FR3040499B1 - Circuit integre comprenant un dispositif actif de confinement d'un flux lumineux - Google Patents

Circuit integre comprenant un dispositif actif de confinement d'un flux lumineux

Info

Publication number
FR3040499B1
FR3040499B1 FR1557883A FR1557883A FR3040499B1 FR 3040499 B1 FR3040499 B1 FR 3040499B1 FR 1557883 A FR1557883 A FR 1557883A FR 1557883 A FR1557883 A FR 1557883A FR 3040499 B1 FR3040499 B1 FR 3040499B1
Authority
FR
France
Prior art keywords
integrated circuit
active device
luminous flow
luminous
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1557883A
Other languages
English (en)
Other versions
FR3040499A1 (fr
Inventor
Charles Baudot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics Crolles 2 SAS
Original Assignee
STMicroelectronics Crolles 2 SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics Crolles 2 SAS filed Critical STMicroelectronics Crolles 2 SAS
Priority to FR1557883A priority Critical patent/FR3040499B1/fr
Priority to US15/051,904 priority patent/US10073219B2/en
Publication of FR3040499A1 publication Critical patent/FR3040499A1/fr
Application granted granted Critical
Publication of FR3040499B1 publication Critical patent/FR3040499B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
FR1557883A 2015-08-24 2015-08-24 Circuit integre comprenant un dispositif actif de confinement d'un flux lumineux Expired - Fee Related FR3040499B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1557883A FR3040499B1 (fr) 2015-08-24 2015-08-24 Circuit integre comprenant un dispositif actif de confinement d'un flux lumineux
US15/051,904 US10073219B2 (en) 2015-08-24 2016-02-24 Integrated circuit including an active device for confinement of a light flux defined by trenches having a tiered sidewall

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1557883A FR3040499B1 (fr) 2015-08-24 2015-08-24 Circuit integre comprenant un dispositif actif de confinement d'un flux lumineux

Publications (2)

Publication Number Publication Date
FR3040499A1 FR3040499A1 (fr) 2017-03-03
FR3040499B1 true FR3040499B1 (fr) 2017-10-13

Family

ID=54291511

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1557883A Expired - Fee Related FR3040499B1 (fr) 2015-08-24 2015-08-24 Circuit integre comprenant un dispositif actif de confinement d'un flux lumineux

Country Status (2)

Country Link
US (1) US10073219B2 (fr)
FR (1) FR3040499B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10466515B2 (en) 2016-03-15 2019-11-05 Intel Corporation On-chip optical isolator
US20180059446A1 (en) * 2016-08-29 2018-03-01 Woosung Kim Optical iso-modulator
US11500157B1 (en) 2019-03-22 2022-11-15 Ciena Corporation Silicon Selective Epitaxial Growth (SEG) applied to a Silicon on Insulator (SOI) wafer to provide a region of customized thickness
US10866440B1 (en) * 2019-07-17 2020-12-15 Taiwan Semiconductor Manufacturing Company, Ltd. Optical modulator and package

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5757986A (en) * 1993-09-21 1998-05-26 Bookham Technology Limited Integrated silicon pin diode electro-optic waveguide
US6936839B2 (en) * 1996-10-16 2005-08-30 The University Of Connecticut Monolithic integrated circuit including a waveguide and quantum well inversion channel devices and a method of fabricating same
GB2323450A (en) * 1997-03-20 1998-09-23 Secr Defence Optical modulator
GB2355312B (en) * 1999-10-13 2001-09-12 Bookham Technology Ltd Method of fabricating an integrated optical component
JP4860022B2 (ja) * 2000-01-25 2012-01-25 エルピーダメモリ株式会社 半導体集積回路装置の製造方法
GB0216143D0 (en) * 2002-07-12 2002-08-21 Bookham Technology Plc Semiconductor optical waveguide device
US7555173B2 (en) * 2003-04-09 2009-06-30 Cornell Research Foundation, Inc. Electro-optic modulator on rib waveguide
US7528403B1 (en) * 2005-04-25 2009-05-05 California Institute Of Technology Hybrid silicon-on-insulator waveguide devices
US7694911B2 (en) * 2005-10-20 2010-04-13 Eggen Thomas P Flexible conduit dispensing device
US7642144B2 (en) * 2006-12-22 2010-01-05 Texas Instruments Incorporated Transistors with recessed active trenches for increased effective gate width
KR101382505B1 (ko) * 2007-09-03 2014-04-10 삼성전자주식회사 반도체 집적 회로 장치 및 그 제조 방법
KR100907250B1 (ko) * 2007-12-10 2009-07-10 한국전자통신연구원 도파로 구조체
WO2009075684A1 (fr) * 2007-12-12 2009-06-18 Hewlett-Packard Development Company, L.P. Résonateur annulaire optique commandable possédant des électrodes de commande périodiquement espacées
US8111724B2 (en) * 2009-07-07 2012-02-07 International Business Machines Corporation Temperature control device for optoelectronic devices
US8300990B2 (en) * 2010-04-14 2012-10-30 Oracle America, Inc. Slotted optical waveguide with electro-optic material
JP5455955B2 (ja) * 2011-03-23 2014-03-26 株式会社東芝 リング光変調器
JP5942785B2 (ja) * 2012-10-31 2016-06-29 住友電気工業株式会社 半導体光素子を作製する方法
FR3011346A1 (fr) * 2013-10-02 2015-04-03 St Microelectronics Sa Dephaseur electro-optique a capacite d'oxyde

Also Published As

Publication number Publication date
US10073219B2 (en) 2018-09-11
US20170059774A1 (en) 2017-03-02
FR3040499A1 (fr) 2017-03-03

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