IL137427A0 - Method for making uhp tungsten hexafluoride - Google Patents

Method for making uhp tungsten hexafluoride

Info

Publication number
IL137427A0
IL137427A0 IL13742700A IL13742700A IL137427A0 IL 137427 A0 IL137427 A0 IL 137427A0 IL 13742700 A IL13742700 A IL 13742700A IL 13742700 A IL13742700 A IL 13742700A IL 137427 A0 IL137427 A0 IL 137427A0
Authority
IL
Israel
Prior art keywords
making
tungsten hexafluoride
uhp
uhp tungsten
hexafluoride
Prior art date
Application number
IL13742700A
Other languages
English (en)
Original Assignee
Praxair Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair Technology Inc filed Critical Praxair Technology Inc
Publication of IL137427A0 publication Critical patent/IL137427A0/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G41/00Compounds of tungsten
    • C01G41/04Halides
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/80Compositional purity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Chemical Vapour Deposition (AREA)
IL13742700A 1999-07-22 2000-07-20 Method for making uhp tungsten hexafluoride IL137427A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/358,550 US6103212A (en) 1999-07-22 1999-07-22 Method for making UHP tungsten hexafluoride

Publications (1)

Publication Number Publication Date
IL137427A0 true IL137427A0 (en) 2001-07-24

Family

ID=23410112

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13742700A IL137427A0 (en) 1999-07-22 2000-07-20 Method for making uhp tungsten hexafluoride

Country Status (8)

Country Link
US (1) US6103212A (ja)
EP (1) EP1070680A1 (ja)
JP (1) JP2001048543A (ja)
KR (1) KR20010049821A (ja)
CN (1) CN1281823A (ja)
CA (1) CA2314385A1 (ja)
IL (1) IL137427A0 (ja)
TW (1) TW499398B (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001172020A (ja) * 1999-12-16 2001-06-26 Stella Chemifa Corp 高純度六フッ化タングステンの精製方法
KR20080074195A (ko) * 2005-11-28 2008-08-12 매티슨 트라이-개스, 인크. 화학증착에 의해서 형성된 기체 저장 컨테이너 라이닝
US20090068086A1 (en) * 2007-09-07 2009-03-12 Richard Allen Hogle Method and apparatus for the production of high purity tungsten hexafluoride
CN103922414B (zh) * 2014-04-30 2016-04-13 邯郸净化设备研究所 一种连续精馏纯化六氟化钨的方法及装置
US10100406B2 (en) 2015-04-17 2018-10-16 Versum Materials Us, Llc High purity tungsten hexachloride and method for making same
CN104973629B (zh) * 2015-06-25 2017-03-01 厦门钨业股份有限公司 一种六氟化钨气体的提纯方法
CN105214332A (zh) * 2015-11-02 2016-01-06 湖南省华京粉体材料有限公司 一种六氯化钨生产过程中脱气降块的方法和装置
CN106902526B (zh) * 2015-12-23 2019-06-14 中国科学院上海应用物理研究所 高温熔盐鼓泡蒸发分离装置、应用及分离CsF方法
CN105797550B (zh) * 2016-03-11 2018-05-22 黎明化工研究设计院有限责任公司 一种用于制备高纯六氟化钨的吸附塔及其使用方法
CN105819515A (zh) * 2016-04-05 2016-08-03 张玲 一种六氟化钨的制备方法
CN105668639B (zh) * 2016-04-05 2017-06-13 浙江博瑞电子科技有限公司 一种吸附提纯六氟化钨的方法
CN107459062A (zh) * 2016-06-03 2017-12-12 和立气体(上海)有限公司 一种高纯六氟化钨的生产方法和生产装置
CN111689522A (zh) * 2020-07-06 2020-09-22 厚成新材料(南通)有限公司 一种高纯度六氟化钨气体生产方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3711596A (en) * 1965-03-04 1973-01-16 Gulf Design And Eng Corp Recovery of hydrogen fluoride
US3798875A (en) * 1972-02-22 1974-03-26 Ici Ltd Recovery of hydrogen fluoride
US3995011A (en) * 1975-10-14 1976-11-30 Olin Corporation Preparation of tungsten hexafluoride from halogen and hydrogen fluoride
US4432945A (en) * 1981-11-04 1984-02-21 The United States Of America As Represented By The Department Of Energy Removing oxygen from a solvent extractant in an uranium recovery process
US5348723A (en) * 1990-02-07 1994-09-20 Bandgap Technology Corporation Synthesis of semiconductor grade tungsten hexafluoride
US5324498A (en) * 1990-03-30 1994-06-28 Bandgap Chemical Corporation Purification of tungsten hexafluoride

Also Published As

Publication number Publication date
TW499398B (en) 2002-08-21
US6103212A (en) 2000-08-15
JP2001048543A (ja) 2001-02-20
CN1281823A (zh) 2001-01-31
EP1070680A1 (en) 2001-01-24
KR20010049821A (ko) 2001-06-15
CA2314385A1 (en) 2001-01-22

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