IL141671A0 - Pellicle and method of using the same - Google Patents
Pellicle and method of using the sameInfo
- Publication number
- IL141671A0 IL141671A0 IL14167101A IL14167101A IL141671A0 IL 141671 A0 IL141671 A0 IL 141671A0 IL 14167101 A IL14167101 A IL 14167101A IL 14167101 A IL14167101 A IL 14167101A IL 141671 A0 IL141671 A0 IL 141671A0
- Authority
- IL
- Israel
- Prior art keywords
- pellicle
- adhesive
- bonding
- ultra
- same
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Medical Preparation Storing Or Oral Administration Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000164473 | 2000-06-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
IL141671A0 true IL141671A0 (en) | 2002-03-10 |
Family
ID=18668087
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL14167101A IL141671A0 (en) | 2000-06-01 | 2001-02-27 | Pellicle and method of using the same |
Country Status (7)
Country | Link |
---|---|
US (1) | US6713200B2 (de) |
EP (1) | EP1160624B1 (de) |
KR (1) | KR20010109470A (de) |
AT (1) | ATE324619T1 (de) |
DE (1) | DE60119026T2 (de) |
IL (1) | IL141671A0 (de) |
TW (1) | TWI269367B (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000292908A (ja) * | 1999-04-02 | 2000-10-20 | Shin Etsu Chem Co Ltd | リソグラフィー用ペリクル |
JP2003302745A (ja) * | 2002-04-12 | 2003-10-24 | Dainippon Printing Co Ltd | 異物の無害化方法 |
US6984058B2 (en) | 2003-06-04 | 2006-01-10 | 3M Innovative Properties Company | Optical filters comprising opacified portion |
US7829248B2 (en) * | 2007-07-24 | 2010-11-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pellicle stress relief |
JP5169206B2 (ja) * | 2007-12-21 | 2013-03-27 | 日本電気株式会社 | フォトマスク受納器並びにこれを用いるレジスト検査方法及びその装置 |
JP4979088B2 (ja) * | 2008-05-14 | 2012-07-18 | 信越化学工業株式会社 | 半導体リソグラフィー用ペリクル |
WO2013158335A1 (en) * | 2012-04-18 | 2013-10-24 | Applied Materials, Inc. | Apparatus and method to reduce particles in advance anneal process |
JP7091121B2 (ja) | 2018-04-18 | 2022-06-27 | 信越石英株式会社 | 石英ガラス板 |
KR102579196B1 (ko) * | 2018-07-05 | 2023-09-14 | 어플라이드 머티어리얼스, 인코포레이티드 | 포토마스크 펠리클 접착제 잔류물 제거 |
JP7061288B2 (ja) * | 2018-08-28 | 2022-04-28 | 日本軽金属株式会社 | フラットパネルディスプレイ用ペリクル枠体及びその製造方法 |
CN113253566B (zh) * | 2020-02-10 | 2024-04-09 | 永恒光实业股份有限公司 | 复合精细遮罩 |
CN112707016B (zh) * | 2021-01-04 | 2023-02-17 | 长鑫存储技术有限公司 | 光罩保护装置及光罩保护系统 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63262651A (ja) * | 1987-04-21 | 1988-10-28 | Seiko Epson Corp | フオトマスク保護膜 |
JPH01265513A (ja) * | 1988-04-15 | 1989-10-23 | Nec Corp | 縮小投影露光装置 |
US5531857A (en) * | 1988-07-08 | 1996-07-02 | Cauldron Limited Partnership | Removal of surface contaminants by irradiation from a high energy source |
JP2938636B2 (ja) * | 1991-09-26 | 1999-08-23 | 信越化学工業株式会社 | リソグラフィ−用ペリクル |
JPH0772617A (ja) | 1993-09-02 | 1995-03-17 | Shin Etsu Chem Co Ltd | ペリクル |
US5453816A (en) * | 1994-09-22 | 1995-09-26 | Micro Lithography, Inc. | Protective mask for pellicle |
JP3529062B2 (ja) * | 1994-10-07 | 2004-05-24 | 株式会社渡辺商行 | ペリクル及びレチクル |
KR100253381B1 (ko) * | 1997-12-17 | 2000-06-01 | 김영환 | 재활용 마스크 및 그 제조방법과 재활용방법 |
US6197454B1 (en) * | 1998-12-29 | 2001-03-06 | Intel Corporation | Clean-enclosure window to protect photolithographic mask |
-
2001
- 2001-02-26 EP EP01104418A patent/EP1160624B1/de not_active Expired - Lifetime
- 2001-02-26 AT AT01104418T patent/ATE324619T1/de not_active IP Right Cessation
- 2001-02-26 DE DE60119026T patent/DE60119026T2/de not_active Expired - Fee Related
- 2001-02-27 IL IL14167101A patent/IL141671A0/xx unknown
- 2001-02-28 KR KR1020010010344A patent/KR20010109470A/ko not_active Application Discontinuation
- 2001-03-01 US US09/795,329 patent/US6713200B2/en not_active Expired - Fee Related
- 2001-03-29 TW TW090107534A patent/TWI269367B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US6713200B2 (en) | 2004-03-30 |
TWI269367B (en) | 2006-12-21 |
DE60119026D1 (de) | 2006-06-01 |
EP1160624B1 (de) | 2006-04-26 |
EP1160624A2 (de) | 2001-12-05 |
ATE324619T1 (de) | 2006-05-15 |
DE60119026T2 (de) | 2006-11-30 |
US20020007907A1 (en) | 2002-01-24 |
KR20010109470A (ko) | 2001-12-10 |
EP1160624A3 (de) | 2003-10-22 |
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