JP4009085B2 (ja) パターン検査装置およびパターン検査方法
KR200421155Y1 (ko) 자동차 퓨즈.릴레이박스의 비전검사시스템
KR19990070849A (ko) 인쇄회로기판의 납땜 검사장치 및 방법
JP2004069474A (ja) リード打痕検査装置
JP2023051102A (ja) 画像検査方法、及び画像検査装置
JPH07117391B2 (ja) 照明ランプにおける端子のカシメ部の検査装置
JP2023050842A (ja) 画像検査方法、及び画像検査装置
CN111175302A (zh) 复合检测条件的光学影像自动撷取方法
KR20030036976A (ko) Ｂｇａ솔더볼 형상 검사장치 및 최적 조명 설정방법

Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees