IL148879A0 - Method of fabricating an integrated optical component - Google Patents

Method of fabricating an integrated optical component

Info

Publication number
IL148879A0
IL148879A0 IL14887900A IL14887900A IL148879A0 IL 148879 A0 IL148879 A0 IL 148879A0 IL 14887900 A IL14887900 A IL 14887900A IL 14887900 A IL14887900 A IL 14887900A IL 148879 A0 IL148879 A0 IL 148879A0
Authority
IL
Israel
Prior art keywords
fabricating
optical component
integrated optical
integrated
component
Prior art date
Application number
IL14887900A
Other languages
English (en)
Original Assignee
Bookham Technology Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bookham Technology Plc filed Critical Bookham Technology Plc
Publication of IL148879A0 publication Critical patent/IL148879A0/xx

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
IL14887900A 1999-10-13 2000-10-13 Method of fabricating an integrated optical component IL148879A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9924098A GB2355312B (en) 1999-10-13 1999-10-13 Method of fabricating an integrated optical component
PCT/GB2000/003935 WO2001027670A1 (en) 1999-10-13 2000-10-13 Method of fabricating an integrated optical component

Publications (1)

Publication Number Publication Date
IL148879A0 true IL148879A0 (en) 2002-09-12

Family

ID=10862574

Family Applications (1)

Application Number Title Priority Date Filing Date
IL14887900A IL148879A0 (en) 1999-10-13 2000-10-13 Method of fabricating an integrated optical component

Country Status (10)

