IL137427A0 - Method for making uhp tungsten hexafluoride - Google Patents
Method for making uhp tungsten hexafluorideInfo
- Publication number
- IL137427A0 IL137427A0 IL13742700A IL13742700A IL137427A0 IL 137427 A0 IL137427 A0 IL 137427A0 IL 13742700 A IL13742700 A IL 13742700A IL 13742700 A IL13742700 A IL 13742700A IL 137427 A0 IL137427 A0 IL 137427A0
- Authority
- IL
- Israel
- Prior art keywords
- making
- tungsten hexafluoride
- uhp
- uhp tungsten
- hexafluoride
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G41/00—Compounds of tungsten
- C01G41/04—Halides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/358,550 US6103212A (en) | 1999-07-22 | 1999-07-22 | Method for making UHP tungsten hexafluoride |
Publications (1)
Publication Number | Publication Date |
---|---|
IL137427A0 true IL137427A0 (en) | 2001-07-24 |
Family
ID=23410112
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL13742700A IL137427A0 (en) | 1999-07-22 | 2000-07-20 | Method for making uhp tungsten hexafluoride |
Country Status (8)
Country | Link |
---|---|
US (1) | US6103212A (ja) |
EP (1) | EP1070680A1 (ja) |
JP (1) | JP2001048543A (ja) |
KR (1) | KR20010049821A (ja) |
CN (1) | CN1281823A (ja) |
CA (1) | CA2314385A1 (ja) |
IL (1) | IL137427A0 (ja) |
TW (1) | TW499398B (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001172020A (ja) * | 1999-12-16 | 2001-06-26 | Stella Chemifa Corp | 高純度六フッ化タングステンの精製方法 |
KR20080074195A (ko) * | 2005-11-28 | 2008-08-12 | 매티슨 트라이-개스, 인크. | 화학증착에 의해서 형성된 기체 저장 컨테이너 라이닝 |
US20090068086A1 (en) * | 2007-09-07 | 2009-03-12 | Richard Allen Hogle | Method and apparatus for the production of high purity tungsten hexafluoride |
CN103922414B (zh) * | 2014-04-30 | 2016-04-13 | 邯郸净化设备研究所 | 一种连续精馏纯化六氟化钨的方法及装置 |
US10100406B2 (en) | 2015-04-17 | 2018-10-16 | Versum Materials Us, Llc | High purity tungsten hexachloride and method for making same |
CN104973629B (zh) * | 2015-06-25 | 2017-03-01 | 厦门钨业股份有限公司 | 一种六氟化钨气体的提纯方法 |
CN105214332A (zh) * | 2015-11-02 | 2016-01-06 | 湖南省华京粉体材料有限公司 | 一种六氯化钨生产过程中脱气降块的方法和装置 |
CN106902526B (zh) * | 2015-12-23 | 2019-06-14 | 中国科学院上海应用物理研究所 | 高温熔盐鼓泡蒸发分离装置、应用及分离CsF方法 |
CN105797550B (zh) * | 2016-03-11 | 2018-05-22 | 黎明化工研究设计院有限责任公司 | 一种用于制备高纯六氟化钨的吸附塔及其使用方法 |
CN105819515A (zh) * | 2016-04-05 | 2016-08-03 | 张玲 | 一种六氟化钨的制备方法 |
CN105668639B (zh) * | 2016-04-05 | 2017-06-13 | 浙江博瑞电子科技有限公司 | 一种吸附提纯六氟化钨的方法 |
CN107459062A (zh) * | 2016-06-03 | 2017-12-12 | 和立气体(上海)有限公司 | 一种高纯六氟化钨的生产方法和生产装置 |
CN111689522A (zh) * | 2020-07-06 | 2020-09-22 | 厚成新材料(南通)有限公司 | 一种高纯度六氟化钨气体生产方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3711596A (en) * | 1965-03-04 | 1973-01-16 | Gulf Design And Eng Corp | Recovery of hydrogen fluoride |
US3798875A (en) * | 1972-02-22 | 1974-03-26 | Ici Ltd | Recovery of hydrogen fluoride |
US3995011A (en) * | 1975-10-14 | 1976-11-30 | Olin Corporation | Preparation of tungsten hexafluoride from halogen and hydrogen fluoride |
US4432945A (en) * | 1981-11-04 | 1984-02-21 | The United States Of America As Represented By The Department Of Energy | Removing oxygen from a solvent extractant in an uranium recovery process |
US5348723A (en) * | 1990-02-07 | 1994-09-20 | Bandgap Technology Corporation | Synthesis of semiconductor grade tungsten hexafluoride |
US5324498A (en) * | 1990-03-30 | 1994-06-28 | Bandgap Chemical Corporation | Purification of tungsten hexafluoride |
-
1999
- 1999-07-22 US US09/358,550 patent/US6103212A/en not_active Expired - Fee Related
-
2000
- 2000-06-26 TW TW089112551A patent/TW499398B/zh active
- 2000-07-19 JP JP2000218402A patent/JP2001048543A/ja not_active Withdrawn
- 2000-07-20 CN CN00121603.1A patent/CN1281823A/zh active Pending
- 2000-07-20 KR KR1020000041556A patent/KR20010049821A/ko not_active Application Discontinuation
- 2000-07-20 EP EP00115670A patent/EP1070680A1/en not_active Withdrawn
- 2000-07-20 IL IL13742700A patent/IL137427A0/xx unknown
- 2000-07-20 CA CA002314385A patent/CA2314385A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
TW499398B (en) | 2002-08-21 |
US6103212A (en) | 2000-08-15 |
JP2001048543A (ja) | 2001-02-20 |
CN1281823A (zh) | 2001-01-31 |
EP1070680A1 (en) | 2001-01-24 |
KR20010049821A (ko) | 2001-06-15 |
CA2314385A1 (en) | 2001-01-22 |
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