IL178321A - Optical test system - Google Patents
Optical test systemInfo
- Publication number
- IL178321A IL178321A IL178321A IL17832106A IL178321A IL 178321 A IL178321 A IL 178321A IL 178321 A IL178321 A IL 178321A IL 17832106 A IL17832106 A IL 17832106A IL 178321 A IL178321 A IL 178321A
- Authority
- IL
- Israel
- Prior art keywords
- inspection
- region
- output
- optical inspection
- functionality
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IL178321A IL178321A (en) | 2006-09-26 | 2006-09-26 | Optical test system |
KR20070089249A KR20080028278A (ko) | 2006-09-26 | 2007-09-04 | 전기 회로 소자의 광학 검사 시스템 및 방법 |
JP2007231102A JP2008083044A (ja) | 2006-09-26 | 2007-09-06 | 光学検査システム及び光学検査方法 |
TW96133429A TW200815746A (en) | 2006-09-26 | 2007-09-07 | System and method for optical inspection of electrical circuit devices |
CN200710153935.3A CN101153854B (zh) | 2006-09-26 | 2007-09-14 | 光学检验系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IL178321A IL178321A (en) | 2006-09-26 | 2006-09-26 | Optical test system |
Publications (2)
Publication Number | Publication Date |
---|---|
IL178321A0 IL178321A0 (en) | 2007-02-11 |
IL178321A true IL178321A (en) | 2014-08-31 |
Family
ID=39255622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL178321A IL178321A (en) | 2006-09-26 | 2006-09-26 | Optical test system |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2008083044A (ja) |
KR (1) | KR20080028278A (ja) |
CN (1) | CN101153854B (ja) |
IL (1) | IL178321A (ja) |
TW (1) | TW200815746A (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201716167A (zh) * | 2011-08-18 | 2017-05-16 | 奧寶科技有限公司 | 用於電路之檢測/維修/再檢測系統及雷射寫入系統 |
CN111079564B (zh) | 2019-11-27 | 2021-06-01 | 奥特斯科技(重庆)有限公司 | 处理部件承载件的方法及光学检查设备和计算机可读介质 |
CN111307817B (zh) * | 2020-02-12 | 2021-04-09 | 武汉大学 | 一种智能产线pcb生产过程的在线检测方法及系统 |
US11922619B2 (en) * | 2022-03-31 | 2024-03-05 | Kla Corporation | Context-based defect inspection |
US20230314336A1 (en) | 2022-03-31 | 2023-10-05 | Kla Corporation | Multi-mode optical inspection |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4758888A (en) * | 1987-02-17 | 1988-07-19 | Orbot Systems, Ltd. | Method of and means for inspecting workpieces traveling along a production line |
-
2006
- 2006-09-26 IL IL178321A patent/IL178321A/en not_active IP Right Cessation
-
2007
- 2007-09-04 KR KR20070089249A patent/KR20080028278A/ko not_active Application Discontinuation
- 2007-09-06 JP JP2007231102A patent/JP2008083044A/ja active Pending
- 2007-09-07 TW TW96133429A patent/TW200815746A/zh unknown
- 2007-09-14 CN CN200710153935.3A patent/CN101153854B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
IL178321A0 (en) | 2007-02-11 |
TW200815746A (en) | 2008-04-01 |
KR20080028278A (ko) | 2008-03-31 |
CN101153854B (zh) | 2015-08-19 |
JP2008083044A (ja) | 2008-04-10 |
CN101153854A (zh) | 2008-04-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
KB | Patent renewed | ||
KB | Patent renewed | ||
MM9K | Patent not in force due to non-payment of renewal fees |