Country Link
US (1) US6509139B1 (zh)
EP (1) EP1230569A1 (zh)
JP (1) JP2003511737A (zh)
KR (1) KR20020070265A (zh)
CN (1) CN1409826A (zh)
AU (1) AU7804700A (zh)
CA (1) CA2386679A1 (zh)
GB (1) GB2355312B (zh)
IL (1) IL148879A0 (zh)
WO (1) WO2001027670A1 (zh)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100716955B1 (ko) * 2000-09-29 2007-05-10 삼성전자주식회사 광커넥터 제조방법
US7251406B2 (en) 2000-12-14 2007-07-31 Shipley Company, L.L.C. Optical waveguide termination with vertical and horizontal mode shaping
CA2450383C (en) 2001-05-17 2011-04-05 Sioptical, Inc. Polyloaded optical waveguide devices
US6608945B2 (en) 2001-05-17 2003-08-19 Optronx, Inc. Self-aligning modulator method and associated apparatus
US6690844B2 (en) 2001-05-17 2004-02-10 Optronx, Inc. Optical fiber apparatus and associated method
US6748125B2 (en) 2001-05-17 2004-06-08 Sioptical, Inc. Electronic semiconductor control of light in optical waveguide
JP2006517673A (ja) * 2001-12-05 2006-07-27 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． 垂直モードおよび水平モード形状を有する光導波路終端装置
FI20020698A0 (fi) 2002-04-11 2002-04-11 Valtion Teknillinen Integroidun optisen piirin valokanava ja menetelmä valokanavan valmistamiseksi
EP1615013A4 (en) * 2003-04-15 2010-04-14 Universal Bio Research Co Ltd DISTRIBUTION CYLINDER, HIGH CAPACITY DISPENSING DEVICE, AND METHOD OF USING THE DEVICE
US7672558B2 (en) 2004-01-12 2010-03-02 Honeywell International, Inc. Silicon optical device
US20070101927A1 (en) * 2005-11-10 2007-05-10 Honeywell International Inc. Silicon based optical waveguide structures and methods of manufacture
CN100434952C (zh) * 2006-04-13 2008-11-19 中国科学院半导体研究所 一种适用于台阶结构的自对准掺杂工艺
US20070274655A1 (en) * 2006-04-26 2007-11-29 Honeywell International Inc. Low-loss optical device structure
US20090103867A1 (en) * 2007-10-22 2009-04-23 Jds Uniphase Corporation Variable Optical Attenuator
WO2009098829A1 (ja) * 2008-02-06 2009-08-13 Nec Corporation 光導波路及びその製造方法
CN102213795B (zh) * 2010-04-15 2014-07-30 上海圭光科技有限公司 光波导的外延制备方法
US20130056442A1 (en) * 2010-04-29 2013-03-07 Bing Li Optical waveguide fabrication method
JP5685843B2 (ja) * 2010-07-13 2015-03-18 日本電気株式会社 光導波路の製造方法および光導波路
US9977188B2 (en) 2011-08-30 2018-05-22 Skorpios Technologies, Inc. Integrated photonics mode expander
CN103926648A (zh) * 2013-01-16 2014-07-16 江苏尚飞光电科技有限公司 Soi基波导耦合器及其制备方法
DE112013007697B4 (de) * 2013-12-20 2021-12-09 Intel Corporation Fotodetektor mit einer sich verjüngenden Wellenleiterstruktur sowie Verfahren und System
US9664855B2 (en) 2014-03-07 2017-05-30 Skorpios Technologies, Inc. Wide shoulder, high order mode filter for thick-silicon waveguides
EP3149522A4 (en) * 2014-05-27 2018-02-21 Skorpios Technologies, Inc. Waveguide mode expander using amorphous silicon
US10317620B2 (en) * 2015-07-01 2019-06-11 Rockley Photonics Limited Interposer beam expander chip
FR3040499B1 (fr) 2015-08-24 2017-10-13 St Microelectronics Crolles 2 Sas Circuit integre comprenant un dispositif actif de confinement d'un flux lumineux
JP2017211550A (ja) * 2016-05-26 2017-11-30 住友電気工業株式会社 マッハツェンダ変調器、マッハツェンダ変調器を作製する方法
WO2018011373A1 (en) * 2016-07-13 2018-01-18 Rockley Photonics Limited Integrated structure and manufacturing method thereof
US10649148B2 (en) 2017-10-25 2020-05-12 Skorpios Technologies, Inc. Multistage spot size converter in silicon photonics
US11360263B2 (en) 2019-01-31 2022-06-14 Skorpios Technologies. Inc. Self-aligned spot size converter
US20220276438A1 (en) * 2019-11-15 2022-09-01 Rockley Photonics Limited Optoelectronic device and method of manufacture thereof
CN113126217B (zh) * 2020-01-16 2022-11-11 华为技术有限公司 一种光发端器件、光发端器件的制备方法及光通信设备
US20230090189A1 (en) * 2021-09-22 2023-03-23 Rockley Photonics Limited Optoelectronic device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5078516A (en) * 1990-11-06 1992-01-07 Bell Communications Research, Inc. Tapered rib waveguides
US5263111A (en) * 1991-04-15 1993-11-16 Raychem Corporation Optical waveguide structures and formation methods
GB9202463D0 (en) * 1992-02-05 1992-03-18 British Telecomm Silica waveguide structure
AU5997896A (en) * 1995-06-07 1996-12-30 Christian Laurent-Lund A method of making integrated optical waveguides, and an opt ical unit having integrated optical waveguides
US5841931A (en) * 1996-11-26 1998-11-24 Massachusetts Institute Of Technology Methods of forming polycrystalline semiconductor waveguides for optoelectronic integrated circuits, and devices formed thereby
US5880491A (en) * 1997-01-31 1999-03-09 The United States Of America As Represented By The Secretary Of The Air Force SiC/111-V-nitride heterostructures on SiC/SiO2 /Si for optoelectronic devices
GB2317023B (en) * 1997-02-07 1998-07-29 Bookham Technology Ltd A tapered rib waveguide
GB2334789B (en) * 1998-06-12 2000-01-19 Bookham Technology Ltd A waveguide end face
KR100277695B1 (ko) * 1998-09-12 2001-02-01 정선종 에스 오 아이 광도파로를 이용한 하이브리드 광집적회로용 기판 제조방법
KR100333900B1 (ko) * 1999-01-21 2002-04-24 윤종용 모드모양 변환기, 그 제작 방법 및 이를 구비한 집적광학 소자

Also Published As

Publication number Publication date
WO2001027670A1 (en) 2001-04-19
US6509139B1 (en) 2003-01-21
GB2355312A (en) 2001-04-18
CA2386679A1 (en) 2001-04-19
JP2003511737A (ja) 2003-03-25
EP1230569A1 (en) 2002-08-14
AU7804700A (en) 2001-04-23
GB9924098D0 (en) 1999-12-15
KR20020070265A (ko) 2002-09-05
CN1409826A (zh) 2003-04-09
GB2355312B (en) 2001-09-12

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