AU2001243161A1 - Method for fabrication of vertically coupled integrated optical structures - Google Patents

Method for fabrication of vertically coupled integrated optical structures

Info

Publication number
AU2001243161A1
AU2001243161A1 AU2001243161A AU4316101A AU2001243161A1 AU 2001243161 A1 AU2001243161 A1 AU 2001243161A1 AU 2001243161 A AU2001243161 A AU 2001243161A AU 4316101 A AU4316101 A AU 4316101A AU 2001243161 A1 AU2001243161 A1 AU 2001243161A1
Authority
AU
Australia
Prior art keywords
fabrication
integrated optical
optical structures
vertically coupled
coupled integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001243161A
Inventor
Philippe Absil
Ping-Tong Ho
John Hryniewicz
Oliver King
Brent Little
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Maryland at College Park
Original Assignee
University of Maryland at Baltimore
University of Maryland at College Park
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Maryland at Baltimore, University of Maryland at College Park filed Critical University of Maryland at Baltimore
Publication of AU2001243161A1 publication Critical patent/AU2001243161A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12109—Filter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12164—Multiplexing; Demultiplexing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
AU2001243161A 2000-08-01 2001-03-05 Method for fabrication of vertically coupled integrated optical structures Abandoned AU2001243161A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US22235600P 2000-08-01 2000-08-01
US60222356 2000-08-01
US25969801P 2001-01-05 2001-01-05
US60259698 2001-01-05
PCT/US2001/004943 WO2002010814A1 (en) 2000-08-01 2001-03-05 Method for fabrication of vertically coupled integrated optical structures

Publications (1)

Publication Number Publication Date
AU2001243161A1 true AU2001243161A1 (en) 2002-02-13

Family

ID=26916703

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001243161A Abandoned AU2001243161A1 (en) 2000-08-01 2001-03-05 Method for fabrication of vertically coupled integrated optical structures

Country Status (3)

Country Link
US (1) US6859603B2 (en)
AU (1) AU2001243161A1 (en)
WO (1) WO2002010814A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3768901B2 (en) 2002-02-28 2006-04-19 松下電器産業株式会社 Manufacturing method of three-dimensional optical waveguide
US7259106B2 (en) * 2004-09-10 2007-08-21 Versatilis Llc Method of making a microelectronic and/or optoelectronic circuitry sheet
US7541256B2 (en) * 2007-03-28 2009-06-02 Sarnoff Corporation Method of fabricating back-illuminated imaging sensors using a bump bonding technique
JP4901768B2 (en) * 2008-01-18 2012-03-21 株式会社東芝 Optical multiplexer / demultiplexer
KR100953658B1 (en) * 2008-06-05 2010-04-20 삼성모바일디스플레이주식회사 Organic light emitting diode display device
US8159060B2 (en) 2009-10-29 2012-04-17 International Business Machines Corporation Hybrid bonding interface for 3-dimensional chip integration
US20120045167A1 (en) * 2010-08-23 2012-02-23 Telefonaktiebolaget L M Ericsson (Publ) Multi-Tier Micro-Ring Resonator Optical Interconnect System
CN104242052B (en) * 2013-06-18 2018-01-19 中国科学院苏州纳米技术与纳米仿生研究所 Ring cavity device and preparation method thereof
CN103529514B (en) * 2013-10-30 2015-11-25 上海美维科技有限公司 A kind of manufacture method of buried optical waveguide printed wiring board
US11067750B2 (en) * 2019-01-28 2021-07-20 Cisco Technology, Inc. Silicon photonics platform with integrated oxide trench edge coupler structure
IL293578A (en) * 2019-12-09 2022-08-01 Deepsight Tech Inc Whispering gallery mode resonators for sensing applications
CN213365546U (en) * 2020-07-31 2021-06-04 捷德(中国)科技有限公司 Identification card
CN114137659A (en) * 2021-11-02 2022-03-04 中国航空工业集团公司北京长城计量测试技术研究所 Micro-cavity chip and preparation method thereof
CN114608632B (en) * 2022-04-15 2024-01-19 南京邮电大学 Multilayer multi-wavelength multi-mode multi-parameter micro-ring sensor and preparation method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4054363A (en) * 1975-12-15 1977-10-18 Tokyo Institute Of Technology Multi-hetero-structure waveguide type optical integrated circuitry
US4923264A (en) * 1989-01-18 1990-05-08 University Of Pittsburgh Of The Commonwealth System Of Higher Education Resonance coupled optical coupler with semiconductor waveguide layer comprising a multi-quantum-well structure
FR2660439B1 (en) * 1990-03-27 1993-06-04 Thomson Csf GUIDING STRUCTURE INTEGRATED IN THREE DIMENSIONS AND ITS MANUFACTURING METHOD.
US5790583A (en) * 1995-05-25 1998-08-04 Northwestern University Photonic-well Microcavity light emitting devices
US5878070A (en) * 1995-05-25 1999-03-02 Northwestern University Photonic wire microcavity light emitting devices
FR2776784A1 (en) * 1998-03-30 1999-10-01 France Telecom Electro-optical modulator, forming a Pockels cell
WO2000050938A1 (en) * 1999-02-22 2000-08-31 Massachusetts Institute Of Technology Vertically coupled optical resonator devices over a cross-grid waveguide architecture
US6303978B1 (en) * 2000-07-27 2001-10-16 Motorola, Inc. Optical semiconductor component and method of manufacture

Also Published As

Publication number Publication date
WO2002010814A1 (en) 2002-02-07
US6859603B2 (en) 2005-02-22
US20040022513A1 (en) 2004-02-05

Similar Documents

Publication Publication Date Title
AU2001226100A1 (en) Method for high yield reticle formation
GB2355312B (en) Method of fabricating an integrated optical component
EP1271195A3 (en) Method of manufacturing optical waveguide device
AU1307001A (en) Manufacturing method of optical lens
AU2002306289A1 (en) Method of manufacturing silicon
AU2002308572A1 (en) Method for separating silica waveguides
AU2002360008A1 (en) Method for producing ceramic optical parts
AU2001240043A1 (en) Apparatus and method for fabrication of photonic crystals
AU2001243161A1 (en) Method for fabrication of vertically coupled integrated optical structures
AU2002309632A1 (en) Method and structure for aligning optical elements
AU2002229014A1 (en) Optical waveguides and method of fabrication thereof
EP1187196A3 (en) Method of manufacturing an optical semiconductor module
AU2001227954A1 (en) Method for manufacturing concrete
AU2001254936A1 (en) Method of reinforcing structures
EP1457794A4 (en) Method for forming optical waveguide
AU2001230561A1 (en) Method of manufacturing optical fiber
AU2001261662A1 (en) Laser fabrication of ceramic parts
AU2002227036A1 (en) Method of creating photonic via
AU2002212750A1 (en) Method for fabricating semiconductor photodetector
AU2001238546A1 (en) Method for the production of 2-mercaptobenzothiazole
AU2001289781A1 (en) Method for nuclear chlorination of ortho-xylol
AU2002226872A1 (en) Integrated optic gyroscope and method of fabrication
AU2001259927A1 (en) Method for reducing the surface of silicon dioxide
AU2001278519A1 (en) Method for nuclear chlorination of meta-xylol
AU2001277843A1 (en) Method for aligning optical components